Silicon carbide kristu yo gukura hamwe nibikoresho byikoranabuhanga

1. Inzira ya tekinoroji yo gukura ya SiC

PVT (uburyo bwa sublimation),

HTCVD (ubushyuhe bwo hejuru CVD),

LPE(uburyo bwo gutemba)

ni bitatuSiCuburyo bwo gukura;

Uburyo buzwi cyane mu nganda nuburyo bwa PVT, kandi hejuru ya 95% ya SiC imwe ya kristu ikura nuburyo bwa PVT;

IngandaSiCitanura ryiterambere rikoresha inganda nyamukuru ya tekinoroji ya PVT.

2. Gahunda yo gukura ya SiC

Ifu synthesis-imbuto ya kristu ivura-kristu ikura-ingot annealing-wafergutunganya.

3. Uburyo bwa PVT gukuraKirisiti ya SiC

Ibikoresho fatizo bya SiC bishyirwa hepfo ya grafite ikomeye, kandi kristu yimbuto ya SiC iri hejuru ya grafite ikomeye. Muguhindura insulasiyo, ubushyuhe bwibikoresho fatizo bya SiC biri hejuru kandi ubushyuhe kuri kristu yimbuto ni buke. Ibikoresho fatizo bya SiC mubushyuhe bwo hejuru biragabanuka kandi bikangirika mubintu bya gaze ya gaz, bikajyanwa muri kristu yimbuto hamwe nubushyuhe buke hanyuma ikabikwa kugirango ikore kristu ya SiC. Uburyo bwibanze bwo gukura bukubiyemo inzira eshatu: kubora no kugabanura ibikoresho fatizo, kwimura imbaga, hamwe na kristu kuri kristu yimbuto.

Kwangirika no kugabanura ibikoresho fatizo:

SiC (S) = Si (g) + C (S)

2SiC (S) = Si (g) + SiC2 (g)

2SiC (S) = C (S) + SiC2 (g)

Mugihe cyo kwimura abantu benshi, Si vapor irongera ikora nurukuta rukomeye rwa grafite kugirango ikore SiC2 na Si2C:

Si (g) + 2C (S) = SiC2 (g)

2Si (g) + C (S) = Si2C (g)

Ku buso bw'imbuto za kirisiti, ibyiciro bitatu bya gaze bikura binyuze muburyo bubiri bukurikira kugirango bibyare kristu ya kariside:

SiC2_(g)+ Si2C_(g)= 3SiC_(s)

Si_(g)+ SiC2_(g)= 2SiC_(S)

4. Uburyo bwa PVT bwo gukura SiC kristu yo gukura ibikoresho byikoranabuhanga inzira

Kugeza ubu, gushyushya induction ni inzira yikoranabuhanga isanzwe yuburyo bwa PVT itanura rya kristu ya kirisiti;

Coil yo hanze yo gushyushya hamwe na grafite irwanya ubushyuhe nicyerekezo cyiterambere cyaSiCitanura ryo gukura.

5. 8-inimero ya SiC induction ishyushya itanura

(1) Gushyushyaigishushanyo mbonera gushyushya ibintubinyuze mu rukuruzi rwinjira; kugenzura ubushyuhe bwubushyuhe muguhindura ingufu zishyushya, umwanya wa coil, nuburyo bwo kubika;