Kuisa firimu rakatetepa kupfekedza chidimbu chefirimu pane chikuru substrate zvinhu zvesemiconductor. Iyi firimu inogona kugadzirwa nezvinhu zvakasiyana-siyana, senge insulating compound silicon dioxide, semiconductor polysilicon, metal copper, etc. Midziyo inoshandiswa pakuputira inonzi thin film deposition equipment.
Kubva pamaonero eiyo semiconductor chip kugadzira process, iri kumberi-kumagumo maitiro.
Iyo yakaonda firimu yekugadzirira maitiro inogona kukamurwa kuita zvikamu zviviri zvinoenderana neayo nzira yekugadzira firimu: yemuviri vapor deposition (PVD) uye kemikari vapor deposition.(CVD), pakati peiyo CVD process michina inoverengera chikamu chepamusoro.
Physical vapor deposition (PVD) inoreva vaporization pamusoro pechinhu chinobva uye kuiswa pamusoro peiyo substrate kuburikidza nepasi-pressure gasi / plasma, kusanganisira evaporation, sputtering, ion danda, nezvimwewo;
Chemical vapor deposition (CVD) zvinoreva nzira yekuisa firimu rakasimba pamusoro pesilicon wafer kuburikidza nekemikari reaction yegasi musanganiswa. Zvinoenderana nemamiriro ekuita (kumanikidza, precursor), yakakamurwa kuita mhepo yemhepoCVD(APCVD), low pressureCVD(LPCVD), plasma yakawedzera CVD (PECVD), high density plasma CVD (HDPCVD) uye atomic layer deposition (ALD).
LPCVD: LPCVD ine zvirinani nhanho yekuvhara kugona, yakanaka kuumbwa uye chimiro chekutonga, yakakwirira deposition mwero uye kubuda, uye inoderedza zvakanyanya kunobva kusvibiswa kwechikamu. Kuvimba nemidziyo yekudziya senzvimbo yekupisa kuchengetedza maitiro, tembiricha yekudzora uye gasi kudzvanywa kwakakosha. Inoshandiswa zvakanyanya muPoly layer kugadzira kweTopCon maseru.
PECVD: PECVD inovimba neplasma inogadzirwa neredhiyo frequency induction kuti iwane yakaderera tembiricha (isingasviki 450 madhigirii) yeakaonda firimu deposition process. Kudzikira tembiricha deposition ndiyo mukana wayo mukuru, nekudaro kuchengetedza simba, kudzikisa mitengo, kuwedzera huwandu hwekugadzira, uye kuderedza kuparara kwehupenyu hwevadiki vanotakura mumasilicon wafers anokonzerwa nekupisa kwakanyanya. Inogona kushandiswa kune maitiro emasero akasiyana-siyana akadai sePERC, TOPCON, uye HJT.
ALD: Yakanaka firimu yakafanana, yakakora uye isina maburi, yakanaka nhanho yekuvhara maitiro, inogona kuitwa pakadzika tembiricha (yekamuri tembiricha-400 ℃), inogona nyore uye nemazvo kudzora ukobvu hwefirimu, inoshandiswa zvakanyanya kune substrates yemhando dzakasiyana, uye haidi kudzora kufanana kweiyo reactant kuyerera. Asi chakashata ndechekuti kukurumidza kwekugadzira firimu kunononoka. Zvakadai se zinc sulfide (ZnS) chiedza-emitting layer inoshandiswa kugadzira nanostructured insulators (Al2O3/TiO2) uye nhete-firimu electroluminescent displays (TFEL).
Atomic layer deposition (ALD) ivacuum coating process inoumba firimu rakatetepa pamusoro pe substrate layer ne layer muchimiro che one atomic layer. Kubva muna 1974, nyanzvi yefizikisi yekuFinnish Tuomo Suntola akagadzira tekinoroji iyi uye akahwina mubairo wemirioni imwe yemaeuro Millennium Technology. Tekinoroji yeALD yakatanga kushandiswa kune flat-panel electroluminescent displays, asi haina kushandiswa zvakanyanya. Yakanga isiri kusvika pakutanga kwezana ramakore rechi21 apo tekinoroji yeALD yakatanga kugamuchirwa neindasitiri yesemiconductor. Nekugadzira michina yakatetepa yakakwira-dielectric kutsiva yechinyakare silicon oxide, yakabudirira kugadzirisa dambudziko razvino rekuvuza rakakonzerwa nekudzikiswa kwemutsara wehupamhi hwema transistors emunda, zvichikurudzira Mutemo waMoore kuti uenderere mberi uchienda kuhupamhi hwemitsara midiki. Dr. Tuomo Suntola akambotaura kuti ALD inogona kuwedzera zvakanyanya kuwanda kwekubatanidza kwezvikamu.
