Shuruudaha warshadaha Semiconductor ee shuruudaha walxaha garaafyada ayaa si gaar ah u sarreeya, cabbirka qaybta ganaaxa ee graphite wuxuu leeyahay sax sare, iska caabin heerkul sarreeya, xoog sare, khasaaro yar iyo faa'iidooyin kale, sida: alaabada graphite ee caaryada ah.Sababtoo ah qalabka graphite ee loo isticmaalo warshadaha semiconductor (oo ay ku jiraan kuleyliyeyaasha iyo dhimashadooda sintered) ayaa looga baahan yahay inay u adkeystaan hababka kululaynta iyo qaboojinta soo noqnoqda, si loo kordhiyo nolosha adeegga qalabka garaafka, waxaa badanaa loo baahan yahay in qalabka garaafka ee loo isticmaalo ay leeyihiin waxqabad xasilloon. iyo shaqada saamaynta kulaylka u adkaysata.
01 Qalabka graphite ee koritaanka crystal semiconductor
Dhammaan hababka loo isticmaalo si ay u koraan kiristaalo semiconductor waxay ku hoos shaqeeyaan heerkulka sare iyo deegaanka daxalka. Aagga kulul ee foornada koritaanka crystal waxaa sida caadiga ah lagu qalabeeyaa kulaylka u adkaysta iyo daxalka u adkaysta qaybaha graphite-ka nadiifka ah ee sare, sida kuleyliyaha, crucible, dhululubada dahaarka, dhululubada hagaha, electrode, qaboojiyaha, lowska electrode, iwm.
Waxaan soo saari karnaa dhammaan qaybaha graphite ee qalabka wax soo saarka crystal, kaas oo la keeni karo si gaar ah ama in sets, ama qaybo graphite habaysan ee cabbirro kala duwan sida waafaqsan shuruudaha macaamiisha. Baaxadda alaabta waxaa lagu qiyaasi karaa goobta, iyo nuxurka dambaska ee alaabta la dhammeeyey way yarayn kartaain ka badan 5ppm.
02 Qalabka graphite ee epitaxy semiconductor
Habka Epitaxial waxaa loola jeedaa kobaca lakabka walxo crystal ah oo leh qaab isku mid ah oo lattice ah sida substrate-ka substrate-ka quraaradda ah. Habka epitaxial, waferka waxaa lagu shubaa saxanka garaafka. Waxqabadka iyo tayada saxanka garaafka ayaa door muhiim ah ka ciyaara tayada lakabka epitaxial ee waferka. Dhinaca wax soo saarka epitaxial, wax badan oo ka mid ah garaafyada nadiifka ah ee ultra-sare iyo saldhig graphite saafi ah oo nadiif ah oo leh daahan SIC ayaa loo baahan yahay.
Saldhigga graphite ee shirkadeena ee semiconductor epitaxy waxay leedahay codsiyo kala duwan, waxay la jaan qaadi kartaa inta badan qalabka sida caadiga ah loo isticmaalo warshadaha, waxayna leedahay nadiif sare, daahan labis ah, nolol adeeg oo aad u fiican, iyo iska caabin kiimikaad sare leh iyo xasilloonida kuleylka.
03 Qalabka graphite ee ion implantation
Ion implantation waxaa loola jeedaa habka loo dardar geliyo beam balasmaha ee boron, fosfooraska iyo arsenic tamar gaar ah, ka dibna waxaa lagu duraa lakabka dusha sare ee alaabta wafer si ay u beddelaan sifooyinka alaabta lakabka dusha. Qaybaha qalabka ion-ku-gelinta waa in laga sameeyaa walxo nadiif ah oo leh caabbinta kulaylka aadka u fiican, kulaylka kuleylka, daxalka yar ee ay keento ion beam iyo nuxurka wasakhda hoose. Grafit-nadiifinta sare waxay buuxisaa shuruudaha codsiga, waxaana loo isticmaali karaa tuubada duulimaadka, jeexjeexyada kala duwan, korantada, daboolka korantada, marinnada, terminter-ka, iwm ee qalabka ion implantation.
Ma bixin karno oo kaliya daboolka gaashaadka graphite ee mashiinnada implantation ion kala duwan, laakiin sidoo kale waxaan ku siin karnaa elektrodes graphite nadiif ah oo nadiif ah iyo ilo ion leh caabbinta daxalka sare ee tilmaamo kala duwan. Moodooyinka lagu dabaqi karo: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM iyo qalab kale. Intaa waxaa dheer, waxaan sidoo kale ku siin karnaa dhoobada, tungsten, molybdenum, alaabta aluminium iyo qaybaha dahaarka leh.
04 Qalabka dahaarka graphite iyo kuwa kale
Qalabka dahaadhka kulaylka ee loo isticmaalo qalabka wax-soo-saarka semiconductor waxaa ka mid ah garaafyada adag ee dareema, dareenka jilicsan, xaashida garaafka, xaashida garaafka, iyo xadhigga garaafka.
Dhammaan alaabtayada ceeriin waa graphite dibadda laga keeno, kaas oo la gooyn karaa iyadoo loo eegayo cabbirka gaarka ah ee shuruudaha macaamiisha ama la iibiyo guud ahaan.
Saxaarad kaarboon-kaarboon ah ayaa loo isticmaalaa sida qaadaha dahaarka filimka ee habka wax soo saarka ee silikon monocrystalline qoraxda iyo unugyada silikon polycrystalline. Mabda'a shaqadu waa: Geli chip silikoon gelinta saxaaradda CFC oo u dir tuubada foornada si loo farsameeyo daahan filimka.
