Ni irihe tandukaniro riri hagati ya PECVD na LPCVD mu bikoresho bya semiconductor CVD?

Imyuka ya chimique (CVD) bivuga inzira yo kubitsa firime ikomeye hejuru ya siliconwaferbinyuze mumiti ya reaction ya gaze ivanze. Ukurikije imiterere itandukanye (reaction, precursor), irashobora kugabanwa muburyo butandukanye bwibikoresho.

Ni ubuhe buryo bukoreshwa ibyo bikoresho byombi bikoreshwa?
PECVD(Plasma Enhanced) ibikoresho nibikoresho byinshi kandi bikoreshwa cyane, bikoreshwa muri OX, Nitride, irembo ryicyuma, karubone ya amorphous, nibindi.; LPCVD (Imbaraga nke) isanzwe ikoreshwa muri Nitride, poly, TEOS.
Ihame ni irihe?
PECVD-inzira ihuza neza ingufu za plasma na CVD. Tekinoroji ya PECVD ikoresha plasma yubushyuhe buke kugirango itume urumuri rwinshi kuri cathode yicyumba cyibikorwa (urugero, tray sample) munsi yumuvuduko muke. Uku gusohora kwaka cyangwa ikindi gikoresho gishyushya kirashobora kuzamura ubushyuhe bwikitegererezo kugeza kurwego rwateganijwe, hanyuma ugashyiraho urugero rwa gaze itunganijwe. Iyi gaze ihura nuruhererekane rwimiti na plasma, hanyuma ikora firime ikomeye hejuru yicyitegererezo.

LPCVD - Umuvuduko ukabije w’imyuka mvaruganda (LPCVD) wagenewe kugabanya umuvuduko wimikorere ya gaze ya reaction muri reaction kugeza kuri 133Pa cyangwa munsi yayo.
Ni ibihe bintu biranga buri kimwe?
PECVD - Inzira ihuza neza ingufu za plasma na CVD: 1) Gukora ubushyuhe buke (kwirinda kwangirika kwubushyuhe bukabije kubikoresho); 2) Gukura vuba film; 3) Kudatoragura ibikoresho, OX, Nitride, irembo ryicyuma, karubone ya amorphous irashobora gukura; 4) Hariho uburyo bwo kugenzura ibintu, bushobora guhindura resept ikoresheje ibipimo bya ion, umuvuduko wa gazi, ubushyuhe n'ubunini bwa firime.
LPCVD - Filime ntoya yabitswe na LPCVD izaba ifite intambwe nziza yo gukwirakwiza, guhimba neza no kugenzura imiterere, igipimo kinini cyo kubitsa no gusohoka. Byongeye kandi, LPCVD ntisaba gaze yabatwara, bityo igabanya cyane inkomoko y’umwanda w’ibihumanya kandi ikoreshwa cyane mu nganda zongerewe agaciro n’inganda ziciriritse kugira ngo zishyirwe muri firime.

 

Ikaze abakiriya bose baturutse impande zose zisi kugirango badusure kugirango tuganire kubindi biganiro!

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https://www.vet-china.com/silicon-carbide-sic-ceramic/