Zvinyorwa zveveruzhinji zvinoratidza kuti tekinoroji yeALD yakagadzirwa naDr. Tuomo Suntola wePICOSUN muFinland muna 1974 uye yakave yakasimudzirwa kune dzimwe nyika, yakadai seyepamusoro dielectric film mu 45/32 nanometer chip yakagadzirwa neIntel. MuChina, nyika yangu yakaunza tekinoroji yeALD makore anopfuura makumi matatu gare gare kupfuura nyika dzekunze. Muna Gumiguru 2010, PICOSUN muFinland neFudan University yakabata musangano wekutanga wepamusha weALD wekuchinjana dzidzo, vachiunza tekinoroji yeALD kuChina kekutanga.
Kuenzaniswa neyechinyakare makemikari vapor deposition (CVD) uye physical vapor deposition (PVD), zvakanakira ALD zvakanakisa-dimensional conformality, hombe-nzvimbo firimu kufanana, uye chaiyo ukobvu control, ayo akakodzera kurima e-ultra-thin films pane akaomarara maumbirwo epasi uye yakakwirira aspect ratio zvimiro.
-Data source: Micro-nano processing platform yeTsinghua University-
Munguva yepost-Moore, kuomarara uye hurongwa hwehuwandu hwekugadzira wafer hwakagadziridzwa zvakanyanya. Kutora logic machipi semuenzaniso, nekuwedzera kwehuwandu hwemitsara yekugadzira ine maitiro ari pasi pe45nm, kunyanya mitsara yekugadzira ine maitiro e28nm uye pazasi, izvo zvinodiwa pakukora uye kutonga chaiko kwakakwira. Mushure mekuiswa kwehunyanzvi hwekuvhenekesa tekinoroji, nhamba yeALD maitiro matanho uye michina inodiwa yakawedzera zvakanyanya; mundima yememory chips, iyo huru yekugadzira maitiro yakabuda kubva ku2D NAND kuenda ku3D NAND chimiro, huwandu hwemukati hwemukati hwakaramba huchiwedzera, uye zvikamu zvishoma nezvishoma zvakaratidza yakakwirira-density, yakakwirira chikamu ratio zvimiro, uye basa rakakosha. yeALD yakatanga kubuda. Kubva pamaonero ekuvandudza kweramangwana kwema semiconductors, tekinoroji yeALD ichaita basa rinowedzera kukosha munguva yepashure-Moore.
Semuyenzaniso, ALD ndiyo yega tekinoroji tekinoroji inogona kusangana nekuvhara uye kuita kwefirimu zvinodiwa zveakaomesesa 3D akaturikidzana zvimiro (senge 3D-NAND). Izvi zvinogona kuonekwa zvakajeka mumufananidzo uri pasi apa. Iyo firimu yakaiswa muCVD A (bhuruu) haina kuvhara zvachose chikamu chezasi chechimiro; kunyange kana mamwe maitiro ekugadzirisa akaitwa kuCVD (CVD B) kuti awane kuvharwa, iyo firimu yekushanda uye kuumbwa kwemakemikari yepasi nzvimbo yakashata zvikuru (chena nzvimbo mumufananidzo); zvakasiyana, kushandiswa kwehunyanzvi hweALD kunoratidza kuvharwa kwefirimu yakazara, uye yakakwirira-yemhando uye yunifomu firimu zvinhu zvinowanikwa munzvimbo dzese dzechimiro.
--Mufananidzo Yakanakira yeALD tekinoroji ichienzaniswa neCVD (Kwakabva: ASM)—-
Kunyangwe CVD ichiri kutora chikamu chikuru chemusika munguva pfupi, ALD yave imwe yenzvimbo dzinokurumidza kukura dzemusika wewafer fab michina. Mumusika uyu weALD une mukana mukuru wekukura uye basa rakakosha mukugadzira chip, ASM ikambani inotungamira mumunda wemidziyo yeALD.
Nguva yekutumira: Jun-12-2024