Iyo yekukura maitiro emonocrystalline silicon inoitwa zvachose mumunda wekupisa. Munda wakanaka wekupisa unobatsira kuvandudza mhando yemakristasi uye ine yakakwirira crystallization kunyatsoshanda. Dhizaini yenzvimbo yekudziya inonyanya kutarisisa shanduko yematembiricha emagetsi munzvimbo inodziya yekupisa uye kuyerera kwegasi mukamuri yevira. Kusiyana kwezvinhu zvinoshandiswa mumunda wekupisa zvinogadzirisa zvakananga hupenyu hwebasa remunda wekupisa. Iyo isina musoro inopisa munda haina kuoma chete kukura makristasi anosangana nemhando yezvinodiwa, asi zvakare haigone kukura yakazara monocrystalline pasi pezvimwe zvinodiwa maitiro. Ichi ndicho chikonzero iyo yakananga-kudhonza monocrystalline silicon indasitiri inoona inopisa munda dhizaini seyakanyanya musimboti tekinoroji uye inodyara hombe manpower uye zviwanikwa zvezvinhu mukupisa kwemunda kutsvaga nekusimudzira.
Iyo thermal system inoumbwa nezvinhu zvakasiyana-siyana zvemunda wekupisa. Isu tinongozivisa muchidimbu zvinhu zvinoshandiswa mumunda wekupisa. Kana iri yekugovera tembiricha mumunda wekupisa uye kukanganisa kwayo pakudhonza kwekristaro, isu hatizozviongorora pano. Iyo yekupisa yemunda zvinhu inoreva chimiro uye chemafuta ekudzivirira chikamu muvacuum choto chekamuri yekukura kwekristaro, iyo yakakosha pakugadzira yakakodzera tembiricha kugovera kwakatenderedza semiconductor kunyunguduka uye kristaro.
1. Thermal field structure material
Iyo yakakosha inotsigira zvinhu zveyakananga-kudhonza nzira yekukura monocrystalline silicon yakakwira-kuchena graphite. Graphite zvinhu zvinoita basa rakakosha muindasitiri yemazuva ano. Dzinogona kushandiswa senzvimbo yekupisa yekugadzira zvikamu zvakadai seheaters, kutungamira machubhu, crucibles, insulation tubes, crucible trays, nezvimwewo mukugadzirira monocrystalline silicon neCzochralski nzira.
Graphite zvinhuzvinosarudzwa nokuti zviri nyore kugadzirira mumabhuku makuru, zvinogona kugadziriswa uye zvinopesana nekupisa kwepamusoro. Carbon iri muchimiro chedhaimondi kana kuti graphite ine pakakwirira kunyungudika kupfuura chero chinhu kana musanganiswa. Zvigadzirwa zvegraphite zvine simba, kunyanya pakupisa kwakanyanya, uye iwo magetsi uye ekupisa conductivity zvakare zvakanaka. Kufambisa kwayo kwemagetsi kunoita kuti ive yakakodzera seaheaterzvinhu. Iyo ine inogutsa yemafuta conductivity coefficient, iyo inobvumira kupisa kunogadzirwa neanopisa kugoverwa zvakaenzana kune crucible uye zvimwe zvikamu zvemunda wekupisa. Nekudaro, pakupisa kwakanyanya, kunyanya pamusoro pemadaro marefu, iyo huru yekupisa yekupisa modhi ndeye radiation.
Zvikamu zvegraphite zvakatanga kugadzirwa neakanaka kabhoni zvidimbu zvakasanganiswa nebhainda uye zvinogadzirwa neextrusion kana isostatic kudzvanya. Nzvimbo dzepamusoro-soro dzegraphite dzinowanzo kudzvanywa isostatically. Chidimbu chose chinotanga kugadzirwa nekabhoni chozoiswa graphiti patembiricha yakanyanya, padyo ne3000°C. Zvikamu zvakagadziriswa kubva muzvidimbu izvi zvinowanzocheneswa mumhepo ine chlorine pane tembiricha yakakwira kubvisa kusvibiswa kwesimbi kuzadzisa zvinodiwa zveindasitiri yesemiconductor. Nekudaro, kunyangwe mushure mekucheneswa kwakaringana, mwero wekusvibiswa kwesimbi kune akati wandei mirairo yehukuru yakakwira kupfuura inobvumidzwa kune silicon monocrystalline zvinhu. Nokudaro, kutarisirwa kunofanira kutorwa mukugadzirwa kwemunda wekupisa kudzivirira kusvibiswa kwezvikamu izvi kubva pakupinda mukunyunguduka kana crystal pamusoro.
Graphite zvinhu zvinopinda zvishoma, izvo zvinoita kuti zvive nyore kune yakasara simbi mukati kuti isvike pamusoro. Uye zvakare, iyo silicon monoxide iripo mune yekuchenesa gasi yakatenderedza graphite pamusoro inogona kupinda mukati mezvizhinji zvinhu uye kuita.
