The basic process ofSiCKukura kwekristaro kwakakamurwa kuita sublimation uye kuora kwezvinhu zvakasvibirira pakupisa kwakanyanya, kutakurwa kwezvinhu zvegasi pasi pechiito chetembiricha gradient, uye kukurazve kwegasi chikamu zvinhu pambeu yekristaro. Zvichienderana neizvi, mukati meiyo crucible yakakamurwa kuita zvikamu zvitatu: mbishi nzvimbo, kamuri yekukura uye kristaro yembeu. Nhamba yekufananidza modhi yakadhirowewa zvichibva pane chaiyo inopikisaSiCsingle crystal growth equipment (ona Mufananidzo 1). Muchiverengero: pasi pecrucibleiri 90 mm kubva kuzasi kweheater yepadivi, tembiricha yepamusoro yecrucible i2100 ℃, iyo mbishi chidimbu dhayamita i1000 μm, iyo porosity ndeye 0.6, kukura kwekukura 300 Pa, uye nguva yekukura i100 h. . Iyo PG ukobvu ndeye 5 mm, iyo dhayamita yakaenzana nedhayamita yemukati yecrucible, uye inowanikwa 30 mm pamusoro peiyo mbishi. Iyo sublimation, carbonization, uye recrystallization maitiro eiyo mbishi zvinhu zvinotariswa mukuverenga, uye maitiro pakati pePG uye gasi chikamu zvinhu hazvitariswe. Iwo anechekuita nekuverenga ane chekuita nepfuma paramita anoratidzwa muTafura 1.
Mufananidzo 1 Simulation calculation modhi. (a) Thermal munda modhi yekristaro yekukura simulation; (b) Kupatsanurwa kwenzvimbo yemukati yeiyo crucible uye ine hukama matambudziko emuviri
Tafura 1 Mamwe maparameter emuviri anoshandiswa mukuverenga
Mufananidzo 2 (a) unoratidza kuti kutonhora kwePG-ine chimiro (inoratidzwa sechimiro 1) yakakwirira kudarika iyo yePG-isina chimiro (inoratidzwa sechimiro 0) pasi pePG, uye yakaderera pane iyo yechimiro 0 pamusoro pePG. Iyo yakazara tembiricha gradient inowedzera, uye PG inoita senge inodzivirira kupisa mumiriri. Zvinoenderana neFigure 2 (b) uye 2 (c), iyo axial uye radial tembiricha gradients yechimiro 1 munzvimbo yezvakagadzirwa zvinhu idiki, kugovera tembiricha kwakafanana, uye sublimation yechinhu chacho yakazara. Kusiyana nenzvimbo yezvakagadzirwa, Mufananidzo 2(c) inoratidza kuti radial tembiricha gradient pambeu yekristaro yechimiro 1 yakakura, inogona kukonzerwa neakasiyana mativi emhando dzakasiyana dzekupisa kupisa, iyo inobatsira iyo kristaro kukura ine convex interface. . Mumufananidzo 2 (d), tembiricha panzvimbo dzakasiyana mucrucible inoratidza kuwedzera kwemaitiro sezvo kukura kunofambira mberi, asi mutsauko wetembiricha pakati pechimiro 0 uye chimiro 1 zvishoma nezvishoma unodzikira munzvimbo yakasvibirira uye zvishoma nezvishoma unowedzera mukamuri yekukura.
Mufananidzo 2 Kugovera kwekushisa uye kuchinja mune crucible. (a) Kugovera tembiricha mukati meiyo crucible yechimiro 0 (kuruboshwe) uye chimiro 1 (kurudyi) pa0 h, unit: ℃; (b) Kugovera kwekushisa pamutsara wepakati we crucible yechimiro 0 uye chimiro 1 kubva pasi pezvakagadzirwa kusvika kune kristaro yembeu pa0 h; (c) Kugovera tembiricha kubva pakati kusvika kumucheto kweiyo crucible pambeu yekristaro pamusoro (A) uye yakasvibirira yepasi (B), yepakati (C) uye pasi (D) pa0 h, yakatwasuka axis r ndiyo seed crystal radius for A, and the raw material area radius yeB~D; (d) Kuchinja kwekushisa pakati pechikamu chepamusoro (A), mbishi yepamusoro (B) uye yepakati (C) yekamuri yekukura yechimiro 0 uye chimiro 1 pa0, 30, 60, uye 100 h.
