Nubuhe buryo bwo gutegura gahunda ya CMP?

Dual-Damascene ni tekinoroji yuburyo bukoreshwa mugukora ibyuma bihuza imiyoboro ihuriweho. Niterambere ryiterambere rya Damasiko. Mugukora mu mwobo no mu byobo icyarimwe mu ntambwe imwe hanyuma ukuzuza ibyuma, guhuza ibikorwa byo guhuza ibyuma biragerwaho.

Kuki yitwa Damasiko?

Umujyi wa Damasiko ni umurwa mukuru wa Siriya, kandi inkota ya Damasiko izwi cyane kubera ubukana n'imiterere myiza. Ubwoko bwa inlay burakenewe: icya mbere, igishushanyo gisabwa cyanditswe hejuru yicyuma cya Damasiko, kandi ibikoresho byateguwe mbere byometseho cyane mumashanyarazi. Iyo inlay irangiye, ubuso bushobora kuba butaringaniye. Umunyabukorikori azayitonesha yitonze kugirango yizere neza muri rusange. Kandi iyi nzira niyo prototype yuburyo bubiri bwa Damasiko ya chip. Ubwa mbere, ibinogo cyangwa umwobo byanditseho urwego rwa dielectric, hanyuma ibyuma byuzuyemo. Nyuma yo kuzuza, ibyuma birenze bizakurwaho na cmp.

Intambwe zingenzi zuburyo bubiri bwa damascene zirimo:

Osition Gushyira urwego rwa dielectric:

Shyira igice cyibikoresho bya dielectric, nka dioxyde ya silicon (SiO2), kuri semiconductorwafer.

▪ Photolithography kugirango isobanure icyitegererezo:

Koresha Photolithography kugirango usobanure igishushanyo cya vias nu mwobo kumurongo wa dielectric.

▪Kurya:

Hindura igishushanyo cya vias nu mwobo kumurongo wa dielectric unyuze muburyo bwumye cyangwa butose.

Osition Gushyira ibyuma:

Kubitsa ibyuma, nkumuringa (Cu) cyangwa aluminium (Al), muri vias no mu mwobo kugirango uhuze ibyuma.

Polish Imashini ikora imashini:

Ibikoresho bya chimique byohanagura hejuru yicyuma kugirango bikureho ibyuma birenze kandi bisibanganye hejuru.

Ugereranije nicyuma gakondo cyo guhuza ibyuma, inzira ya damascene ebyiri ifite ibyiza bikurikira:

Intambwe zoroheje zikorwa:mugukora vias hamwe nu mwobo icyarimwe murwego rumwe, intambwe yimikorere nigihe cyo gukora kiragabanuka.

Kunoza imikorere yinganda:kubera kugabanya intambwe zikorwa, inzira ya damascene ebyiri irashobora kunoza imikorere yinganda no kugabanya ibiciro byumusaruro.

Gutezimbere imikorere yicyuma gihuza:inzira ya damascene yuburyo bubiri irashobora kugera kumyuma mito ihuza imiyoboro, bityo igateza imbere guhuza no gukora imizunguruko.

Kugabanya ubushobozi bwa parasitike no kurwanya:ukoresheje ibikoresho bike bya dielectric hamwe no guhindura imiterere ihuza ibyuma, ubushobozi bwa parasitike hamwe nuburwanya birashobora kugabanuka, kuzamura umuvuduko nogukoresha ingufu zumuzunguruko.