A o le sua etala fou pisinisi, e mana'omia le malamalama i le fa'atupuina o le semiconductor. semiconductor wafer o se vaega taua i lenei alamanuia, ae masani ona latou feagai ma le faaleagaina mai le tele o mea leaga. O nei mea fa'aleagaina, e aofia ai le atom, mea fa'aola, mea fa'ameamea, ma le oxide, e mafai ona a'afia ai le fa'agaioiga o faiga.
fasimeae pei o le polymer ma le etching le mama faatuatuaina i luga o le malosi intermolecular e adsorb i luga o le mutia, aafia photolithography masini.mea eleelea oonapei o le suau'u pa'u homo ma le suau'u masini foliga ata tifaga i luga o le wafer, fa'alavelave fa'amamā.ions elemene u'ameae pei o le uʻamea ma le alumini e masani ona aveese e ala i le faʻavaeina o mea faʻapipiʻi ion elemene metallic.Oxidesfa'alavelaveina le faiga ma e masani lava ona aveese e ala i le fa'asusu i le vai fa'afefeteina o le hydrofluoric acid.
metotia fa'a kemikoloe masani ona fa'aoga e fa'amama ma fa'afefete ai semiconductor wafer. fa'amama vaila'au susū fa'amama e pei ole vaifofo vaifofo ma fufulu masini o lo'o fa'aauau. auala fa'amama supersonic ma megasonic e ofoina atu auala lelei e aveese ai le le mama. faʻamago vailaʻau faʻamago, e aofia ai le plasma ma le kasa tekinolosi vaega, e taʻalo foʻi se galuega i faiga faʻamamā semiconductor.
Taimi meli: Oke-29-2024