Yakakwirira-kuchena graphite zvikamu zvakakosha kunemaitiro mune semiconductor, LED uye solar indasitiri. Mupiro wedu unotangira kubva kumagirafu zvinodyiwa zvekristaro inokura inopisa nzvimbo (maheater, crucible susceptors, insulation), kune yakakwirira-chaiyo graphite zvikamu zvewafer processing equipment, sesilicon carbide yakavharwa graphite susceptors yeEpitaxy kana MOCVD. Apa ndipo panowanikwa girafu yedu yakakosha: isostatic graphite yakakosha pakugadzirwa kwecompound semiconductor layers.Izvi zvinogadzirwa mu "hot zone" pasi pekupisa kwakanyanya panguva inonzi epitaxy, kana MOCVD process. Iyo inotenderera inotakura iyo mawafer akaputirwa mune reactor, ine silicon carbide-yakavharwa isostatic graphite. Chete iyi yakachena kwazvo, homogeneous graphite inosangana nezvinodiwa zvakakwirira mukuputira.
Tiye musimboti wekutanga we LED epitaxial wafer kukura ndeye: pane substrate (kunyanya safire, SiC uye Si) inopisa kusvika kune imwe tembiricha yakakodzera, iyo gasi zvinhu InGaAlP inotakurwa kuenda kune substrate pamusoro nenzira inodzorwa kuti ikure chaiyo imwe kristaro firimu. Parizvino, tekinoroji yekukura ye LED epitaxial wafer inonyanya kutora organic simbi kemikari vapor deposition.
LED epitaxial substrate zvinhundiro dombo repakona rekuvandudza tekinoroji yeindasitiri yekuvhenekesa semiconductor. Yakasiyana substrate zvinhu zvinoda akasiyana LED epitaxial wafer kukura tekinoroji, chip processing tekinoroji uye mudziyo wekurongedza tekinoroji. Substrate zvinhu zvinotarisa nzira yekusimudzira ye semiconductor mwenje tekinoroji.
Hunhu hwe LED epitaxial wafer substrate kusarudzwa kwezvinhu:
1. Iyo epitaxial zvinhu ine yakafanana kana yakafanana crystal chimiro ne substrate, diki lattice inogara isingaenderane, yakanaka crystallinity uye yakaderera defect density.
2. Maitiro akanaka ekugadzirisa maitiro, anobatsira kune nucleation ye epitaxial zvinhu uye kunamatira kwakasimba
3. Iine kugadzikana kwakanaka kwemakemikari uye haisi nyore kuora uye kuora mukati mekushisa nemhepo ye epitaxial kukura.
4. Kushanda kwakanaka kwekushisa, kusanganisira kunaka kwekushisa kwekushisa uye kuderera kwekushisa kusina kufanana
5. yakanaka conductivity, inogona kuitwa yekumusoro uye yakaderera chimiro 6, yakanaka optical performance, uye mwenje unoburitswa neyakagadzirwa mudziyo haunyanyi kubatwa ne substrate.
7. Yakanaka michina zvinhu uye nyore kugadzirisa midziyo, kusanganisira kuonda, polishing uye kucheka
8. Mutengo wakaderera.
9. Hukuru hukuru. Kazhinji, dhayamita haifaniri kunge iri pasi pe 2 inches.
10. Zviri nyore kuwana nguva dzose chimiro substrate (kunze kwekunge kune zvimwe zvakakosha zvinodiwa), uye substrate chimiro chakafanana netireyi gomba re epitaxial midziyo haisi nyore kuumba irregular eddy current, kuitira kuti iite epitaxial quality.
11. Pachikonzero chekusakanganisa epitaxial quality, iyo machinability ye substrate ichasangana nezvinodiwa zvechinotevera chip uye packaging processing sezvinobvira.
Zvakanyanya kuoma kuti kusarudzwa kwe substrate kusangane nepamusoro pegumi nerimwe mativi panguva imwe chete. Naizvozvo, pari zvino, isu tinokwanisa chete kuchinjika kuR & D uye kugadzirwa kwesemiconductor light-emitting zvishandiso pane akasiyana substrates kuburikidza nekuchinja kwe epitaxial kukura tekinoroji uye kugadzirisa kwechigadzirwa chekugadzira tekinoroji. Kune akawanda substrate zvinhu zvegallium nitride research, asi pane maviri chete substrates anogona kushandiswa kugadzira, anoti safiro Al2O3 uye silicon carbide.SiC substrates.
Nguva yekutumira: Feb-28-2022