Chemical vapor deposition (CVD) zvinoreva nzira yekuisa firimu rakasimba pamusoro pesiliconwaferkuburikidza nemakemikari anoita yemusanganiswa wegasi. Zvinoenderana neakasiyana maitiro ekuita (kumanikidza, precursor), inogona kukamurwa kuita akasiyana emidziyo modhi.
Michina miviri iyi inoshandiswa sei?
PECVD(Plasma Enhanced) midziyo ndiyo yakawanda uye inonyanya kushandiswa, inoshandiswa muOX, Nitride, gedhi resimbi, amorphous carbon, nezvimwewo; LPCVD (Low Power) inowanzoshandiswa muNitride, poly, TEOS.
Chii chiri musimboti?
PECVD-muitiro unobatanidza zvakakwana plasma simba uye CVD. PECVD tekinoroji inoshandisa yakaderera-tembiricha plasma kuti iite kupenya kuyerera pane cathode yekamuri yekugadzira (kureva, sampuli tray) pasi pekudzvinyirira kwakaderera. Uku kuburitsa kupenya kana imwe yekudziya mudziyo inogona kusimudza tembiricha yesample kusvika padanho rakatemerwa, uye yobva yaunza huwandu hunodzorwa hwegasi rekuita. Iyi gasi inosangana nekemikari uye maitiro eplasma, uye pakupedzisira inoumba firimu rakasimba pamusoro pemuenzaniso.
LPCVD - Yakaderera-pressure kemikari vapor deposition (LPCVD) yakagadzirirwa kudzikisa kushanda kwesimba rekuita gasi mune reactor kusvika 133Pa kana zvishoma.
Ndeapi maitiro emumwe nemumwe?
PECVD - Nzira inobatanidza zvakakwana simba re plasma uye CVD: 1) Low-temperature operation (kudzivisa kukanganisa kwekushisa kwepamusoro kune zvigadzirwa); 2) Kukurumidza firimu kukura; 3) Kwete kusarudza nezvezvinhu, OX, Nitride, simbi gedhi, amorphous kabhoni inogona kukura; 4) Kune in-situ yekutarisa sisitimu, iyo inogona kugadzirisa iyo resipi kuburikidza neion paramita, gasi kuyerera mwero, tembiricha uye firimu ukobvu.
LPCVD - Mafirimu matete akaiswa neLPCVD anozove nekuvharika kwenhanho, yakanaka kuumbwa uye kudzora chimiro, yakakwirira deposition rate uye kubuda. Uye zvakare, LPCVD haidi mutakuri gasi, saka inoderedza zvakanyanya kunobva kusvibiswa kwechikamu uye inoshandiswa zvakanyanya mumaindasitiri epamusoro-akawedzera semiconductor maindasitiri akaonda firimu deposition.
Gamuchirai chero vatengi vanobva kumativi ese enyika kuti vatishanyire kune imwezve hurukuro!
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Nguva yekutumira: Jul-24-2024