Chii chinonzi sic coating?

Silicon Carbidemusanganiswa wakaoma une silicon uye kabhoni, uye unowanikwa mune zvakasikwa seyakanyanya kushomeka mineral moissanite. Silicon carbide particles inogona kusunganidzwa pamwe chete nekunyunguduka kuti iumbe maceramics akaomarara, ayo anoshandiswa zvakanyanya mumashandisirwo anoda kusimba kwepamusoro, kunyanya mumasemiconductor procession.

Chimiro chemuviri cheSiC

Chii chinonzi SiC Coating?

SiC coating ndeye dense, inopfeka-inodzivirira silicon carbide coating ine yakakwira corrosion uye kupisa kupisa uye yakanakisa yekupisa conductivity. Iyi yakakwirira-kuchena SiC coating inonyanya kushandiswa mune semiconductor uye zvemagetsi maindasitiri kuchengetedza wafer vatakuri, mabhesi uye ekudziya zvinhu kubva kune zvinoora uye reactive nharaunda. SiC coating inokodzerawo vacuum furnaces uye sampuli yekudziya mune yakakwira vacuum, inoshanda uye nharaunda oksijeni.

High kuchena SiC coating pamusoro

Chii chinonzi SiC coating process?

Iyo yakatetepa yesilicon carbide inoiswa pamusoro peiyo substrate uchishandisaCVD (Chemical Vapor Deposition). Deposition inowanzoitwa patembiricha ye1200-1300 ° C uye hunhu hwekuwedzera hwekupisa kweiyo substrate zvinhu hunofanirwa kuenderana neSiC coating kuti kuderedze kushushikana kwekupisa.

CVD SIC FILM CRYSTAL STRUCTURE

CVD SIC Coating FILM CRYSTAL STRUCTURE

Iwo emuviri zvimiro zveSiC coating zvinonyanya kuratidzwa mukupisa kwayo kwekushisa, kuoma, corrosion resistance uye thermal conductivity.

Maumbirwo emuviri maparameter anowanzo seanotevera:

Kuoma: SiC coating inowanzove neVickers Hardness muhuwandu hwe2000-2500 HV, iyo inovapa yakanyanyisa kupfeka uye kupikisa kupikisa mumashandisirwo emabhizimisi.

Density: SiC coatings kazhinji ine density ye3.1-3.2 g/cm³. Iyo yakakwirira density inobatsira kusimba remagetsi uye kusimba kwekupfeka.

Thermal conductivity: SiC coatings ine high thermal conductivity, kazhinji muhuwandu hwe120-200 W / mK (pa20 ° C). Izvi zvinopa iyo yakanaka yekupisa conductivity munzvimbo dzekushisa kwepamusoro uye inoita kuti inyatsokodzera michina yekurapa kupisa muindasitiri yesemiconductor.

Melting point: silicon carbide ine nzvimbo yekunyunguduka inosvika 2730 ° C uye ine yakanakisa kugadzikana kwekupisa pakupisa kwakanyanya.

Coefficient of Thermal Expansion: SiC coatings ine yakaderera mutsara coefficient of thermal kuwedzera (CTE), kazhinji muhuwandu hwe4.0-4.5 µm/mK (mu25-1000 ℃). Izvi zvinoreva kuti kugadzikana kwayo kwedimensional kwakanakisa pamusoro pekusiyana kukuru kwekushisa.

Corrosion resistance: SiC coatings inopesana zvakanyanya nekuora muasidhi yakasimba, alkali uye oxidizing nharaunda, kunyanya kana uchishandisa maasidhi akasimba (akadai seHF kana HCl), kushorwa kwavo kwekuora kunopfuura kupfuura kwezvakajairwa simbi zvinhu.

SiC coatings inogona kuiswa kune zvinotevera zvinhu:

High kuchena isostatic graphite (yakaderera CTE)
Tungsten
Molybdenum
Silicon Carbide
Silicon Nitride
Carbon-Carbon Composites (CFC)

SiC yakavharwa zvigadzirwa zvinowanzo shandiswa munzvimbo dzinotevera:

LED chip kugadzirwa
Polysilicon kugadzirwa
Semiconductorkukura kwekristaro
Silicon uyeSiC epitaxy
Wafer kupisa kurapwa uye etching

Sei uchisarudza VET Energy?

VET Energy inotungamira kugadzira, innovator uye mutungamiri weSiC coating zvigadzirwa muChina, iyo huru SiC yekupfeka zvigadzirwa zvinosanganisira.wafer mutakuri ane SiC coating, SiC yakavharwaepitaxial susceptor, SiC yakavharwa graphite mhete, Zvikamu zvehafu-mwedzi neSiC coating, SiC yakavharwa kabhoni-kabhoni inoumbwa, SiC yakavharwa chikepe chewafer, SiC yakavharwa heater, etc. VET Energy yakazvipira kupa iyo semiconductor indasitiri neiyo yekupedzisira tekinoroji uye zvigadzirwa mhinduro, uye inotsigira customization masevhisi. Isu tinotarisira nemoyo wose kuve shamwari yako yenguva refu muChina.