Kuki ukeneye kunanuka?

Mugihe cyinyuma-cyanyuma inzira, iwafer (silicon waferhamwe nizunguruka imbere) bigomba kunanurwa inyuma mbere yo gushushanya, gusudira no gupakira kugirango ugabanye uburebure bwa paki, kugabanya ingano ya chip, kunoza imikorere ya chip ikwirakwizwa ryumuriro, imikorere yamashanyarazi, imiterere yubukanishi no kugabanya umubare wa gushushanya. Gusya inyuma bifite ibyiza byo gukora neza kandi bihendutse. Yasimbuye uburyo bwa gakondo butose hamwe na ion yogukora kugirango bibe tekinoroji yingenzi yo kunanura inyuma.

Wafer yoroheje

Nigute ushobora kunanuka?

Inzira nyamukuru yo kunaniza wafer muburyo bwo gupakira

Intambwe zihariye zawaferkunanura ni uguhuza wafer kugirango itunganyirizwe kuri firime yoroheje, hanyuma ukoreshe vacuum kugirango wamamaze firime yoroheje na chip kuri yo kumeza ya ceramic wafer, uhindure imirongo yimbere yimbere ninyuma yumuzingi hagati yumurimo wakazi wa Igikombe kimeze nka diyama yo gusya uruziga rwagati rwagati rwagati rwa silicon, na silicon wafer hamwe nuruziga rusya ruzenguruka amashoka yabyo kugirango bace. Gusya birimo ibyiciro bitatu: gusya bikabije, gusya neza no gusya.

Wafer isohoka mu ruganda rwa wafer isubizwa inyuma kugirango yorohereze wafer kubyimbye bisabwa kugirango bipakire. Iyo usya wafer, kaseti igomba gushyirwa imbere (Ahantu hafatika) kugirango irinde akarere, kandi uruhande rwinyuma ruba hasi icyarimwe. Nyuma yo gusya, kura kaseti hanyuma upime ubunini.
Uburyo bwo gusya bwakoreshejwe neza mugutegura silicon wafer harimo gusya kumeza,silicon waferGusya kuzunguruka, gusya impande zombi, n'ibindi. Hamwe nogukomeza kunoza ubuziranenge bwibisabwa hejuru ya waferi imwe ya kirisiti ya silikoni, tekinoroji nshya yo gusya ihora isabwa, nko gusya TAIKO, gusya imashini, gusya no gusya kwa disiki.

Gusya kumeza:

Gusya kumeza ya rotary (gusya kumeza) ni inzira yo gusya hakiri kare ikoreshwa mugutegura silicon wafer no kunanura inyuma. Ihame ryayo ryerekanwa mu gishushanyo cya 1. Wafer ya silicon yashyizwe ku gikombe cyokunywa kumeza azunguruka, kandi ikazunguruka icyarimwe itwarwa nameza azunguruka. Wafer ya silicon ubwayo ntabwo izenguruka umurongo wabo; uruziga rusya rugaburirwa mu buryo bwizunguruka mu gihe ruzunguruka ku muvuduko mwinshi, kandi umurambararo wa uruziga rusya ni nini kuruta diameter ya wafer ya silicon. Hariho ubwoko bubiri bwo gusya kumeza: gusya mumaso no gusya mumaso. Mu gusya mu maso, ubugari bw'uruziga ni bunini kuruta umurambararo wa silicon wafer, kandi uruziga ruzunguruka rugaburira ubudahwema ku cyerekezo cyarwo kugeza igihe ibirenze bitunganijwe, hanyuma wafer ya silicon ikazunguruka munsi ya disikuru yizunguruka; mu gusya bifatika, gusunika uruziga rugaburira icyerekezo cyarwo, kandi wafer ya silicon ihora izunguruka munsi ya disiki izunguruka, kandi gusya birangizwa no kugaburira kugaburira (gusubiranamo) cyangwa kugaburira ibiryo (creepfeed).

