Hamwe niterambere ryiterambere ryisi yiki gihe, ingufu zidasubirwaho ziragenda zinanirwa, kandi societe yabantu irihutirwa gukoresha ingufu zishobora kugereranywa n "umuyaga, urumuri, amazi na kirimbuzi". Ugereranije n’andi masoko y’ingufu zishobora kuvugururwa, abantu bafite tekinoroji ikuze, itekanye kandi yizewe yo gukoresha ingufu zizuba. Muri byo, inganda zifotora zifotora hamwe na silikoni yera cyane nkuko substrate yateye imbere byihuse. Mu mpera z'umwaka wa 2023, igihugu cyanjye cyashyizwemo ingufu z'amashanyarazi akomoka ku mirasire y'izuba cyarengeje gigawatt 250, naho amashanyarazi y’amashanyarazi agera kuri miliyari 266.3 kWh, yiyongeraho hafi 30% umwaka ushize, kandi ingufu nshya ziyongereyeho miliyoni 78.42 kilowatts, kwiyongera kwa 154% umwaka-ku-mwaka. Kugeza mu mpera za Kamena, ingufu zashyizwemo ingufu z'amashanyarazi zikoresha amashanyarazi zingana na kilowati zigera kuri miliyoni 470, zikaba zararenze amashanyarazi kugira ngo ibe isoko ya kabiri ikomeye mu gihugu cyanjye.
Mugihe inganda zifotora zitera imbere byihuse, inganda nshya zishyigikira nazo ziratera imbere byihuse. Ibice bya Quartz nkaKubambika, ubwato bwa quartz, hamwe nuducupa twa quartz biri muribi, bigira uruhare runini mugikorwa cyo gukora amafoto. Kurugero, umusaraba wa quartz ukoreshwa mugutwara silikoni yashongeshejwe mugukora inkoni ya silicon hamwe na silicon; ubwato bwa quartz, imiyoboro, amacupa, ibigega bisukura, nibindi bigira uruhare runini mugukwirakwiza, gusukura nandi masano ahuza mugukora imirasire yizuba, nibindi, byemeza ubwiza nubwiza bwibikoresho bya silikoni.
Ibyingenzi byingenzi bya quartz yibikoresho byo gukora amafoto
Mubikorwa byo gukora ingirabuzimafatizo zikomoka ku mirasire y'izuba, wafer ya silicon ishyirwa mubwato bwa wafer, naho ubwato bugashyirwa mubwato bwa wafer kugirango bukwirakwizwe, LPCVD nibindi bikorwa byubushyuhe, mugihe icyuma cya silicon karbide cantilever nikintu cyingenzi cyo gupakira kwimuka inkunga yubwato itwara wafer ya silicon mumuriro no hanze. Nkuko bigaragara ku gishushanyo gikurikira, icyuma cya silicon carbide cantilever paddle kirashobora kwemeza ubwinshi bwa wafer wa silicon hamwe nigitereko cy itanura, bityo bigatuma diffusion na passivation bihinduka kimwe. Muri icyo gihe, nta mwanda uhari kandi ntuhindurwe ku bushyuhe bwo hejuru, ufite imbaraga zo guhangana n’amashyanyarazi n’ubushobozi bunini bwo gutwara, kandi wakoreshejwe cyane mu bijyanye n’ingirabuzimafatizo.
Igishushanyo mbonera cyibikoresho byingenzi bipakira
Muburyo bworoshye bwo gukwirakwiza ikwirakwizwa, ubwato bwa quartz gakondo naubwato bwa waferinkunga ikeneye gushyira wafer ya silicon hamwe nubufasha bwa bwato bwa quartz mumiyoboro ya quartz mumatanura yo gukwirakwiza. Muri buri gikorwa cyo gukwirakwiza, inkunga yubwato bwa quartz yuzuyemo wafer ya silicon ishyirwa kuri karbide ya silicon. Nyuma ya silicon karbide paddle yinjiye mumiyoboro ya quartz, padi ihita irohama kugirango ishyire hasi ubwato bwa quartz hamwe na wafer ya silicon, hanyuma buhoro buhoro busubira mwinkomoko. Nyuma ya buri nzira, inkunga yubwato bwa quartz igomba gukurwa kurisilicon carbide paddle. Ibikorwa nkibi bizatera inkunga ya quartz ubwato gushira mugihe kinini. Ubwato bwa quartz bumaze gushyigikira gucika no kumeneka, inkunga yubwato bwa quartz yose izagwa kumurongo wa karubide ya silicon, hanyuma yangize ibice bya quartz, wafer ya silicon na karbide ya karibide hepfo. Amashanyarazi ya silicon karbide ahenze kandi ntashobora gusanwa. Iyo impanuka imaze kubaho, bizatera igihombo kinini.
