Bimwe mubintu kama na organic organique birasabwa kugira uruhare mubikorwa byo gukora semiconductor. Mubyongeyeho, kubera ko inzira ihora ikorerwa mucyumba gisukuye abantu babigizemo uruhare, semiconductorwafersbyanze bikunze byandujwe numwanda utandukanye.
Ukurikije inkomoko n'imiterere yabanduye, birashobora kugabanywa mubice bine: ibice, ibintu kama, ioni na oxyde.
1. Ibice:
Ibice ahanini ni polymers, abafotora hamwe nibihumanya.
Ibintu byanduye mubisanzwe bishingikiriza ku mbaraga za intermolecular to adsorb hejuru ya wafer, bikagira ingaruka kumiterere ya geometrike hamwe nibipimo byamashanyarazi byibikoresho bifotora.
Ibihumanya nkibi bikurwaho cyane cyane kugabanya buhoro buhoro aho bahurira nubuso bwawaferbinyuze muburyo bwumubiri cyangwa imiti.
2. Ikintu kama:
Inkomoko y’imyanda ngari ni nini cyane, nkamavuta yuruhu rwabantu, bagiteri, amavuta yimashini, amavuta ya vacuum, fotoreiste, isuku yumuti, nibindi.
Ibihumanya nkibi mubisanzwe bikora firime ngenga hejuru ya wafer kugirango birinde isuku yamazi itagera hejuru ya wafer, bikaviramo isuku ituzuye hejuru ya wafer.
Kurandura ibyo bihumanya akenshi bikorwa mu ntambwe yambere yo gukora isuku, cyane cyane hakoreshejwe uburyo bwa chimique nka acide sulfurike na hydrogen peroxide.
3. Ibyuma bya ion:
Umwanda ukunze kuboneka harimo ibyuma, umuringa, aluminium, chromium, icyuma, titanium, sodium, potasiyumu, lithium, nibindi.
Ubu bwoko bwumwanda bukurwaho nuburyo bwimiti binyuze muburyo bwo gukora ibyuma bya ion.
4. Oxide:
Iyo igice cya kabiriwafersbahuye nibidukikije birimo ogisijeni namazi, urwego rusanzwe rwa okiside ruzaba hejuru. Iyi firime ya oxyde izabangamira inzira nyinshi mubikorwa bya semiconductor kandi ikubiyemo umwanda wibyuma. Mubihe bimwe, bazakora inenge zamashanyarazi.
Gukuraho iyi firime ya oxyde akenshi birangizwa no gushiramo aside hydrofluoric.
Urukurikirane rusange
Impurities yamamajwe hejuru ya semiconductorwafersirashobora kugabanywamo ubwoko butatu: molekile, ionic na atome.
Muri byo, imbaraga za adsorption hagati yimyanda ya molekuline nubuso bwa wafer iracyafite intege nke, kandi ubu bwoko bwibice byanduye byoroshye kuvanaho. Ahanini ni umwanda wamavuta ufite hydrophobique iranga hydrophobique, irashobora gutanga masking kumyanda ya ionic na atome yanduza ubuso bwa waferi ya semiconductor, idafasha gukuraho ubwo bwoko bubiri bwanduye. Kubwibyo, mugihe cyoza imiti ya semiconductor wafer, umwanda wa molekile ugomba kubanza gukurwaho.
Kubwibyo, uburyo rusange bwa semiconductorwaferinzira yo gukora isuku ni:
De-molecularisation-deionisation-de-atomisation-deionized amazi yoza.
Byongeye kandi, kugirango ukureho urwego rusanzwe rwa oxyde hejuru ya wafer, hagomba kongerwaho intambwe ya acide aminide acide. Kubwibyo, igitekerezo cyo gukora isuku nukubanza gukuraho umwanda kama hejuru; hanyuma ushonga igice cya oxyde; amaherezo ukureho ibice nibyuma byanduye, hanyuma uhindure hejuru icyarimwe.
Uburyo busanzwe bwo gukora isuku
Uburyo bwa chimique bukoreshwa kenshi mugusukura waferi ya semiconductor.
Isuku yimiti bivuga inzira yo gukoresha imiti itandukanye ya chimique hamwe na solge organique kugirango ikore cyangwa ishongeshe umwanda hamwe namavuta yamavuta hejuru ya wafer kugirango yanduze umwanda, hanyuma ukarabe hamwe namazi menshi yubushyuhe bwinshi nubushyuhe bukonje bwa deioni kugirango ubone hejuru.
