Kuki dukoresha kaseti ya UV mugushushanya wafer? | Ingufu za VET

Nyuma yawaferyanyuze mubikorwa byabanjirije, gutegura chip birarangiye, kandi bigomba gucibwa kugirango bitandukane chip kuri wafer, hanyuma bipakirwa. Uwitekawafergukata inzira yatoranijwe kuri wafers yubunini butandukanye nayo iratandukanye:

▪Wafershamwe nubunini burenga 100um muri rusange baciwe nibyuma;

▪Wafershamwe nubunini buri munsi ya 100um baciwe hamwe na laseri. Gukata lazeri birashobora kugabanya ibibazo byo gukuramo no guturika, ariko iyo biri hejuru ya 100um, umusaruro uzagabanuka cyane;

▪Wafershamwe nubunini buri munsi ya 30um baciwe na plasma. Gukata plasma birihuta kandi ntabwo bizangiza ubuso bwa wafer, bityo umusaruro uzamuke, ariko inzira yacyo iragoye;

Mugihe cyo gukata wafer, firime izashyirwa kuri wafer mbere kugirango hamenyekane neza "ingaragu". Ibikorwa byayo byingenzi nibi bikurikira.

Gukosora no kurinda wafer

Mugihe cyo gushushanya, wafer igomba gucibwa neza.Wafersmubisanzwe binanutse kandi byoroshye. UV kaseti irashobora kwizirika kuri wafer kumurongo cyangwa kuri wafer kugirango wirinde ko wafer ihindagurika no kunyeganyega mugihe cyo gutema, byemeza neza ko gukata neza.
Irashobora gutanga uburinzi bwiza bwumubiri kuri wafer, irinde kwangirika kuriwaferbiterwa ningufu ziva hanze no guterana bishobora kugaragara mugihe cyo gutema, nkibice, gusenyuka kwizindi nenge, no kurinda imiterere ya chip hamwe numuzunguruko hejuru ya wafer.

Igikorwa cyo gukata neza

UV kaseti ifite ubuhanga bworoshye kandi bworoshye, kandi irashobora guhindura muburyo bugereranije mugihe icyuma cyo gukata cyaciwemo, bigatuma inzira yo gutema yoroshye, kugabanya ingaruka mbi zo guca ukurwanya kuri blade na wafer, no gufasha kuzamura ireme ryogukata nubuzima bwa serivisi bwa icyuma. Ibiranga ubuso butuma imyanda iterwa no gukata kugirango ifatanye neza kaseti neza itiriwe isuka hirya no hino, ibyo bikaba byoroshye mugusukura nyuma y’ahantu haciwe, kugira ngo aho ukorera hasukure neza, no kwirinda imyanda kwanduza cyangwa kwivanga muri wafer nibindi bikoresho. .

Biroroshye kubyitwaramo nyuma

Nyuma ya wafer imaze gukata, kaseti ya UV irashobora kugabanuka byihuse mubukonje cyangwa ndetse igatakara rwose nukuyihinduranya nurumuri ultraviolet yumurambararo wihariye nuburemere, kugirango chip yaciwe ishobora gutandukana byoroshye na kaseti, bikaba byoroshye kubikurikira gupakira chip, kugerageza nibindi bikorwa bitemba, kandi ubu buryo bwo gutandukana bufite ibyago bike cyane byo kwangiza chip.