Inta lagu jiro habka uumiga epitaxy (VPE), doorka salku waa in la taageero substrate-ka iyo in la hubiyo kuleyl isku mid ah inta lagu jiro habka koritaanka. Noocyada kala duwan ee lugaha ayaa ku habboon xaaladaha koritaanka kala duwan iyo hababka alaabta. Kuwa soo socda waa qaar ka mid ah noocyada caadiga ah ee loo isticmaalo marxaladda uumigaepitaxy:
Foosto foosto
Lugaha foostada waxaa caadi ahaan loo adeegsadaa hababka wejiga uumiga ee toosan ama leexleexan. Waxay hayn karaan substrate-ka waxayna u oggolaanayaan gaaska inuu ku dul qulqulo substrate-ka, taas oo ka caawisa in la gaaro korriinka epitaxial lebbiska.
Saldhig-qaabeeya (korka toosan)
Sagxadaha qaabaysan disc waxay ku habboon yihiin nidaamyada wajiga uumiga tooska ah ee epitaxy, kaas oo substrate-ka si toosan loo dhigo. Naqshadani waxay kaa caawinaysaa yaraynta aagga xidhiidhka u dhexeeya substrate-ka iyo daneeyaha, taas oo hoos u dhigaysa luminta kulaylka iyo wasakhowga suurtagalka ah.
Susceptor horizontal
Susceptors Horizontal aad kuma yar tahay wajiga uumiga epitaxy, laakiin waxaa laga yaabaa in loo isticmaalo hababka koritaanka gaarka ah qaarkood si loogu oggolaado koritaanka epitaxial ee jihada toosan.
Dareen-celinta epitaxial monolithic
Susceptor monolithic epitaxial susceptor waxaa loogu talagalay hal substrate, kaas oo bixin kara xakamaynta heerkulka saxda ah iyo go'doominta kulaylka wanaagsan, oo ku habboon koritaanka lakabyada epitaxial tayo sare leh.
Ku soo dhawoow mareegahayaga macluumaadka alaabta iyo latalinta.
Websaydhkeena: https://www.vet-china.com/
Waqtiga boostada: Jul-30-2024