Munguva ye vapor phase epitaxy (VPE) process, basa re pedestal ndere kutsigira substrate uye kuve nechokwadi chekudziya yunifomu panguva yekukura. Mhando dzakasiyana dzezvitsitsinho dzakakodzerwa nemamiriro akasiyana ekukura uye masisitimu emidziyo. Aya anotevera mamwe emhando dzinowanzo shandiswa pedestal mumhute chikamuepitaxy:
Bharel pedestal
Migodhi pedestals inowanzoshandiswa mune yakachinjika kana yakarereka mhute chikamu epitaxy masisitimu. Vanogona kubata substrate uye kubvumira gasi kuyerera pamusoro pe substrate, iyo inobatsira kuwana yunifomu epitaxial kukura.
Disc-shaped pedestal (vertical pedestal)
Disc-shaped pedestals akakodzera vertical vapor phase epitaxy systems, umo substrate inoiswa vertically. Iyi dhizaini inobatsira kudzikisa nzvimbo yekubatana pakati pe substrate uye susceptor, nekudaro kuderedza kurasikirwa kwekupisa uye kusvibiswa kunogona kuitika.
Horizontal susceptor
Horizontal susceptors haanyanye kuwanda mumhute chikamu epitaxy, asi inogona kushandiswa mune mamwe masikirwo ekukura kubvumidza epitaxial kukura munzira yakachinjika.
Monolithic epitaxial reaction susceptor
Iyo monolithic epitaxial reaction susceptor yakagadzirirwa imwe substrate, iyo inogona kupa yakanyatso kudzora tembiricha uye zviri nani kupisa kuparadzaniswa, kwakakodzera kukura kwemhando yepamusoro epitaxial layers.
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Nguva yekutumira: Jul-30-2024