CVD Silicon Carbide Giraanta Garaafka Dahaarka leh

CVD Silicon Carbide Dahaarka Garaafka Girafit Sawirka

Sharaxaad Gaaban:

VET Energy silikoon carbide giraanta garaafyada dahaarka leh waa badeecad waxqabad sare leh oo loogu talagalay inay bixiso waxqabad joogto ah oo la isku halayn karo muddo dheer. Waxay leedahay caabbinta kulaylka wanaagsan iyo lebiska kulaylka, nadiif sare, caabbinta nabaad-guurka, taas oo ka dhigaysa xalka ugu fiican ee codsiyada wax-qabadka wafer.

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Faahfaahinta Alaabta

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Astaamaha Caadiga ah ee Qalabka Garaafiga ee Saldhigga:

Cufnaanta muuqata:	1.85 g/cm3
Iska caabin Koronto:	11 μΩm
Xoog Jilicsan:	49 MPa (500kgf/cm2)
Adag ee Xeebta:	58
Dambas:	<5pm
Habdhaqanka Kulaylka:	116 W/mK (100 kcal/mhr-℃)

Waxaan siinaa susceptors kala duwan iyo qaybaha graphite ee dhammaan reactors epitaxy hadda. Alaabadayada waxaa ka mid ah kuwa qaboojiyaha fuustada ee unugyada LPE, dabaylaha canjeelada ee unugyada LPE, CSD, iyo Gemini, iyo suceyaasha hal-wafer ee loogu talagalay qaybaha ASM.

Marka la isku daro iskaashi adag oo lala yeesho OEM-yada hormuudka ah, khibradda agabka iyo aqoonta wax soo saarka, vet ayaa ku siinaysa naqshadda ugu habboon ee codsigaaga.

VET Energy waa ahsoo saaraha dhabta ah ee alaabta graphite iyo silikoon carbide oo leh daahan CVD,keeni karakala duwanqaybo gaar ah oo loogu talagalay semiconductor iyo warshadaha sawirkavoltaic. Okooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ahadiga.

FCunista alaabtayada:

1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700℃.
2. daahir sare iyoisku mid ahaanshaha kulaylka
3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.
4. Qalafsanaan sare, oogada is haysta, qaybo yaryar.
5. Cimri dheer oo adeeg iyo waarta

CVD SiC薄膜基本物理性能 Tilmaamaha asaasiga ah ee CVD SiCdaahan
性质 / Hanti	典型数值 / Qiimaha caadiga ah
晶体结构 / Dhismaha Crystal	FCC β wejiga多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adag	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Hadhuudhka Size	2 ~ 10μm
纯度 / Nadiifnimada Kiimikada	99.99995%
热容 / Awoodda kulaylka	640 · kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700 ℃
抗弯强度 / Xoog Jilicsan	415 MPa RT 4-dhibic
杨氏模量 Modulka da'da yar	430 Gpa 4pt laab, 1300 ℃
导热系数 / ThermalHab-dhaqanka	300W·m^-1·K^-1
热膨胀系数 / Balaadhinta kulaylka (CTE)	4.5×10^-6K^-1