Zvimwe organic uye inorganic zvinhu zvinodikanwa kutora chikamu mukugadzira semiconductor. Mukuwedzera, sezvo nzira yacho inogara ichiitwa muimba yakachena nekubatanidzwa kwevanhu, semiconductorzvimeduzvinongosvibiswa netsvina dzakasiyana-siyana.
Zvinoenderana nekwakabva uye hunhu hwezvinosvibisa, zvinogona kukamurwa kuita zvikamu zvina: zvimedu, organic matter, metal ions uye oxides.
1. Zvimedu:
Zvimedu zvinonyanya mamwe mapolymers, photoresists uye etching tsvina.
Kusvibiswa kwakadaro kunowanzovimba nemasimba e-intermolecular kuti adsorb pamusoro pechifukidziro, zvichikanganisa kuumbwa kwenhamba dzejometri uye magetsi emagetsi echigadzirwa photolithography process.
Kusvibiswa kwakadaro kunonyanya kubviswa nekuderedza zvishoma nezvishoma nzvimbo yavo yekubatana nepamusoro pewaferkuburikidza nemitoo yemuviri kana yemakemikari.
2. Organic matter:
Iko kunobva kusvibiswa kwehupenyu kwakakura, senge mafuta eganda remunhu, mabhakitiriya, mafuta emuchina, vacuum girisi, photoresist, kuchenesa zvinonyungudutsa, nezvimwe.
Kusvibiswa kwakadaro kunowanzoita firimu rehupenyu pamusoro pechifukidzo chekudzivirira kuti mvura yekuchenesa isvike pamusoro pechifukidziro, zvichiita kuti kuchenesa kusina kukwana kwepasi.
Kubviswa kwezvakasvibiswa zvakadaro kunowanzoitwa nhanho yekutanga yekuchenesa nzira, kunyanya kushandisa nzira dzemakemikari dzakadai se sulfuric acid uye hydrogen peroxide.
3. Metal ions:
Kusvibiswa kwesimbi kwakajairika kunosanganisira simbi, mhangura, aruminiyamu, chromium, simbi yakakandwa, titanium, sodium, potasium, lithium, etc. Zvinyorwa zvikuru midziyo yakasiyana-siyana, mapaipi, makemikari reagents, uye kusvibiswa kwesimbi kunogadzirwa apo kubatanidzwa kwesimbi kunogadzirwa panguva yekugadzirisa.
Mhando iyi yekusachena inowanzobviswa nenzira dzemakemikari kuburikidza nekugadzirwa kwesimbi ion complexes.
4. Oxide:
Kana semiconductorzvimeduinoratidzirwa kune nharaunda ine oxygen nemvura, yakasikwa oxide layer ichaita pamusoro. Iyi oxide firimu inotadzisa akawanda maitiro mukugadzira semiconductor uye zvakare iine kumwe kusvibiswa kwesimbi. Mune mamwe mamiriro ezvinhu, ivo vanogadzira kukanganisa kwemagetsi.
Kubviswa kweiyi oxide firimu kunowanzopedzwa nekunyura mu dilute hydrofluoric acid.
General yekuchenesa kutevedzana
Tsvina inoshambadza pamusoro pe semiconductorzvimeduinogona kukamurwa kuva marudzi matatu: molecular, ionic uye atomic.
Pakati pavo, iyo adsorption force pakati pema molecular tsvina uye pamusoro pechifukidziro haina kusimba, uye rudzi urwu rwetsvina zvidimbu zviri nyore kubvisa. Iwo anonyanya kusvibiswa nemafuta ane hydrophobic maitiro, ayo anogona kupa masking kune ionic uye atomu tsvina inosvibisa pamusoro pe semiconductor wafers, izvo zvisingakodzeri kubviswa kwemhando mbiri idzi dzetsvina. Naizvozvo, kana kemikari kuchenesa semiconductor wafers, molecular tsvina inofanira kubviswa kutanga.
Saka, iyo yakawanda nzira ye semiconductorwaferkuchenesa nzira ndeye:
De-molecularization-deionization-de-atomization-deionized mvura rinsing.
Uye zvakare, kuti ubvise iyo yakasikwa oxide layer pamusoro peiyo wafer, nhanho inonyungudusa amino acid inonyura inoda kuwedzerwa. Nokudaro, pfungwa yekuchenesa ndeyokutanga kubvisa kusvibiswa kwehupenyu pamusoro pepamusoro; wobva wanyungudutsa oxide layer; pakupedzisira bvisa zvidimbu uye kusvibiswa kwesimbi, uye passivate pamusoro panguva imwe chete.
Nzira dzekuchenesa dzakajairika
Kemikari nzira dzinowanzoshandiswa pakuchenesa semiconductor wafers.