Isuku yimiti irashobora kugabanywamo isuku yimiti itose hamwe nogusukura imiti yumye, muribwo isuku yimiti itose iracyiganje.
Isuku yimiti itose
1. Isuku yimiti itose:
Isuku yimiti itose ikubiyemo cyane kwibiza igisubizo, gukanika imashini, gusukura ultrasonic, gusukura megasonic, gutera rotary, nibindi.
2. Kwibiza igisubizo:
Kwibiza igisubizo nuburyo bwo gukuraho kwanduza hejuru wibiza wafer mumuti wimiti. Nuburyo bukoreshwa cyane mugusukura imiti itose. Ibisubizo bitandukanye birashobora gukoreshwa mugukuraho ubwoko butandukanye bwanduye hejuru ya wafer.
Mubisanzwe, ubu buryo ntibushobora gukuraho burundu umwanda hejuru ya wafer, kuburyo ingamba zifatika nko gushyushya, ultrasound, no gukurura zikoreshwa mugihe cyo kwibiza.
3. Gukoresha imashini:
Gukoresha imashini akenshi bikoreshwa mugukuraho ibice cyangwa ibisigazwa kama kama hejuru ya wafer. Irashobora kugabanywamo uburyo bubiri:intoki zo guswera no guswera hamwe na wiper.
Intokinuburyo bworoshye bwo gushakisha. Icyuma kitagira umuyonga gikoreshwa mu gufata umupira winjijwe muri Ethanol ya anhidrous cyangwa indi miti ya organic hanyuma ugasiga witonze hejuru ya wafer mucyerekezo kimwe kugirango ukureho ibishashara, ivumbi, kole isigara cyangwa ibindi bice bikomeye. Ubu buryo bworoshye gutera ibishushanyo n’umwanda ukomeye.
Ihanagura ikoresha guhinduranya imashini kugirango isige hejuru ya wafer hamwe na brush yoroheje yubwoya cyangwa umuyonga uvanze. Ubu buryo bugabanya cyane ibishushanyo kuri wafer. Ihanagura ry'umuvuduko ukabije ntirizashushanya wafer kubera kubura ubukana bwa mashini, kandi irashobora gukuraho umwanda uri muri ruhago.
4. Isuku ya Ultrasonic:
Ultrasonic isuku nuburyo bwogusukura bukoreshwa cyane munganda zikoresha igice. Ibyiza byayo ningaruka nziza yo gukora isuku, imikorere yoroshye, kandi irashobora kandi gusukura ibikoresho bigoye hamwe nibikoresho.
Ubu buryo bwo gukora isuku buri mubikorwa byumuvuduko ukabije wa ultrasonic (inshuro zikoreshwa cyane na ultrasonic ni 20s40kHz), kandi ibice bito kandi byuzuye bizabyara imbere mumazi. Igice gike kizabyara hafi ya vacuum cavity bubble. Iyo ububobere bwa cavity bubuze, hazabaho umuvuduko ukomeye waho hafi yacyo, ucike imiyoboro ya chimique muri molekile kugirango ushongeshe umwanda hejuru ya wafer. Isuku ya Ultrasonic ningirakamaro cyane mugukuraho ibisigazwa bidasembuye cyangwa bidashobora guhinduka.
5. Isuku rya Megasonic:
Isuku ya Megasonic ntabwo ifite ibyiza byo gusukura ultrasonic gusa, ahubwo inesha inenge zayo.
Isuku rya Megasonic nuburyo bwo koza waferi muguhuza ingufu nyinshi (850kHz) zinyeganyega zinyeganyega hamwe nubushakashatsi bwimiti yibikoresho byoza imiti. Mugihe cyo gukora isuku, molekile yumuti yihutishwa numuhengeri wa megasonic (umuvuduko ntarengwa ushobora guhita ushobora kugera kuri 30cmVs), kandi umuvuduko mwinshi wamazi wihuta uhora ugira ingaruka hejuru ya wafer, kuburyo ibyuka bihumanya nibice byiza bifatanye hejuru yubuso wafer yakuweho ku gahato hanyuma yinjire mu gisubizo. Ongeraho aside irike kumuti wogusukura, kuruhande rumwe, irashobora kugera kumigambi yo kuvanaho ibice nibintu kama kama hejuru ya polishinge binyuze muri adsorption ya surfactants; kurundi ruhande, binyuze muguhuza surfactants hamwe nibidukikije bya aside, irashobora kugera ku ntego yo gukuraho umwanda wanduye hejuru yurupapuro. Ubu buryo burashobora gukina icyarimwe uruhare rwo guhanagura imashini no gusukura imiti.
