Sei madziro emadziro achikotama panguva yakaoma etching?

Kwete-kufanana kweion bombardment

Dryetchingkazhinji inzira inosanganisa mhedzisiro yemuviri uye yemakemikari, umo ion bombardment inzira yakakosha yekubata muviri. Munguva yeetching process, kona yechiitiko uye kugovera simba kwemaion kunogona kunge kusina kuenzana.

Kana iyo ion chiitiko angle yakasiyana panzvimbo dzakasiyana padivi pemadziro, iyo etching mhedzisiro yeion padivi pemadziro ichave yakasiyana. Munzvimbo dzine makona makuru ezviitiko zveion, iyo etching mhedzisiro yeion padivi pemadziro ine simba, izvo zvinozoita kuti madziro eparutivi munzvimbo iyi awedzere kudzika, zvichiita kuti madziro epadivi akotame. Mukuwedzera, kugoverwa kusina kuenzana kweion simba kuchaitawo maitiro akafanana. Ioni ine simba rakakwirira inogona kubvisa zvinhu zvinobudirira, zvichiita kuti zvisakanganiseetchingmadhigirii eparutivi pazvinzvimbo zvakasiyana, izvo zvinozoita kuti madziro emadziro akotama.

Kufurira kwephotoresist

Photoresist inobata basa remask mune yakaoma etching, inodzivirira nzvimbo dzisingadi kuvharirwa. Nekudaro, iyo photoresist inobatwawo neplasma bombardment uye kemikari maitiro panguva ye etching process, uye kuita kwayo kunogona kuchinja.

Kana ukobvu hwephotoresist husina kuenzana, chiyero chekushandisa panguva yekushongedza hachienderane, kana kunamatira pakati pephotoresist neiyo substrate kwakasiyana munzvimbo dzakasiyana, zvinogona kutungamira kune kusaenzana kuchengetedzwa kwemadziro eparutivi panguva yekugadzira. Semuyenzaniso, nzvimbo dzine mutete photoresist kana kushaya simba kunamatira dzinogona kuita kuti zvinhu zviri pasi zvinyanye kukwenenzverwa, zvichiita kuti madziro epamativi akotama panzvimbo idzi.

Kusiyana mune substrate zvinhu zvinhu

Iyo etched substrate zvinhu pachayo inogona kunge iine akasiyana zvivakwa, senge akasiyana makristasi ekutarisa uye doping kutariswa munzvimbo dzakasiyana. Iyi misiyano ichakanganisa chiyero che etching uye etching selectivity.
Semuyenzaniso, mucrystalline silicon, kurongeka kwemaatomu esilicon mune akasiyana makristasi ekutarisa kwakasiyana, uye reactivity yavo uye etching rate neiyo etching gasi ichave yakasiyana. Munguva yekuita etching, iwo akasiyana etching mareti akakonzerwa nekusiyana kwezvinhu zvenyama achaita kuti kudzika kwemadziro epadivi panzvimbo dzakasiyana kusapindirana, zvichizotungamira mukukotama kwepadivi.

Equipment-nechekuita zvinhu

Kuita uye chimiro che etching midziyo zvakare ine yakakosha mhedzisiro pane etching mhedzisiro. Semuyenzaniso, matambudziko akadai sekusaenzana kweplasma kugovera mukamuri yekupindura uye kusaenzana kwe electrode kupfeka kunogona kutungamira kune kusaenzana kugovera kwema paramita senge ion density uye simba pane wafer pamusoro panguva etching.

Uye zvakare, kusaenzana kwekudzora tembiricha yemidziyo uye kuderera kudiki mukuyerera kwegasi kunogona kukanganisawo kufanana kweetching, zvichitungamira mukukotama kwepadivi.