Choto chekristaro chimwechete chishandiso chinoshandisa agirafu hitakunyungudutsa polycrystalline silicon zvinhu mune inert gasi (argon) nharaunda uye inoshandisa iyo Czochralski nzira yekukura isina-yakabviswa imwechete makristasi. Iyo inonyanya kuumbwa neanotevera masisitimu:
Mechanical transmission system
Iyo mechanical transmission system ndiyo yekutanga inoshanda sisitimu yeimwe crystal choto, iyo inonyanya kuita basa rekudzora kufamba kwemakristasi uye.crucibles, kusanganisira kusimudza uye kutenderera kwemakristasi embeu uye kusimudza uye kutenderera kwecrucibles. Iyo inogona kunyatso gadzirisa ma parameter akadai sechinzvimbo, kumhanya uye kutenderera angle yemakristasi uye crucibles kuti ive nechokwadi chekufambira mberi kwakanaka kwekristaro yekukura process. Semuenzaniso, mumatanho akasiyana ekukura kwekristaro senge seeding, necking, shouldering, kukura kwakaenzana kwedhayamita uye kuswededza, kufamba kwemakristasi embeu uye crucibles kunoda kunyatso kudzorwa nehurongwa uhwu kuti usangane nehurongwa hwekukura kwekristaro.
Kupisa kudzora tembiricha system
Iyi ndiyo imwe yepakati masisitimu eiyo imwe crystal furnace, iyo inoshandiswa kugadzira kupisa uye kunyatso kudzora tembiricha muchoto. Iyo inonyanya kuumbwa nezvinhu zvakaita semaheater, ma sensors ekushisa, uye zvinodzora tembiricha. Iyo hita inowanzogadzirwa nezvinhu zvakadai sepamusoro-kuchena graphite. Mushure mekuchinjana ikozvino kushandurwa uye kuderedzwa kuti iwedzere ikozvino, iyo heater inogadzira kupisa kunyungudutsa polycrystalline zvinhu zvakaita sepolysilicon mune crucible. Iyo tembiricha sensor inotarisisa shanduko yekushisa muchoto munguva chaiyo uye inotumira chiratidzo chekushisa kune tembiricha controller. Iyo tembiricha controller inonyatso kudzora simba rekudziya zvinoenderana neyakagadzika tembiricha paramita uye mhinduro yekushisa chiratidzo, nekudaro kuchengetedza kugadzikana kwekushisa muchoto uye nekupa yakakodzera tembiricha nharaunda yekukura kwekristaro.
Vacuum system
Basa guru reiyo vacuum system kugadzira nekuchengetedza nzvimbo yekutsvaira muchoto panguva yekukura kwekristaro. Mhepo uye magasi ehutsvina ari muchoto anoburitswa kuburikidza nemapombi evacuum nemimwe michina kuita kuti gasi riri muchoto risvike padanho rakaderera, kazhinji pazasi pe5TOR (torr). Izvi zvinogona kudzivirira iyo silicon zvinhu kubva kune oxidized pakupisa kwakanyanya uye kuve nechokwadi kuchena uye kunaka kwekristaro kukura. Panguva imwecheteyo, nzvimbo yevacuum inobatsirawo kubvisa tsvina inoputika inogadzirwa panguva yekukura kwekristaro nekuvandudza kunaka kwekristaro.
Argon system
Iyo argon system inoita basa mukudzivirira nekugadzirisa kudzvanywa muchoto muchoto chekristaro chimwe chete. Mushure mekutsvaira, high-purity argon gasi (kuchena kunofanira kuva pamusoro pe6 9) inozadzwa muchoto. Kune rumwe rutivi, inogona kudzivirira kunze kwemhepo kupinda muchoto uye kudzivirira silicon zvinhu kubva pakuva oxidized; kune rumwe rutivi, kuzadza kwe argon gasi kunogona kuchengetedza kumanikidzika muchoto chemoto uye kupa nzvimbo yakakodzera yekumanikidzika yekukura kwekristaro. Pamusoro pezvo, kuyerera kwe argon gasi kunogonawo kubvisa kupisa kunogadzirwa panguva yekukura kwekristaro, kuridza rimwe basa rekutonhora.
Mvura inotonhorera system
Basa remvura inotonhorera system ndeyekutonhodza zvakasiyana-siyana zvepamusoro-tembiricha zvikamu zveimwe crystal furnace kuti ive nechokwadi chekushanda kwakajairika uye hupenyu hwebasa remidziyo. Panguva yekushanda kwechoto chekristaro chimwe chete, iyo heater,crucible, electrode uye zvimwe zvikamu zvinogadzira kupisa kwakawanda. Kana ikasatonhodzwa nenguva, michina yacho inopisa, kuremadza kana kutokuvadzwa. Mvura inotonhorera inobvisa kupisa kwezvikamu izvi nekutenderedza mvura inotonhorera kuchengetedza tembiricha yemidziyo mukati menzvimbo yakachengeteka. Panguva imwecheteyo, iyo inotonhorera yemvura system inogonawo kubatsira mukugadzirisa tembiricha muchoto kuti ivandudze kurongeka kwekudzora tembiricha.
Electrical control system
Iyo magetsi ekudzora sisitimu ndiyo "uropi" hweimwe crystal furnace, ine basa rekutarisa uye kutonga kushanda kwese midziyo. Inogona kugamuchira masaini kubva kune akasiyana masensa, senge tembiricha sensors, pressure sensors, chinzvimbo sensors, nezvimwewo, uye kuronga uye kutonga iyo mechanic transmission system, yekudziya tembiricha yekudzora system, vacuum system, argon system uye kutonhora kwemvura kunoenderana nezviratidzo izvi. Semuenzaniso, panguva yekukura kwekristaro, iyo yemagetsi control system inogona kugadzirisa otomatiki simba rekudziya zvinoenderana nechiratidzo chekushisa chinodzoserwa ne sensor tembiricha; maererano nekukura kwekristaro, inogona kudzora kukurumidza kwekufamba uye kutenderera kwekona yekrisiti yembeu uye crucible. Panguva imwecheteyo, hurongwa hwekugadzirisa magetsi hunewo kutadza kuongororwa uye mabasa e-alarm, iyo inogona kuona mamiriro asina kunaka emidziyo munguva uye inovimbisa kushanda kwakachengeteka kwemidziyo.
Nguva yekutumira: Sep-23-2024