Mushure mewaferyapfuura neyakapfuura maitiro, iyo chip gadziriro yapedzwa, uye inoda kutemwa kuti iparadzanise machipisi pawafer, uye pakupedzisira yaiswa mukati. Thewaferkucheka nzira yakasarudzwa yewafers ehukobvu hwakasiyana kwakasiyanawo:
▪Wafersnehukobvu hunodarika 100um dzinowanzochekwa nemapanga;
▪Wafersnehupamhi husingasviki 100um dzinowanzochekwa nema lasers. Laser kucheka kunogona kuderedza matambudziko ekusvuura uye kutsemuka, asi kana iri pamusoro pe100um, kugona kwekugadzira kuchaderedzwa zvakanyanya;
▪Wafersnehupamhi husingasviki 30um dzinochekwa ne plasma. Plasma yekucheka inokurumidza uye haizokuvadzi pamusoro pechifukidziro, nekudaro ichivandudza goho, asi maitiro ayo anonyanya kuoma;
Munguva yekucheka kwechifukidziro, firimu rinozoiswa kune wafer pachine nguva kuti ive yakachengeteka "singling". Mabasa ayo makuru ndeaya anotevera.
Gadzirisa uye chengetedza wafer
Panguva yekuita dicing, wafer inoda kutemwa nemazvo.Waferskazhinji dzakatetepa uye dzakaoma. UV tepi inogona kunamira zvakasimba chipfuro pafuremu kana kuti wafer nhanho kudzivirira wafer kubva pakuchinja uye kuzununguka panguva yekucheka, kuve nechokwadi chechokwadi uye chokwadi chekucheka.
Inogona kupa kudzivirirwa kwakanaka kwemuviri kwechingwa, kudzivirira kukanganisa kunewaferkunokonzerwa nekunze kwesimba kukanganiswa uye kupesana kunogona kuitika panguva yekucheka, zvakadai sekuputika, kuparara kwemucheto uye zvimwe zvikanganiso, uye kudzivirira chip structure uye dunhu pamusoro pechifukidziro.
Yakanaka kucheka kushanda
UV tepi ine elasticity yakakodzera uye kuchinjika, uye inogona kukanganisa zvine mwero kana blade yekucheka ikacheka mukati, ichiita kuti nzira yekucheka ive yakapfava, kuderedza mhedzisiro yekucheka kuramba pablade uye wafer, uye kubatsira kuvandudza kunaka kwekucheka uye hupenyu hwesevhisi. chipande. Hunhu hwayo hwepamusoro hunogonesa marara anogadzirwa nekucheka kuti anamate kune tepi zviri nani pasina kupuruzira kutenderedza, izvo zviri nyore kucheneswa kunotevera kwenzvimbo yekucheka, kuchengetedza nzvimbo yekushanda yakachena, uye kudzivirira marara kubva pakusvibisa kana kupindira newafer nemimwe michina. .
Zviri nyore kubata gare gare
Mushure mekucheka, tepi yeUV inogona kukurumidza kuderedzwa mu viscosity kana kutorasikirwa zvachose nekuivhenekera ne ultraviolet mwenje weiyo wavelength uye kusimba, kuitira kuti iyo yakachekwa chip inogona kupatsanurwa zviri nyore kubva kune tepi, iri nyore kune inotevera. chip kurongedza, kuyedzwa uye imwe nzira inoyerera, uye iyi nzira yekuparadzanisa ine njodzi yakaderera yekukuvadza chip.
Nguva yekutumira: Zvita-16-2024