Kushandiswa kwesilicon carbide ceramics mumunda we semiconductor

Iyo yakasarudzika zvinhu zvechaiyo zvikamu zvephotolithography michina

Mundima ye semiconductor,silicon carbide ceramiczvinhu zvinonyanya kushandiswa mumidziyo yakakosha yekugadzira yakabatanidzwa yedunhu, senge silicon carbide worktable, njanji,reflectors, ceramic suction chuck, maoko, madhisiki ekukuya, zvigadziriso, nezvimwe zvemichina yelithography.

Silicon carbide ceramic zvikamuye semiconductor uye optical equipment

● Silicon carbide ceramic grinding disc. Kana iyo dhisiki yekukuya yakagadzirwa nesimbi yakakandwa kana kabhoni simbi, hupenyu hwayo hwesevhisi hupfupi uye huwandu hwayo hwekuwedzera hwekupisa hwakakura. Munguva yekugadziriswa kwesilicon wafers, kunyanya panguva yekumhanyisa-kukuya kana kupukuta, kupfeka uye kupisa kwekuchinja kweiyo grinding disc kunoita kuti zviome kuvimbisa kupfava uye kufanana kwesilicon wafer. Dhisiki rekukuya rakagadzirwa nesilicon carbide ceramics rine kuomarara kwakanyanya uye kupera kwakaderera, uye iyo yekudziya yekuwedzera coefficient yakafanana neiyo yesilicon wafers, saka inogona kuvhuniwa nekukwenenzverwa nekumhanya kwakanyanya.
● Silicon carbide ceramic fixture. Uye zvakare, kana silicon wafers inogadzirwa, inoda kurapwa yakakwira-tembiricha yekupisa uye inowanzotakurwa uchishandisa silicon carbide fixtures. Izvo zvinodzivirira kupisa uye hazviparadzi. Dhaimondi-rakafanana nekabhoni (DLC) uye mamwe machira anogona kuiswa pamusoro kuti awedzere kuita, kuderedza kukuvadzwa kwewafer, uye kudzivirira kusvibiswa kubva pakupararira.
● Silicon carbide worktable. Kutora worktable mumuchina welithography semuenzaniso, iyo worktable inonyanya kuita basa rekupedzisa kuratidzwa kwekufamba, inoda kukurumidza-kumhanya, hombe-stroke, matanhatu-degree-e-rusununguko nano-level ultra-precision movement. Semuyenzaniso, yemuchina welithography une resolution ye100nm, kuvharika kwechokwadi kwe33nm, uye mutsara wakafara we10nm, iyo worktable positioning inodikanwa kuti isvike 10nm, iyo mask-silicon wafer panguva imwe chete kutsika uye kumhanyisa kumhanya i150nm/s. uye 120nm / s zvakateerana, uye iyo mask scanning yekumhanyisa iri pedyo 500nm/s, uye tafura yekushanda inodiwa kuti ive nepamusoro-soro yekufamba uye kugadzikana.

Schematic dhizaini yeiyo worktable uye micro-kufamba tafura (chikamu chikamu)

● Silicon carbide ceramic square mirror. Zvikamu zvakakosha mumakiyi akabatanidzwa edunhu midziyo yakadai semichina yelithography ine zvimiro zvakaoma, zviyero zvakaomarara, uye maburi akareruka zvimiro, zvichiita kuti zviome kugadzirira zvakadai silicon carbide ceramic zvikamu. Parizvino, mainstream epasi rese akabatanidzwa emagetsi emagetsi ekugadzira zvigadzirwa, senge ASML muNetherlands, NIKON uye CANON muJapan, vanoshandisa yakawandisa zvinhu senge microcrystalline girazi uye cordierite kugadzirira sikweya magirazi, epakati zvikamu zvemichina yelithography, uye shandisa silicon carbide. Ceramics kugadzirira zvimwe zvepamusoro-soro zvimiro zvikamu zvine maumbirwo akareruka. Nekudaro, nyanzvi kubva kuChina Building Materials Research Institute dzakashandisa tekinoroji yekugadzirira kuti iwane kugadzirira kwehukuru-hukuru, hwakaoma-umiro, huremu hwepamusoro, hwakavharirwa zvizere nesilicon carbide ceramic square magirazi uye mamwe maitiro uye anoshanda optical components for lithography machine.