Kugeza ubu, uburyo bwo gusukura megasonic bwahindutse uburyo bwiza bwo koza amabati.
6. Uburyo bwa spray rotary:
Uburyo bwa rotary spray nuburyo bukoresha uburyo bwubukanishi bwo kuzunguruka wafer ku muvuduko mwinshi, kandi bugahora butera amazi (amazi meza-deionised water cyangwa andi mazi asukuye) hejuru ya wafer mugihe cyo kuzunguruka kugirango akureho umwanda kuri ubuso bwa wafer.
Ubu buryo bukoresha umwanda hejuru ya wafer kugirango ushongeshe mumazi yatewe (cyangwa imiti ikorana nayo kugirango ushonga), kandi ikoresha ingaruka ya centrifugal yo kwihuta kwihuta kugirango amazi arimo umwanda atandukanye nubuso bwa wafer. mu gihe gikwiye.
Uburyo bwo gusasa bwa rotary bufite ibyiza byo koza imiti, gusukura ubukanishi bwamazi, hamwe no gushakisha umuvuduko ukabije. Mugihe kimwe, ubu buryo burashobora kandi guhuzwa nuburyo bwo kumisha. Nyuma yigihe cyo gusukura amazi ya deioniyo, spray yamazi irahagarara hanyuma hakoreshwa gaze ya spray. Muri icyo gihe, umuvuduko wo kuzunguruka urashobora kwiyongera kugirango wongere imbaraga za centrifugal kugirango uhindure vuba hejuru ya wafer.
7.Kuma imiti yumye
Isuku yumye bivuga ikorana buhanga ridakoresha ibisubizo.
Tekinoroji yumye yumye ikoreshwa muri iki gihe harimo: tekinoroji yo gusukura plasma, tekinoroji yo gusukura gaz, tekinoroji yoza ibiti, nibindi.
Ibyiza byo gukora isuku yumye ninzira yoroshye kandi nta bihumanya ibidukikije, ariko ikiguzi ni kinini kandi aho ikoreshwa ntabwo ari nini kurubu.
1.Ikoranabuhanga ryo gusukura plasma:
Isuku ya plasma ikoreshwa kenshi mugukuraho amafoto. Umubare muto wa ogisijeni winjijwe muri sisitemu ya plasma. Igikorwa cyumuriro wamashanyarazi ukomeye, ogisijeni itanga plasma, ihita ihindura fotoreiste mumyuka ya gaze ihindagurika kandi ikavamo.
Iri koranabuhanga ryogusukura rifite ibyiza byo gukora byoroshye, gukora neza, hejuru yisuku, nta gushushanya, kandi bifasha kwemeza ubuziranenge bwibicuruzwa murwego rwo gutesha agaciro. Byongeye kandi, ntabwo ikoresha acide, alkalis hamwe nudukoko twangiza, kandi ntakibazo gihari nko guta imyanda no kwangiza ibidukikije. Kubwibyo, biragenda bihabwa agaciro nabantu. Ariko, ntishobora gukuraho karubone nibindi byuma bidahindagurika cyangwa ibyuma bya okiside.
2. Tekinoroji yo gusukura icyiciro cya gaze:
Gusukura icyiciro cya gazi bivuga uburyo bwo gukora isuku ikoresha icyiciro cya gaze ihwanye nibintu bihuye murwego rwamazi kugirango ihuze nibintu byanduye hejuru ya wafer kugirango ugere ku ntego yo gukuraho umwanda.
Kurugero, mubikorwa bya CMOS, isuku ya wafer ikoresha imikoranire hagati yicyiciro cya gaze HF hamwe numwuka wamazi kugirango ukureho okiside. Mubisanzwe, inzira ya HF irimo amazi igomba guherekezwa nuburyo bwo kuvanaho ibice, mugihe ikoreshwa ryicyiciro cya gaze tekinoroji ya HF idasaba inzira yo gukuraho ibice.
Ibyiza byingenzi ugereranije nuburyo bwo mumazi ya HF ni ntoya cyane ya HF ikoresha imiti kandi ikora neza.
Ikaze abakiriya bose baturutse impande zose zisi kugirango badusure kugirango tuganire kubindi biganiro!
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Igihe cyo kohereza: Kanama-13-2024