Sputtering zvinangwaanonyanya kushandiswa mumagetsi uye maindasitiri eruzivo, akadai semaseketi akabatanidzwa, kuchengetedza ruzivo, kuratidzwa kwekristaro yemvura, laser ndangariro, zvigadzirwa zvemagetsi ekudzora, nezvimwe. Zvinogona kushandiswawo mumunda wegirazi rekuvhara, pamwe nekupfeka-inopokana. zvinhu, high-temperature corrosion resistance, high-end decoration zvigadzirwa uye mamwe maindasitiri.
Sputtering ndiyo imwe yenzira huru yekugadzirira zvinyoro zvemufirimu zvinhu.Inoshandisa ions inogadzirwa neayoni masosi kuti ikurumidze uye iunganidze muvacuum kuti iumbe matanda eiyoni simba anomhanya, kubhomba nzvimbo yakasimba, uye kuchinjanisa simba rekinetic pakati peiyoni nemaatomu akasimba epamusoro. Maatomu ari panzvimbo yakasimba anosiya akasimba uye anoiswa pamusoro pe substrate. Iyo yakabhomba yakasimba ndiyo mbishi yekuisa mafirimu matete nekupuruzira, iyo inonzi sputtering target. Mhando dzakasiyana-siyana dzakapfava dzakatetepa firimu zvinhu zvakashandiswa zvakanyanya mu semiconductor yakabatanidzwa maseketi, kurekodha midhiya, flat-panel kuratidza uye workpiece pamusoro coatings.
Pakati pemaindasitiri ese ekushandisa, iyo semiconductor indasitiri ine yakanyanya kuomesesa yemhando yezvinodiwa zvechinangwa sputtering films.High-purity metal sputtering targets inonyanya kushandiswa mukugadzira wafer uye advanced packaging process. Tichitora chip kugadzira semuenzaniso, tinogona kuona kuti kubva pasilicon wafer kuenda kune chip, inoda kupfuura ne7 mikuru nzira dzekugadzira, dzinoti diffusion (Thermal process), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Thin Film Growth (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization) Maitiro anowirirana chimwe nechimwe. Iyo sputtering target inoshandiswa mukuita "metallization". Icho chinonangwa chinoputirwa ne-high-energy particles neyakaonda firimu deposition equipment uyezve simbi layer ine mabasa chaiwo inoumbwa pasilicon wafer, senge conductive layer, barrier layer. Mirira.Sezvo maitiro emasemiconductors ese akasiyana saka dzimwe nguva panodiwa mamiriro ekuona kuti sisitimu iripo nemazvo saka tinoda mamwe marudzi ezvigadzirwa zvemadummy pane mamwe matanho ekugadzirwa kuti tisimbise mhedzisiro.
Nguva yekutumira: Jan-17-2022