Igishushanyo 1, igishushanyo mbonera cyameza azunguruka (face tangential) ihame

Ugereranije nuburyo bwo gusya, gusya kumeza gusya bifite ibyiza byo gukuraho umuvuduko mwinshi, kwangirika kwubutaka buto, no kwikora byoroshye. Nyamara, gusya kwukuri (gusya gukora) B hamwe no gukata inguni θ (inguni hagati yumuzingi winyuma wuruziga rwo gusya hamwe nuruziga rwo hanze rwa silicon wafer) muburyo bwo gusya bihinduka hamwe no guhindura imyanya yo guca y'uruziga rusya, bivamo imbaraga zo gusya zidahindagurika, bigatuma bigorana kubona neza neza neza neza (agaciro ka TTV), kandi byoroshye gutera inenge nko gusenyuka no gusenyuka. Ikoreshwa rya tekinoroji yo gusya ikoreshwa cyane cyane mugutunganya wafer imwe ya kirisiti ya silicon munsi ya 200mm. Ubwiyongere bwubunini bwa waferi imwe ya kirisiti ya silicon yashyize imbere ibisabwa hejuru kugirango uburinganire bwukuri kandi bugende neza bwibikoresho byakazi, bityo rero gusya kumeza kuzunguruka ntibikwiriye gusya waferi imwe ya kirisiti ya silikoni hejuru ya 300mm.
Kugirango tunoze imikorere yo gusya, ibikoresho byubucuruzi byindege byogusya bisanzwe bifata ibyuma bisya byinshi. Kurugero, urutonde rwuruziga rusya hamwe nuruziga rwiza rwo gusya rufite ibikoresho, kandi ameza azenguruka azenguruka uruziga rumwe kugirango arangize gusya bikabije no gusya neza. Ubu bwoko bwibikoresho burimo G-500DS ya Sosiyete y'Abanyamerika GTI (Ishusho 2).

Igishushanyo 2, G-500DS ibikoresho byo gusya kumeza ibikoresho bya sosiyete ya GTI muri Amerika

Gusya wafer ya silicon gusya:

Kugirango uhuze ibikenewe binini binini bya silicon wafer no gutunganya inyuma, kandi ubone ubuso bwuzuye hamwe nagaciro keza ka TTV. Mu 1988, intiti y’Ubuyapani Matsui yatanze igitekerezo cya silicon wafer rotation grinding (in-feedgrinding). Ihame ryayo ryerekanwe ku gishushanyo cya 3. Icyuma kimwe cya kirisiti ya silicon wafer hamwe nigikombe kimeze nka diyama yo gusya uruziga rwerekanwe kumurimo wakazi ruzunguruka ku mashoka yabyo, kandi uruziga rusya rukomeza kugaburirwa icyerekezo cyerekezo icyarimwe. Muri byo, umurambararo w'uruziga rusya ni runini kuruta umurambararo wa silicon yatunganijwe, kandi umuzenguruko wacyo unyura hagati ya wafer wa silicon. Kugirango ugabanye imbaraga zo gusya no kugabanya ubushyuhe bwo gusya, igikombe cyokunywa vacuum gikunze kugabanywa muburyo bwa convex cyangwa imiterere ya convex cyangwa inguni iri hagati yizunguruka yikiziga hamwe nigikombe cyo guswera cyahinduwe kugirango harebwe igice cyo guhuza hagati gusya uruziga na wafer ya silicon.

Igishushanyo 3, Igishushanyo mbonera cya silicon wafer kuzenguruka gusya

Ugereranije no gusya kumeza, gusya kwa silicon wafer kuzunguruka bifite ibyiza bikurikira: gr Gusya inshuro imwe imwe ya wafer gusya birashobora gutunganya ubunini bwa silicon nini ya 300mm; Area Igice nyacyo cyo gusya B no gukata inguni θ birahoraho, kandi imbaraga zo gusya zirahagaze neza; ③ Muguhindura inguni ihindagurika hagati yuruziga ruzunguruka hamwe na silicon wafer axis, imiterere yubuso bwa silikoni imwe ya kirisiti irashobora kugenzurwa cyane kugirango ibone neza neza. Byongeye kandi, gusya ahantu hamwe no gukata inguni θ ya silicon wafer rotary grinding nayo ifite ibyiza byo gusya cyane, gusohora byoroshye kumurongo hamwe no kugenzura ubuziranenge bwubutaka no kugenzura, ibikoresho bikomatanyije, ibikoresho byoroshye bya sitasiyo ihuriweho, hamwe no gusya cyane.
Mu rwego rwo kunoza imikorere y’umusaruro no guhuza ibikenerwa n’umurongo wa semiconductor, ibikoresho byo gusya byubucuruzi bishingiye ku ihame rya silicon wafer rotary grinding ifata ibyuma byinshi bizunguruka, bishobora kurangiza gusya bikabije no gusya neza muburyo bumwe bwo gupakira no gupakurura. . Ufatanije n’ibindi bikoresho bifasha, birashobora gutahura mu buryo bwikora busya bwa waferi imwe ya kirisiti ya silicon "yumye / yumye" na "cassette kuri cassette".