Mufananidzo 3 unoratidza kutakurwa kwezvinhu panguva dzakasiyana mu crucible yechimiro 0 uye chimiro 1. Iyo gasi chikamu chekuyerera kwezvinhu munzvimbo yakasvibira uye kamuri yekukura inowedzera nekuwedzera kwechinzvimbo, uye kutakura kwezvinhu kunopera simba sezvo kukura kunoenderera. . Mufananidzo 3 unoratidzawo kuti pasi pemamiriro ekufananidza, zvinhu zvakasvibirira zvinotanga graphitize pamadziro emadziro e crucible uye ipapo pazasi pe crucible. Mukuwedzera, kune recrystallization pamusoro pepamusoro pezvinhu zvakasvibirira uye zvishoma nezvishoma inowedzera sezvo kukura kunofambira mberi. Mifananidzo 4 (a) uye 4 (b) inoratidza kuti kuyerera kwezvinhu mukati mezvakasvibirira kunoderera sezvo kukura kunofambira mberi, uye kuyerera kwezvinhu pa100 h inenge 50% yenguva yekutanga; zvisinei, chiyero chekuyerera chinenge chakakura pamucheto nekuda kwe graphitization yezvinhu zvakasvibirira, uye chiyero chekuyerera pamucheto chinopfuura 10 nguva yekuyerera kwepakati munzvimbo yepakati pa 100 h; uyezve, mhedzisiro yePG muchimiro 1 inoita kuti huwandu hwekuyerera kwezvinhu munzvimbo yakasvibira yechimiro 1 ive yakaderera pane iyo yechimiro 0. Mumufananidzo 4 (c), iyo inoyerera inoyerera munzvimbo dzese dzakasvibirira uye kamuri yekukura inopera zvishoma nezvishoma sezvo kukura kunofambira mberi, uye kuyerera kwezvinhu munzvimbo yakasvibirira kunoramba kuchiderera, izvo zvinokonzerwa nekuvhurwa kwemhepo inoyerera chiteshi pamucheto we crucible uye kuvharwa kwe recrystallization kumusoro; mukamuri yekukura, kuyerera kwezvinhu zvechimiro 0 kunoderera nekukurumidza mukutanga 30 h kusvika 16%, uye inongoderera ne3% munguva inotevera, nepo chimiro 1 chinoramba chakadzikama mukati mekukura. Naizvozvo, PG inobatsira kudzikamisa kuyerera kwezvinhu mukamuri yekukura. Mufananidzo 4 (d) unofananidza kuyerera kwezvinhu kumberi kwekristaro kukura. Panguva yekutanga uye 100 h, kutakurwa kwezvinhu munzvimbo yekukura kwechimiro 0 yakasimba kupfuura iyo iri muchimiro 1, asi panogara paine nzvimbo yakakwira yekuyerera pamucheto wechimiro 0, izvo zvinotungamira mukukura kwakanyanya kumucheto. . Kuvapo kwePG muchimiro 1 zvinonyatso kudzvanya chiitiko ichi.
Mufananidzo 3 Material kuyerera mucrucible. Kuyerera (kuruboshwe) uye velocity vectors (kurudyi) yekutakura gasi zvinhu muzvimiro 0 uye 1 panguva dzakasiyana, velocity vector unit: m/s.
Mufananidzo 4 Shanduko mukuyerera kwezvinhu. (a) Shanduko muhuwandu hwekuyerera kwehuwandu hwekugovera mukati meiyo mbishi yechimiro 0 pa0, 30, 60, uye 100 h, r ndiyo radius yenzvimbo yakasvibira; (b) Shanduko muhuwandu hwekuyerera kwehuwandu hwekugovera pakati pezvakagadzirwa zvechimiro 1 pa0, 30, 60, uye 100 h, r ndiyo radius yenzvimbo yakasvibira; (c) Shanduko muyero yekuyerera kwezvinhu mukati mekamuri yekukura (A, B) uye mukati meiyo mbishi (C, D) yezvimiro 0 uye 1 nekufamba kwenguva; (d) Material flow rate kugovera padhuze nembeu yekristaro pamusoro pezvimiro 0 uye 1 pa0 uye 100 h, r ndiyo radius yembeu yekristaro.
