Semiconductor indasitiri yezvinodiwa zve graphite zvinhu zvinodiwa zvakanyanya kukwirisa, yakanaka particle size yegraphite ine yakanyanya kurongeka, yakakwirira tembiricha kuramba, simba rakakura, kurasikirwa kudiki uye zvimwe zvakanakira, senge: sintered graphite zvigadzirwa mold.Nekuti michina yegraphite inoshandiswa muindasitiri yesemiconductor (kusanganisira heaters uye inofa yakasvibiswa) inodiwa kuti irambe ichidzokororwa kudziyisa nekutonhodza maitiro, kuti uwedzere hupenyu hwebasa remichina yegraphite, zvinowanzodiwa kuti zvinhu zvegraphite zvinoshandiswa zvishande zvakagadzikana. uye kupisa kusagadzika kwekuita basa.
01 Graphite accessories zve semiconductor crystal kukura
Maitiro ese anoshandiswa kurima semiconductor makristasi ari kushanda pasi pekupisa kwakanyanya uye nharaunda inoora. Iyo inopisa nzvimbo yekristaro yekukura kwevira inowanzo shongedzerwa nekupisa-isingadziviriki uye inodzivirira corrosion yakakwira-kuchena graphite zvikamu, senge hita, crucible, insulation cylinder, silinda yekutungamira, electrode, crucible holder, electrode nati, nezvimwe.
Isu tinokwanisa kugadzira ese magirafu zvikamu zvekristaro kugadzira michina, iyo inogona kupihwa yega kana mumaseti, kana yakagadziridzwa magirafu zvikamu zvehukuru hwakasiyana zvinoenderana nezvinodiwa nevatengi. Saizi yezvigadzirwa inogona kuyerwa pane saiti, uye madota emukati mezvigadzirwa zvakapedzwa anogona kuve mashomakupfuura 5ppm.
02 Graphite zvishandiso zve semiconductor epitaxy
Epitaxial process inoreva kukura kwechidzitiro chekristaro chimwe chete chine kurongeka kwelatisi yakafanana neiyo substrate pane imwechete crystal substrate. Mune epitaxial process, wafer inotakurwa pane graphite disk. Kuita uye kunaka kweiyo graphite disk inoita basa rakakosha mumhando ye epitaxial layer yewafer. Mumunda we epitaxial kugadzirwa, yakawanda-yakanyanya kuchena graphite uye yakakwirira kuchena graphite base ine SIC coating inodiwa.
Yedu yekambani graphite base ye semiconductor epitaxy ine huwandu hwakawanda hwekushandisa, inogona kuenderana neakawanda ezvinowanzo shandiswa midziyo muindasitiri, uye ine kuchena kwepamusoro, yunifomu yekupfeka, hupenyu hwebasa hwakanakisa, uye kukwirira kwemakemikari kuramba uye kugadzikana kwekupisa.
03 Graphite zvishandiso zvekuisa ion
Ion implantation inoreva maitiro ekumhanyisa danda replasma re boron, phosphorus uye arsenic kune rimwe simba, uye wozoipinza mukati mechikamu chepamusoro chewafer zvinhu kuti ichinje zvinhu zvemukati. Izvo zvikamu zveiyo ion implantation mudziyo uchagadzirwa wepamusoro-kuchena zvinhu zvine yakanakisa kupisa kupisa, thermal conductivity, kushomeka kwekuora kunokonzerwa neion danda uye kuderera kwehutsvina. High-purity graphite inosangana nezvinodiwa zvekushandisa, uye inogona kushandiswa kune chubhu yendege, slits dzakasiyana-siyana, maelectrode, mavhavha e electrode, maconduits, danda terminators, nezvimwe zve ion implantation equipment.
Isu hatigone kungopa graphite shielding chivharo cheakasiyana ion implantation michina, asi zvakare kupa yakakwira-kuchena graphite electrodes uye ion masosi ane yakakwira corrosion kuramba kweakasiyana zvirevo. Mienzaniso inoshanda: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM nemimwe michina. Uye zvakare, isu tinogona zvakare kupa inoenderana ceramic, tungsten, molybdenum, aruminiyamu zvigadzirwa uye yakavharwa zvikamu.
04 Graphite insulation zvinhu uye zvimwe
Thermal insulation zvinhu zvinoshandiswa mukugadzira semiconductor midziyo yekugadzira zvinosanganisira graphite yakaoma kunzwa, yakapfava inonzwa, graphite foil, graphite bepa, uye graphite tambo.
Zvese zvigadzirwa zvedu zvakabikwa zvinotengeswa kunze kwenyika graphite, iyo inogona kutemwa zvichienderana nehukuru hwezvinodiwa nevatengi kana kutengeswa sese.
Iyo kabhoni-kabhoni tray inoshandiswa semutakuri wekuputira firimu mukugadzirwa kwesolar monocrystalline silicon uye polycrystalline silicon masero. Nheyo yekushanda ndeyekuti: isa silicon chip muCFC tray woitumira muchoto chubhu kuti igadzirise iyo firimu yekuputira.