Early monocrystalline silicon furnace heaters akagadzirwa nesimbi dzinoramba dzakaita se tungsten uye molybdenum. Nekukura kuri kuwedzera kwehunyanzvi hwekugadzira graphite, magetsi ekubatanidza pakati pezvikamu zvegraphite akagadzikana, uye monocrystalline silicon furnace heaters yakatsiva zvachose tungsten, molybdenum nezvimwe zvinopisa. Parizvino, inonyanya kushandiswa graphite zvinhu isostatic graphite. nyika yangu isostatic graphite yekugadzirira tekinoroji yakadzokera kumashure, uye yakawanda yezvigadzirwa zvegraphite zvinoshandiswa mumusha wephotovoltaic indasitiri zvinotengeswa kubva kunze kwenyika. Vagadziri vekunze isostatic graphite vanonyanya kusanganisira yeGermany SGL, Tokai Carbon yekuJapan, Toyo Tanso yekuJapan, nezvimwewo ndiro uye zvimwe zvikamu. Carbon/carbon (C/C) macomposites ndiwo kabhoni faibha yakasimbiswa kabhoni-yakavakirwa makombisi ane nhevedzano yezvakanakisa zvivakwa zvakaita seyakanyanya kusimba simba, yakakwira chaiyo modulus, yakaderera thermal yekuwedzera coefficient, yakanaka magetsi conductivity, yakakwirira kuputsika kusimba, yakaderera chaiyo giravhiti, thermal shock resistance, corrosion resistance, uye high tembiricha kuramba. Parizvino, anoshandiswa zvakanyanya muaerospace, mijaho, biomaterials uye mamwe minda sezvitsva zvepamusoro-tembiricha zvinodzivirira zvimiro. Parizvino, iwo mabhodhoro makuru akasangana nedzimba dzeC / C macomposites achiri mutengo uye maindasitiri nyaya.
Kune zvimwe zvinhu zvakawanda zvinoshandiswa kugadzira minda yekupisa. Carbon faibha yakasimbiswa graphite ine zviri nani zvemichina; asi inodhura uye ine zvimwe zvinodiwa pakugadzira.Silicon carbide (SiC)chinhu chiri nani pane graphite mune zvakawanda, asi inodhura zvakanyanya uye yakaoma kugadzira zvikamu zvevhoriyamu yakakura. Nekudaro, SiC inowanzoshandiswa seaCVD kupfekakuwedzera hupenyu hwezvikamu zvegraphite zvakafumurwa kune corrosive silicon monoxide gasi, uye zvakare inogona kuderedza kusvibiswa kubva kugraphite. Iyo dense CVD silicon carbide coating inodzivirira zvinosvibisa mukati meiyo microporous graphite zvinhu kubva kusvika pamusoro.
Imwe ndeye CVD kabhoni, iyo inogona zvakare kugadzira dense layer pamusoro peiyo graphite chikamu. Zvimwe zvinhu zvinodzivirira kupisa kwepamusoro, senge molybdenum kana ceramic zvinhu zvinogona kugarisana nenharaunda, zvinogona kushandiswa pasina njodzi yekusvibisa kunyungudika. Nekudaro, oxide ceramics kazhinji inogumira mukushandiswa kwayo kune graphite zvinhu pakupisa kwakanyanya, uye kune mashoma mamwe sarudzo kana insulation ichidikanwa. Imwe ndeye hexagonal boron nitride (dzimwe nguva inodaidzwa kuti white graphite nekuda kwezvivakwa zvakafanana), asi iyo mechanical properties haina kunaka. Molybdenum inowanzo shandiswa zvine musoro kune yakakwirira tembiricha mamiriro nekuda kwekudhura kwayo kuri pakati nepakati, yakaderera kupararira mwero mumakristasi esilicon, uye yakaderera kwazvo yekuparadzanisa coefficient inosvika 5 × 108, iyo inobvumira imwe huwandu hwekusvibiswa kwemolybdenum isati yaparadza chimiro chekristaro.
2. Thermal insulation materials
Iyo inonyanya kushandiswa insulation material kabhoni inonzwa nenzira dzakasiyana siyana. Carbon inonzwa inogadzirwa neshinda dzakatetepa, dzinoita sekudzivirira nekuti dzinovharira mwaranzi yekupisa kakawanda pachinhambwe chipfupi. Iyo kabhoni yakapfava inonzwa inorukwa kuita masheets matete emidziyo, ayo anobva achekwa kuita chimiro chaunoda uye akagonya zvine simba kuita radius inonzwisisika. Mafeve akarapirwa anoumbwa nezvinhu zvakafanana zvefiber, uye kabhoni-ine binder inoshandiswa kubatanidza mafiibhi akaparadzirwa kuita chimwe chinhu chakasimba uye chakaumbwa. Kushandiswa kwekemikari vapor deposition yekabhoni pachinzvimbo chebhainda kunogona kuvandudza mashandiro emuchina wechinhu.
