Kubva zvakawanikwa, silicon carbide yakakwezva kutarisisa kwakapararira. Silicon carbide inoumbwa nehafu yeSi maatomu uye hafu C maatomu, ayo akabatanidzwa necovalent mabhondi kuburikidza nemaelectron pairs achigovana sp3 hybrid orbitals. Muchikamu chekutanga chekristaro yayo imwe chete, maatomu mana eSi akarongwa mune yakajairwa tetrahedral chimiro, uye C atomu iri pakati peiyo tetrahedron yakajairwa. Sezvineiwo, iyo Si atomu inogona zvakare kutorwa sepakati peiyo tetrahedron, nekudaro ichigadzira SiC4 kana CSi4. Tetrahedral chimiro. Iyo covalent bond muSiC yakanyanya ionic, uye iyo silicon-kabhoni bond simba yakakwira zvakanyanya, ingangoita 4.47eV. Nekuda kweiyo yakaderera stacking simba simba, silicon carbide makristasi anoumba nyore akasiyana polytypes panguva yekukura maitiro. Kune anopfuura mazana maviri anozivikanwa polytypes, ayo anogona kukamurwa muzvikamu zvitatu zvikuru: cubic, hexagonal uye trigonal.
Parizvino, nzira huru dzekukura dzeSiC crystals dzinosanganisira Physical Vapor Transport Method (PVT nzira), High Temperature Chemical Vapor Deposition (HTCVD nzira), Liquid Phase Method, etc. Pakati pavo, nzira yePVT yakanyanya kukura uye yakakodzera kune indasitiri. kugadzirwa kwakawanda. .
Iyo inodaidzwa kuti PVT nzira inoreva kuisa SiC mhodzi makristasi pamusoro peiyo crucible, uye nekuisa SiC hupfu seyakabikwa pazasi peiyo crucible. Munzvimbo yakavharwa yekushisa kwepamusoro uye kuderera kwakadzika, iyo SiC poda inodzika uye inokwira kumusoro pasi pechiito chekushisa gradient uye musiyano wekutarisa. Nzira yekuiendesa kunharaunda yekristaro yembeu uye wozoidzokorodza mushure mekusvika kune supersaturated state. Iyi nzira inogona kuwana kudzora kukura kweSiC crystal saizi uye chaiwo makristaro mafomu. .
Zvisinei, kushandisa nzira yePVT yekukura makristasi eSiC kunoda kugara uchichengetedza mamiriro ekukura akakodzera panguva yekukura kwenguva refu, kana zvisina kudaro zvinotungamirira kumararamiro emararamiro, nokudaro kukanganisa kunaka kwekristaro. Nekudaro, kukura kweSiC makristasi kunopedzwa munzvimbo yakavharwa. Kune nzira shoma dzekutarisa dzinoshanda uye dzakawanda dzakasiyana, saka kutonga kwemaitiro kwakaoma.
Mukugadzirisa kukura kweSiC crystals nePVT nzira, nhanho inoyerera yekukura mode (Step Flow Growth) inofungidzirwa kuti ndiyo nzira huru yekukura kwakagadzikana kwechimiro chimwe chekristani.
Iyo vaporized Si maatomu uye C maatomu anozonyanya kubatana nemaatomu ekristaro epamusoro pakink point, kwaanozoita nucleate uye kukura, zvichiita kuti nhanho imwe neimwe ienderere mberi mukufanana. Kana iyo nhanho yakafara pamusoro pekristaro yepamusoro ichipfuura kupararira kwemahara nzira yeadatoms, nhamba huru yeadatoms inogona kuungana, uye maviri-dimensional chitsuwa-sekukura maitiro akaumbwa achaparadza nhanho yekuyerera kwekukura modhi, zvichikonzera kurasikirwa kwe4H. ruzivo rwekristaro chimiro, zvichikonzera kukanganisa kwakawanda. Naizvozvo, kugadziridzwa kwemaitiro parameters kunofanirwa kuzadzisa kutonga kweiyo nhanho nhanho chimiro, nekudaro ichidzvanya chizvarwa chepolymorphic defects, kuzadzisa chinangwa chekuwana imwechete crystal fomu, uye pakupedzisira kugadzirira emhando yepamusoro makristasi.
Sezvo yekutanga yakagadziridzwa SiC crystal yekukura nzira, iyo yemuviri mhute nzira yekufambisa parizvino ndiyo yakanyanya kukura nzira yekukura makristasi eSiC. Zvichienzaniswa nedzimwe nzira, nzira iyi ine yakaderera zvinodiwa pakukura midziyo, nyore kukura muitiro, simba controllability, zvakati wandei budiriro tsvakurudzo, uye akatowana maindasitiri kushandiswa. Kubatsira kweHTCVD nzira ndeyokuti inogona kukura conductive (n, p) uye yakakwirira-kuchena semi-insulating wafers, uye inogona kudzora iyo doping concentration kuitira kuti mutakuri anosungirirwa muwafer agadziriswe pakati pe3 × 1013 ~ 5 × 1019. /cm3. Izvo zvisingabatsiri ndezvepamusoro tekinoroji chikumbaridzo uye chikamu chakaderera chemusika. Sezvo iyo yemvura-chikamu SiC crystal yekukura tekinoroji ichiramba ichikura, icharatidza kugona kukuru mukusimudzira indasitiri yese yeSiC mune ramangwana uye ingangove nzvimbo nyowani yekubudirira muSiC crystal kukura.
Nguva yekutumira: Kubvumbi-16-2024