Kemikari kucheneswa kunoreva maitiro ekushandisa akasiyana makemikari reagents uye organic zvinonyungudutsa kuita kana kunyungudutsa tsvina nemafuta emafuta pamusoro pechifukidziro kuti asvibise tsvina, uye wobva wageza nemvura yakawanda inopisa uye inotonhora yakasvibiswa kuti uwane. nzvimbo yakachena.
Kemikari yekuchenesa inogona kukamurwa kuita kuchenesa kemikari yakanyorova uye yakaoma kemikari kuchenesa, pakati peiyo mvura yekuchenesa kemikari ichiri kutonga.
Kuchenesa kwemakemikari akanyorova
1. Kuchenesa kemikari yakanyorova:
Kucheneswa kwemakemikari ekunyorova kunonyanya kusanganisira kunyudzwa kwemhinduro, kukwesha kwemuchina, kuchenesa kweultrasonic, kuchenesa megasonic, kupfapfaidza kutenderera, nezvimwe.
2. Kunyudzwa kwemhinduro:
Kunyudzwa kwemushonga inzira yekubvisa kusvibiswa kwepamusoro nekunyudza wafer mumushonga wemakemikari. Ndiyo nzira inonyanya kushandiswa mukunyorova kwemakemikari kuchenesa. Mishonga yakasiyana-siyana inogona kushandiswa kubvisa marudzi akasiyana-siyana ezvinosvibisa pamusoro pechifukidziro.
Kazhinji, nzira iyi haigoni kubvisa zvachose tsvina pamusoro pechifukidziro, saka zviyero zvemuviri zvakadai sekupisa, ultrasound, uye kubvongodza zvinowanzoshandiswa pakunyura.
3. Mechanical kukwesha:
Mechanical scrubbing inowanzoshandiswa kubvisa zvidimbu kana organic residues pamusoro pechifukidziro. Kazhinji inogona kukamurwa kuita nzira mbiri:kukwesha nemawoko nekukwesha ne wiper.
Kukwesha nemaokondiyo nzira iri nyore yekukwesha. Stainless simbi bhurashi rinoshandiswa kubata bhora rakanyikwa muanhydrous ethanol kana zvimwe organic solvents uye nekukwesha zvinyoro nyoro pamusoro pewafer nenzira imwe chete kubvisa wakisi firimu, huruva, residual guruu kana zvimwe zvimedu zvakasimba. Iyi nzira iri nyore kukonzera mavanga uye kusvibiswa kwakakomba.
Iyo wiper inoshandisa mechanical kutenderera kukwesha pamusoro pewafer nebrashi rakapfava remvere kana bhurasho rakasanganiswa. Iyi nzira inoderedza zvakanyanya kukwenya pawafer. Iyo yakakwira-kudzvanya wiper haizokwenye wafer nekuda kwekushaikwa kwe mechanical friction, uye inogona kubvisa kusvibiswa mu groove.
4. Ultrasonic kuchenesa:
Ultrasonic kuchenesa inzira yekuchenesa inoshandiswa zvakanyanya muindasitiri ye semiconductor. Mabhenefiti ayo akanaka ekuchenesa maitiro, nyore kushanda, uye anogona zvakare kuchenesa yakaoma michina uye midziyo.
Iyi nzira yekuchenesa iri pasi pekuita kwemafungu akasimba e ultrasonic (inowanzo shandiswa ultrasonic frequency ndeye 20s40kHz), uye mashoma uye akaomesesa zvikamu zvichagadzirwa mukati memvura yepakati. Iyo sparse part inoburitsa inenge vacuum cavity bubble. Kana bhavhu remugotsi ranyangarika, kudzvanywa kwakasimba kwenzvimbo kunogadzirwa pedyo nayo, kutyora kemikari zvisungo mumamorekuru kunyungudutsa tsvina iri pamusoro pewafer. Ultrasonic kuchenesa inonyanya kushanda pakubvisa insoluble kana insoluble flux residues.
5. Megasonic kuchenesa:
Megasonic yekuchenesa haina chete zvakanakira ultrasonic kuchenesa, asi zvakare inokunda kukanganisa kwayo.
Megasonic yekuchenesa inzira yekuchenesa mawafer nekubatanidza iyo yakakwirira-simba (850kHz) frequency vibration athari nemakemikari anoita emakemikari ekuchenesa maajenti. Panguva yekuchenesa, mamorekuru ekugadzirisa anokwidziridzwa ne megasonic wave (iyo yakanyanya kumhanya nekukurumidza inogona kusvika 30cmVs), uye iyo yakakwira-speed fluid wave inoramba ichikanganisa pamusoro pechifukidziro, kuitira kuti zvinosvibisa uye zvimedu zvakanaka zvakanamirwa pamusoro pemvura. wafer inobviswa nechisimba uye kupinda mukuchenesa mhinduro. Kuwedzera acidic surfactants kune yekuchenesa mhinduro, kune rumwe rutivi, inogona kuzadzisa chinangwa chekubvisa zvimedu uye organic zvinhu pane yekupukuta kumeso kuburikidza neadsorption yevanoshandisa surfactants; kune rumwe rutivi, kuburikidza nekubatanidzwa kwe surfactants uye nzvimbo ine acidic, inogona kuzadzisa chinangwa chekubvisa kusvibiswa kwesimbi pamusoro pepepa rekupukuta. Iyi nzira inogona panguva imwe chete kuita basa rekupukuta kwemagetsi uye kuchenesa kemikari.
