Silicon carbide crystal yekukura maitiro uye tekinoroji yemidziyo

1. SiC crystal kukura tekinoroji nzira

PVT (sublimation nzira),

HTCVD (yakakwirira tembiricha CVD),

LPE(mvura yechikamu nzira)

zvitatu zvakajairikaSiC crystalnzira dzekukura;

Nzira inonyanya kuzivikanwa mumhizha ndiyo nzira yePVT, uye inopfuura 95% yeSiC single crystals inokura nePVT nzira;

IndustrializedSiC crystalchoto chekukura chinoshandisa iyo indasitiri yakakura PVT tekinoroji nzira.

2. SiC crystal kukura maitiro

Powder synthesis-mbeu yekristaro kurapwa-crystal kukura-ingot annealing-waferprocessing.

3. PVT nzira yekukuraSiC makristasi

Iyo SiC mbishi zvinhu inoiswa pazasi pe graphite crucible, uye SiC mhodzi crystal iri pamusoro peiyo graphite crucible. Nekugadzirisa insulation, tembiricha paSiC raw material yakakwira uye tembiricha pakristaro yembeu yakadzikira. Iyo SiC mbishi zvinhu patembiricha yepamusoro inodzika uye inowora kuita gasi chikamu zvinhu, izvo zvinotakurwa kune mhodzi crystal ine yakaderera tembiricha uye crystalline kuumba SiC makristasi. Iyo yekutanga kukura maitiro inosanganisira matatu maitiro: kuora uye sublimation yezvakagadzirwa, kutamisa hukuru, uye crystallization pamakristasi embeu.

Kuparara uye sublimation yezvakagadzirwa:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Munguva yekufambisa kwemazhinji, Si vapor inopindirana neiyo graphite crucible wall kuumba SiC2 uye Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Pamusoro pekristaro yembeu, zvikamu zvitatu zvegasi zvinokura kuburikidza nemafomu maviri anotevera kugadzira silicon carbide makristasi:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. PVT nzira yekukura SiC crystal kukura midziyo tekinoroji nzira

Parizvino, induction kupisa inzira yakajairika tekinoroji yePVT nzira SiC crystal yekukura furnaces;

Coil yekunze induction heat uye graphite kuramba kudziyisa ndiyo nzira yekuvandudza yeSiC crystalmavira ekukura.

5. 8-inch SiC induction kudziyisa kukura choto

(1) Kupisagraphite crucible kupisa chinhukuburikidza nemagnetic field induction; kudzora nzvimbo yekushisa nekugadzirisa simba rekudziya, nzvimbo yecoil, uye chimiro chekudzivirira;

(2) Kupisa girafu crucible kuburikidza graphite kuramba kudziyisa uye thermal mwaranzi conduction; kudzora nzvimbo yekushisa nekugadzirisa ikozvino ye graphite heater, chimiro cheiyo heater, uye zone ikozvino kutonga;