C/Si inokanganisa kugadzikana kwekristaro uye kuremara density yeSiC crystal kukura. Mufananidzo 5 (a) unofananidza kugoverwa kweC / Si kwezvikamu zviviri panguva yekutanga. Chiyero cheC/Si chinodzikira zvishoma nezvishoma kubva pasi kusvika kumusoro kwemuchinjiro, uye chiyero cheC/Si chechimiro 1 chinogara chiri pamusoro pane icho chechimiro 0 panzvimbo dzakasiyana. Zvifananidzo 5(b) uye 5(c) zvinoratidza kuti chiyero cheC/Si chinowedzera zvishoma nezvishoma nekukura, izvo zvine chekuita nekuwedzera kwekushisa kwemukati muchikamu chekupedzisira chekukura, kukwidziridzwa kweraw material graphitization, uye kuita kweSi. zvikamu muchikamu chegasi chine graphite crucible. Mumufananidzo 5 (d), iyo C / Si zviyero zvechimiro 0 uye chimiro 1 zvakasiyana zvakanyanya pazasi PG (0, 25 mm), asi zvakasiyana zvishoma pamusoro pePG (50 mm), uye mutsauko unowedzera zvishoma nezvishoma sezvainoswedera kukristaro. . Kazhinji, chiyero cheC / Si chechimiro 1 chakakwirira, chinobatsira kudzikamisa fomu yekristaro uye kuderedza mukana wekuchinja kwechikamu.
Mufananidzo 5 Kugovera uye kuchinja kweC / Si chiyero. (a) C/Si reshiyo kugovera mumacrucibles echimiro 0 (kuruboshwe) uye chimiro 1 (kurudyi) pa0 h; (b) C/Si chiyero pamadaro akasiyana kubva pakati pemutsara wecrucible wechimiro 0 panguva dzakasiyana (0, 30, 60, 100 h); (c) C / Si reshiyo pamadaro akasiyana kubva pakati pemutsara wecrucible wechimiro 1 panguva dzakasiyana (0, 30, 60, 100 h); (d) Kuenzanisa kweC / Si chiyero pamadaro akasiyana (0, 25, 50, 75, 100 mm) kubva pakati pemutsara we crucible yechimiro 0 (yakasimba mutsara) uye chimiro 1 (dashed mutsara) panguva dzakasiyana (0, 30, 60, 100 h).
Mufananidzo 6 unoratidza shanduko muchidimbu dhayamita uye porosity yenzvimbo dzakasvibiswa dzezvivakwa zviviri izvi. Iyo nhamba inoratidza kuti iyo mbishi dhayamita inodzikira uye porosity inowedzera padyo nemadziro anorovera, uye mupendero porosity inoramba ichiwedzera uye chidimbu dhayamita chinoramba chichidzikira sezvo kukura kunoenderera. Iyo yakanyanya kumucheto porosity ndeye 0.99 pa100 h, uye iyo shoma chidimbu dhayamita inenge 300 μm. Iyo chidimbu dhayamita inowedzera uye iyo porosity inoderera pamusoro pepamusoro peiyo mbishi zvinhu, inoenderana nerecrystallization. Ukobvu hwenzvimbo yerecrystallization hunowedzera sezvo kukura kunofambira mberi, uye saizi yechikamu uye porosity inoramba ichichinja. Iyo yakanyanya particle dhayamita inosvika kupfuura 1500 μm, uye iyo shoma porosity ndeye 0.13. Uye zvakare, sezvo PG ichiwedzera tembiricha yenzvimbo yakasvibirira uye gasi supersaturation idiki, iyo recrystallization ukobvu hwekumusoro kweiyo yakasvibira yechimiro 1 idiki, iyo inovandudza chiyero chekushandiswa kwezvinhu.