Parizvino, iyo megasonic yekuchenesa nzira yave nzira inoshanda yekuchenesa mapeji ekupukuta.
6. Rotary spray nzira:
Iyo rotary spray method inzira inoshandisa michina nzira kutenderedza wafer nekumhanya kwakanyanya, uye ichiramba ichipfapfaidza mvura (yakakwirira-kuchena yakasvibiswa mvura kana imwe mvura yekuchenesa) pamusoro pechifukidzo panguva yekutenderera kubvisa tsvina pa pamusoro pechimedu.
Iyi nzira inoshandisa kusvibiswa kuri pamusoro pewafer kunyungudika mumvura yakapfapfaidzwa (kana makemikari kuita nayo kuti inyunguduke), uye inoshandisa iyo centrifugal mhedzisiro yekutenderera kwekumhanya-mhanya kuita kuti mvura ine tsvina iparadzane kubva pamusoro pechifukidzo. nenguva.
Iyo rotary spray method ine zvakanakira kuchenesa makemikari, fluid mechanics kuchenesa, uye high-pressure scrubbing. Panguva imwecheteyo, nzira iyi inogonawo kusanganiswa nekuoma. Mushure menguva yekuchenesa mvura yakasvibiswa yekuchenesa, kupfapfaidza kwemvura kunomiswa uye gasi rekupfapfaidza rinoshandiswa. Panguva imwecheteyo, kukurumidza kutenderera kunogona kuwedzerwa kuwedzera simba re centrifugal kukurumidza kupera mvura pamusoro pechifukidziro.
7.Dry kemikari kuchenesa
Dry cleaning inoreva tekinoroji yekuchenesa isingashandisi mhinduro.
Iwo akaoma ekuchenesa matekinoroji anoshandiswa parizvino anosanganisira: tekinoroji yekuchenesa plasma, gasi chikamu chekuchenesa tekinoroji, tekinoroji yekuchenesa danda, nezvimwe.
Zvakanakira zvekuchenesa yakaoma zviri nyore maitiro uye hapana kusvibiswa kwezvakatipoteredza, asi mutengo wakakwira uye chiyero chekushandisa hachina kukura kwenguva iripo.
1. Plasma yekuchenesa tekinoroji:
Kuchenesa kweplasma kunowanzo shandiswa mune photoresist yekubvisa maitiro. Iyo shoma shoma yeokisijeni inounzwa muplasma reaction system. Pasi pechiito chesimba remagetsi rakasimba, okisijeni inogadzira plasma, iyo inokurumidza oxidizes iyo photoresist mumhepo inoputika gasi uye inotorwa.
Iyi tekinoroji yekuchenesa ine mabhenefiti ekushanda nyore, kushanda kwepamusoro, nzvimbo yakachena, isina zvikweshwa, uye inobatsira kuve nechokwadi chemhando yechigadzirwa mukuita degumming. Uyezve, haishandisi acids, alkalis uye organic solvents, uye hapana matambudziko akadai sekurasa marara uye kusvibiswa kwezvakatipoteredza. Nokudaro, iri kuwedzera kukosheswa nevanhu. Nekudaro, haigone kubvisa kabhoni uye imwe isiri-inotenderera simbi kana simbi oxide tsvina.
2. Gasi chikamu chekuchenesa tekinoroji:
Gasi chikamu chekuchenesa zvinoreva nzira yekuchenesa iyo inoshandisa gasi chikamu chakaenzana nechinhu chinoenderana muchikamu chemvura kuti idyidzane nechinhu chine tsvina chiri pamusoro pechifukidziro kuzadzisa chinangwa chekubvisa tsvina.
Semuenzaniso, mukuita kweCMOS, iyo wafer yekuchenesa inoshandisa kupindirana pakati pegasi chikamu HF uye mhute yemvura kubvisa oxides. Kazhinji, maitiro eHF ane mvura anofanirwa kuperekedzwa nemaitiro ekubvisa chidimbu, nepo kushandiswa kwegasi chikamu HF yekuchenesa tekinoroji hakudi rinotevera rekubvisa chidimbu.
Iwo akanyanya kukosha mabhenefiti achienzaniswa neaqueous HF maitiro madiki madiki HF kemikari mashandisirwo uye yakakwirira yekuchenesa kushanda.
Gamuchirai chero vatengi vanobva kumativi ese enyika kuti vatishanyire kune imwezve hurukuro!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nguva yekutumira: Aug-13-2024