SiC oxidation - faʻapipiʻi faʻafefe na saunia i luga o le kalafi e ala ile CVD process

SiC coating e mafai ona saunia e ala i vailaʻau vaʻa faʻamaʻi (CVD), suiga muamua, plasma spraying, ma isi. Faʻaaogaina o le methyl trichlosilane. (CHzSiCl3, MTS) e pei o le silicon source, SiC coating saunia e le CVD metotia o se auala matua matua mo le faʻaogaina o lenei faʻapipiʻi.
SiC coating ma graphite o loʻo i ai le fetaui lelei o vailaʻau, o le eseesega o le faʻalauteleina o le vevela i le va oi latou e laʻititi, o le faʻaaogaina o le SiC coating e mafai ona faʻaleleia lelei le faʻaogaina o le ofuina ma le faʻamaʻiina o le graphite. Faatasi ai ma i latou, fua faatatau stoichiometric, vevela vevela, kasa dilution, kasa le mama ma isi tulaga e tele aafiaga i le tali.

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Taimi meli: Sep-14-2022
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