Mufananidzo 6 Shanduko muchidimbu dhayamita (kuruboshwe) uye porosity (kurudyi) yenzvimbo yakasvibiswa yechimiro 0 uye chimiro 1 panguva dzakasiyana, chidimbu dhayamita unit: μm
Mufananidzo 7 unoratidza kuti chimiro 0 chinoputika pakutanga kwekukura, izvo zvingave zvine hukama nehuwandu hwekuyerera kwezvinhu zvakakonzerwa ne graphitization yeraw material edge. Chiyero chehondo chinopera simba panguva yekukura kunotevera, iyo inoenderana nekushanduka kwehuwandu hwekuyerera kwezvinhu pamberi pekukura kwekristaro kwechimiro 0 muMufananidzo 4 (d). Muchimiro 1, nekuda kwekuita kwePG, iyo crystal interface haina kuratidza warping. Mukuwedzera, PG inogadzirawo chiyero chekukura kwechimiro 1 zvakanyanya kuderera pane iyo yechimiro 0. Iyo yepakati yakakura yekristaro yechimiro 1 mushure me100 h inongova 68% yeiyo yechimiro 0.
Mufananidzo 7 Interface shanduko yechimiro 0 uye chimiro 1 makristasi pa30, 60, uye 100 h.
Kukura kweCrystal kwakaitwa pasi pemamiriro ezvinhu ekuenzanisa nhamba. Makristasi anokura nechimiro 0 uye chimiro 1 chinoratidzwa muMufananidzo 8 (a) uye Mufananidzo 8 (b), zvichiteerana. Iyo crystal yechimiro 0 inoratidza concave interface, ine undulations munzvimbo yepakati uye chikamu chekuchinja pamucheto. Iyo yepamusoro convexity inomiririra imwe dhigirii ye inhomogeneity mukutakura kwegasi-chikamu zvinhu, uye kuitika kwechikamu chekuchinja kunoenderana neiyo yakaderera C / Si ratio. Iyo interface yekristaro inokura nechimiro 1 inotenderera zvishoma, hapana shanduko yechikamu inowanikwa, uye ukobvu i65% yekristaro isina PG. Kazhinji, mhedzisiro yekukura kwekristaro inoenderana nemhedzisiro yekufananidza, ine yakakura radial tembiricha musiyano pakristaro interface yechimiro 1, kukurumidza kukura kumucheto kunodzvinyirirwa, uye huwandu hwese hwekuyerera kwezvinhu hunononoka. Chimiro chese chinopindirana nenhamba yekuenzanisa mhedzisiro.
Mufananidzo 8 SiC makristasi akakura pasi pechimiro 0 uye chimiro 1
Mhedziso
PG inobatsira kuvandudzwa kwekushisa kwese kwenzvimbo yakasvibirira uye kuvandudzwa kweaxial uye radial tembiricha kufanana, kusimudzira kuzara kwakazara uye kushandiswa kweiyo mbishi; musiyano wekushisa wepamusoro nepasi unowedzera, uye radial gradient yembeu yekristaro yepamusoro inowedzera, iyo inobatsira kuchengetedza iyo convex interface kukura. Panyaya yekufambiswa kwehuwandu, kuiswa kwePG kunoderedza huwandu hwese hwekutamisa huwandu, huwandu hwekuyerera kwezvinhu mukamuri yekukura ine PG inoshanduka zvishoma nenguva, uye iyo yese kukura maitiro akanyanya kugadzikana. Panguva imwecheteyo, PG inodzivirirawo zvinobudirira kuitika kweakawandisa edge mass kutamiswa. Uye zvakare, PG inowedzerawo chiyero cheC / Si chenzvimbo yekukura, kunyanya kumucheto wepamberi wembeu crystal interface, iyo inobatsira kuderedza kuitika kwechikamu chekuchinja panguva yekukura. Panguva imwecheteyo, iyo yekupisa yekupisa mhedzisiro yePG inoderedza kuitika kwerecrystallization muchikamu chepamusoro chezvakagadzirwa kune imwe nhanho. Nekukura kwekristaro, PG inoderedza chiyero chekukura kwekristaro, asi iyo yekukura interface inowedzera convex. Naizvozvo, PG inzira inoshanda yekuvandudza nharaunda yekukura yeSiC makristasi uye kukwiridzira mhando yekristaro.
Nguva yekutumira: Jun-18-2024