Kushandiswa uye maitiro esilicon carbide CVD coating

Silicon carbide (SiC)chinhu chakasimba chakasimba chinozivikanwa nekuoma kwayo kwepamusoro, kukwirira kwemafuta ekupisa, uye kuramba kune makemikari ekuora. Pakati pedzakasiyana nzira dzekushandisa SiC panzvimbo,CVD SiC coating(Chemical Vapor Deposition yesilicon carbide) inomira pachena nekuda kwekugona kwayo kugadzira yunifomu, yakakwirira-kuchena machira ane yakanakisa adhesion. Iyi tekinoroji yakakosha kune dzakasiyana siyana dzekushandiswa kwemaindasitiri, kunyanya munzvimbo dzekupisa uye dzakaomarara dzemakemikari.

Zvikumbiro zveCVD SiC Coating

TheCVD SiC coatingprocess inoshandiswa zvakanyanya mumaindasitiri akati wandei nekuda kwekusiyana kwayo uye kuita mabhenefiti. Imwe yemashandisirwo ekutanga iri mukugadzira semiconductor, uko SiC-yakavharwa zvikamu zvinobatsira kuchengetedza nzvimbo dzakatetepa panguva yekugadziriswa kwewafer. CVD SiC-yakavharwa michina, senge susceptors, mhete, uye wafer vatakuri, inovimbisa kugadzikana kwepamusoro-tembiricha uye inodzivirira kusvibiswa panguva dzakakosha dzekugadzira matanho.

Muindasitiri yemuchadenga,CVD SiC coatinginoshandiswa kune zvikamu zvinoratidzwa nekupisa kwakanyanya uye mechanical stress. Iko kupfekedza kunowedzera zvakanyanya hupenyu hwema turbine blades nemakamuri ekupisa, anoshanda pasi pemamiriro akaomarara. Pamusoro pezvo, CVD SiC inowanzo shandiswa mukugadzira magirazi nemidziyo yemaziso nekuda kwekuratidzira kwayo uye kugadzikana kwemafuta.

Imwe yakakosha kushandiswa kweCVD SiC iri muindasitiri yemakemikari. Pano, SiC coatings inodzivirira zvinhu senge zvinopisa kupisa, zvisimbiso, uye pombi kubva kune zvinoparadza zvinhu. Nzvimbo yeSiC inoramba isina kukanganiswa nemaasidhi uye mabhesi, zvichiita kuti ive yakanaka kune nharaunda uko kusimba kwemakemikari kwakakosha.

CVD Epitaxial Deposition MuBarrel Reactor

Hunhu hweCVD SiC Coating

Izvo zvivakwa zveCVD SiC coating ndizvo zvinoita kuti ishande zvakanyanya mumashandisirwo aya. Humwe hwehunhu hwayo hukuru kuoma kwayo, inomira padyo nedhaimani pachiyero chekuomarara cheMohs. Uku kuomarara kwakanyanya kunopa CVD SiC coatings zvinoshamisa kuramba kupfeka uye abrasion, zvichiita kuti ive yakakodzera kune yakakwirira-friction nharaunda.

Pamusoro pezvo, SiC ine yakanakisa yekupisa conductivity, iyo inobvumira zvakavharwa zvikamu kuchengetedza kutendeseka kwavo kunyangwe pasi pekupisa kwakanyanya. Izvi zvinonyanya kukosha mune semiconductor uye aerospace application, uko zvinhu zvinofanirwa kushingirira kupisa kwakanyanya uku zvichichengetedza simba rechimiro.

Iyo kemikari inertness yeCVD SiC coating ndiyo imwe yakanakira mukana. Inopikisa oxidation, corrosion, uye kuita kwemakemikari nezvinhu zvine hukasha, zvichiita kuti ive yakakodzera kupfekedzwa kwemakemikari ekugadzira michina. Uyezve, iyo yakaderera coefficient yekuwedzera kwekupisa inovimbisa kuti nzvimbo dzakavharwa dzinochengeta chimiro chadzo uye kushanda kunyangwe pasi pemamiriro ekupisa bhasikoro.

Mhedziso

Muchidimbu, CVD SiC coating inopa yakasimba, yakakwirira-inoshanda mhinduro kune maindasitiri anoda zvinhu zvinogona kutsungirira kupisa kwakanyanya, kushushikana kwemagetsi, uye kemikari corrosion. Zvishandiso zvaro zvinotangira kubva pakugadzira semiconductor kusvika kune aerospace uye kugadzirisa makemikari, uko zvimiro zveSiC-sekuoma, kugadzikana kwemafuta, uye makemikari kuramba-akakosha pakubudirira kwekushanda. Sezvo maindasitiri achiramba achisundidzira miganhu yekushanda uye kuvimbika, CVD SiC coatings icharamba iri yakakosha tekinoroji yekusimudzira kusimba kwechikamu uye hupenyu hurefu.

Nekusimudzira hunyanzvi hwevagadziri vane hunyanzvi sevet-china, makambani anogona kuwana emhando yepamusoro CVD SiC coatings inosangana nezvinoda kuomesesa zvemazuva ano maindasitiri maitiro.


Nguva yekutumira: Zvita-18-2023
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