Gusya impande ebyiri:

Iyo silicon wafer izunguruka isya itunganya hejuru no hepfo ya silicon wafer, igihangano gikeneye guhindurwa no gukorwa mubikorwa, bigabanya imikorere. Muri icyo gihe, gusya kwa silicon wafer kuzunguruka bifite amakosa yo gukopera (gukoporora) no gusya (gusya), kandi ntibishoboka gukuraho neza inenge nka waviness na taper hejuru yubuso bumwe bwa kirisiti ya silikoni nyuma yo gukata insinga . bigabanijwe ku mpande zombi zomeka kuri wafer imwe ya kirisiti ya silicon wafer mu mpeta igumana hanyuma ikazunguruka buhoro buhoro itwarwa na roller. Uruziga rumeze nk'igikombe rusya rwa diyama rusya rusa naho ruherereye ku mpande zombi za silikoni ya silikoni imwe. Iyobowe numwuka utwara amashanyarazi, bazunguruka mu cyerekezo gitandukanye kandi bagaburira mu buryo bwuzuye kugirango bagere ku mpande ebyiri zo gusya wa silikoni imwe ya kirisiti. Nkuko bigaragara kuri iki gishushanyo, gusya impande zombi birashobora gukuraho neza waviness na taper hejuru yumurongo umwe wa kirisiti ya silicon wafer nyuma yo guca insinga. Ukurikije icyerekezo cyerekezo cyo gusya uruziga ruzengurutse, gusya-impande ebyiri gusya birashobora kuba bitambitse kandi bihagaritse. Muri byo, gusya gutambitse impande zombi birashobora kugabanya neza ingaruka ziterwa na silicon wafer ihindagurika iterwa nuburemere bupfuye bwa wafer wa silicon kumiterere yo gusya, kandi biroroshye kwemeza ko uburyo bwo gusya kumpande zombi za silikoni imwe wafer ni kimwe, kandi ibice byo gukuramo no gusya ibyuma ntibyoroshye kuguma hejuru yubutaka bumwe bwa kirisiti ya silicon wafer. Nuburyo bwiza bwo gusya.

Igishushanyo 4, "Amakosa yamakosa" kandi wambare inenge muri silicon wafer kuzunguruka

Igishushanyo 5, igishushanyo mbonera cyibice bibiri byo gusya

Imbonerahamwe 1 irerekana igereranya riri hagati yo gusya no gusya impande zombi zo mu bwoko butatu bwavuzwe haruguru bwa silikoni ya silicon imwe. Gusya impande ebyiri bikoreshwa cyane mugutunganya silicon wafer munsi ya 200mm, kandi ifite umusaruro mwinshi wafer. Bitewe no gukoresha ibiziga bisya byimeza, gusya bya waferi imwe ya kirisiti ya silicon irashobora kubona ubuziranenge bwubuso burenze ubw'ubusya bubiri. Kubwibyo, byombi bya silicon wafer gusya hamwe no gusya impande zombi birashobora kuzuza ibisabwa byujuje ubuziranenge bwa 300mm ya silicon ya waferi, kandi ubu ni uburyo bwingenzi bwo gutunganya neza. Mugihe uhisemo uburyo bwo gutunganya silicon wafer uburyo bwo gutunganya, birakenewe ko dusuzuma byimazeyo ibisabwa mubunini bwa diameter, ubwiza bwubuso, hamwe na tekinoroji yo gutunganya wafer ya wafer imwe ya kirisiti ya silicon. Inyuma yinyuma ya wafer irashobora guhitamo gusa uburyo bumwe bwo gutunganya, nka silicon wafer rotary grinding uburyo.

Usibye guhitamo uburyo bwo gusya muri silicon wafer gusya, birakenewe kandi kumenya guhitamo ibipimo bifatika nkumuvuduko mwiza, gusya ingano y ingano, gusya uruziga, gusya umuvuduko wikiziga, umuvuduko wa wafer wa silicon, gusya amazi yijimye kandi umuvuduko wo gutembera, nibindi, no kugena inzira yumvikana. Mubisanzwe, igice cyo gusya igice kirimo gusya bikabije, gusya igice cyo gusya, kurangiza gusya, gusya bidafite urumuri hamwe no gutinda buhoro bikoreshwa kugirango ubone waferi imwe ya kirisiti ya silikoni ifite ubushobozi bwo gutunganya neza, hejuru yubutaka no kwangirika hasi.