Kazhinji, pamusoro pekunze kwekudziya kwekuporeswa kwemafuta kunoputirwa neinoenderera mberi graphite coating kana foil kuderedza kukukurwa uye kusakara pamwe nekusvibiswa kwechikamu. Mamwe marudzi ecarbon-based thermal insulation materials aripowo, akadai secarbon foam. Kazhinji, graphitized zvinhu zviri pachena zvinosarudzwa nekuti graphitization inoderedza zvakanyanya nzvimbo yefiber. Kubuda kunze kwezvinhu izvi zvepamusoro-soro-nzvimbo kwakaderedzwa zvakanyanya, uye zvinotora nguva shoma kupomba choto kune vacuum yakakodzera. Imwe ndeye C / C inoumbwa zvinhu, iyo ine yakasarudzika hunhu sehuremu huremu, yakanyanya kukuvadza kushivirira uye yakakwirira simba. Inoshandiswa muminda inopisa kutsiva graphite zvikamu zvakanyanya kuderedza kuwanda kwezvikamu zvegraphite kutsiva, inovandudza monocrystalline mhando uye kugadzikana kwekugadzira.
Zvinoenderana neyakagadzikiswa zvinhu, kabhoni inonzwa inogona kukamurwa kuita polyacrylonitrile-yakavakirwa kabhoni yakanzwa, viscose-yakavakirwa kabhoni yakanzwa, uye pitch-based kabhoni inonzwa.
Polyacrylonitrile-based carbon inonzwa ine yakakura madota. Mushure mekurapa kwepamusoro-tembiricha, iyo fiber imwechete inova brittle. Panguva yekushanda, zviri nyore kugadzira guruva kusvibisa nharaunda yevira. Panguva imwecheteyo, iyo fiber inogona kupinda nyore mu pores uye kufema kwemuviri wemunhu, izvo zvinokuvadza kuhutano hwevanhu. Viscose-yakavakirwa kabhoni inonzwa ine yakanaka yekupisa yekuvharisa kuita. Yakapfava mushure mekurapwa kwekupisa uye haisi nyore kugadzira guruva. Nekudaro, iyo muchinjiko-chikamu cheiyo viscose-yakavakirwa mbishi fiber haina kurongeka, uye kune akawanda grooves pane fiber pamusoro. Zviri nyore kugadzira magasi akadai seC02 pasi pemhepo yeoxidizing yeCZ silicon choto, zvichikonzera kunaya kweokisijeni uye kabhoni zvinhu mune monocrystalline silicon zvinhu. Vagadziri vakuru vanosanganisira yeGerman SGL nemamwe makambani. Parizvino, iyo inonyanya kushandiswa muindasitiri ye semiconductor monocrystalline indasitiri yepitch-based kabhoni inonzwa, iyo ine yakaipisisa kupisa kupisa kuita kupfuura viscose-based kabhoni inonzwa, asi pitch-based kabhoni inonzwa ine yakakwira kuchena uye yakaderera kuburitsa guruva. Vagadziri vanosanganisira Kureha Chemical yekuJapan neOsaka Gasi.
Nekuti chimiro chekabhoni chakanzwika hachina kugadzikiswa, hazvina kunaka kushanda. Ikozvino makambani mazhinji akagadzira nyowani yekupisa yekudzimisa zvinhu yakavakirwa pane kabhoni yakanzwa-yakapora kabhoni inonzwa. Yakarapirwa kabhoni inonzwa, inonziwo yakaoma kunzwa, kabhoni inonzwa ine imwe chimiro uye inozvitsigira midziyo mushure mekunyorova kwainzwa kuisirwa neresin, laminated, kurapwa uye carbonized.
Kukura kwemhando yemonocrystalline silicon inokanganiswa zvakananga nenharaunda yekupisa, uye kabhoni fiber yekupisa yekupisa zvinhu inoita basa rakakosha munzvimbo ino. Carbon fiber thermal insulation yakapfava ichiri nemukana wakakura muindasitiri yephotovoltaic semiconductor nekuda kwemutengo wayo wakanaka, yakanakisa yekupisa yekupisa mhedzisiro, inochinjika dhizaini uye customizable chimiro. Pamusoro pezvo, kabhoni faibha yakaoma yekupisa yekupisa inonzwa ichave nenzvimbo yakakura yekusimudzira mumusika wezvinhu zvinopisa nekuda kwesimba rayo uye kushanda kwepamusoro. Isu takazvipira kutsvagisa uye kusimudzira mumunda wemafuta ekudzivirira zvinhu, uye nekuenderera mberi nekugadzirisa chigadzirwa kusimudzira budiriro uye kusimudzira kweiyo photovoltaic semiconductor indasitiri.
Nguva yekutumira: Jun-12-2024