Mubikorwa bya LPCVD, ntabwo ibibazo byavuzwe haruguru byavuzwe haruguru bizabaho gusa, ariko kubera ko inzira ya LPCVD isaba gaze ya silane kunyura muri wafer wa silicon, inzira ndende nayo izakora silikoni itwikiriye ubwato bwa wafer hamwe na ubwato bwa wafer. Bitewe no kudahuza kwa coefficient zo kwagura ubushyuhe bwa silicon na quartz isize, inkunga yubwato nubwato bizacika, kandi ubuzima buzagabanuka cyane. Ubuzima bwubwato busanzwe bwa quartz nubwato bufasha mubikorwa bya LPCVD mubusanzwe ni amezi 2 kugeza kuri 3 gusa. Niyo mpamvu, ni ngombwa cyane kunoza ibikoresho bifasha ubwato kugirango twongere imbaraga nubuzima bwa serivisi zubwato kugirango twirinde impanuka nkizo.
Muri make, uko ibihe bigenda hamwe ninshuro byiyongera mugihe cyo gukora ingirabuzimafatizo zuba, ubwato bwa quartz nibindi bice bikunze guhura nibice byihishe cyangwa bikavunika. Ubuzima bwubwato bwa quartz hamwe nigituba cya quartz mumurongo wubu usanzwe ukora mubushinwa ni amezi agera kuri 3-6, kandi bigomba guhagarikwa buri gihe kugirango bisukure, bibungabungwe, no gusimbuza abatwara quartz. Byongeye kandi, umucanga mwinshi wa quartz ukoreshwa nkibikoresho fatizo bigize ibice bya quartz kuri ubu uri mubintu bitangwa cyane kandi bikenewe, kandi igiciro kimaze igihe kinini gikora murwego rwo hejuru, bigaragara ko kidafasha kuzamura umusaruro. imikorere ninyungu zubukungu.
Silicon carbide ceramics“Kwerekana”
Noneho, abantu bazanye ibikoresho nibikorwa byiza byo gusimbuza ibice bimwe bya quartz-silicon karbide ceramics.
Ceramics ya silicon karbide ifite imbaraga zumukanishi, ituze ryumuriro, irwanya ubushyuhe bwinshi, irwanya okiside, irwanya ihungabana ryumuriro hamwe n’imiti yangiza ruswa, kandi ikoreshwa cyane mu murima ushyushye nka metallurgie, imashini, ingufu nshya, hamwe n’ibikoresho byubaka n’imiti. Imikorere yacyo nayo irahagije mugukwirakwiza selile ya TOPcon mubikorwa byo gufotora, LPCVD (kubitsa imiti yumuvuduko muke), PECVD (plasma chimique vapor deposition) nibindi bihuza inzira yubushyuhe.
LPCVD silicon carbide ubwato hamwe na boron yaguwe na silicon carbide ubwato
Ugereranije nibikoresho gakondo bya quartz, ubwato bwubwato, ubwato, nibicuruzwa bya tube bikozwe mubikoresho bya ceramic ya silicon karbide bifite imbaraga nyinshi, ituze ryumuriro mwiza, nta deformasiyo yubushyuhe bwinshi, hamwe nubuzima bwikubye inshuro zirenga 5 ibyo bikoresho bya quartz, bishobora kugaragara cyane gabanya ikiguzi cyo gukoresha no gutakaza ingufu ziterwa no kubungabunga no gutinda. Inyungu yibiciro iragaragara, kandi isoko yibikoresho fatizo ni nini.
Muri byo, reaction ya silicon karbide (RBSiC) ifite ubushyuhe buke bwo gucumura, igiciro gito cyumusaruro, kugabanuka kwinshi, kandi hafi yo kugabanuka kwijwi mugihe cyo gucumura. Irakwiriye cyane cyane gutegura ibice binini binini kandi binini byubatswe. Kubwibyo, irakwiriye cyane kubyara ibicuruzwa binini kandi binini nkibikoresho byubwato, ubwato, padi ya cantilever, umuyoboro witanura, nibindi.
Silicon carbide wafer ubwatoufite kandi amahirwe menshi yiterambere mugihe kizaza. Hatitawe kubikorwa bya LPCVD cyangwa uburyo bwo kwagura boron, ubuzima bwubwato bwa quartz buri hasi cyane, kandi coefficente yo kwagura ubushyuhe bwibikoresho bya quartz ntaho ihuriye niy'ibikoresho bya karubide ya silicon. Kubwibyo, biroroshye kugira gutandukana mugikorwa cyo guhuza na silicon karbide ufite ubwato hejuru yubushyuhe bwinshi, ibyo bigatuma ibintu bihinda umushyitsi cyangwa kumena ubwato. Ubwato bwa silikoni karbide ifata inzira yuburyo bwo kubumba igice kimwe no gutunganya muri rusange. Imiterere yacyo hamwe nibisabwa kwihanganira umwanya muremure, kandi ikorana neza nabafite ubwato bwa silicon karbide. Byongeye kandi, karbide ya silicon ifite imbaraga nyinshi, kandi ubwato ntibushobora gucika kubera kugongana kwabantu kuruta ubwato bwa quartz.
Silicon carbide wafer ubwato
Umuyoboro w'itanura nicyo kintu nyamukuru cyohereza ubushyuhe mu itanura, kigira uruhare mu gufunga no guhererekanya ubushyuhe bumwe. Ugereranije nigituba cya quartz, itanura ya silicon carbide itanura ifite ubushyuhe bwiza bwumuriro, gushyushya kimwe, hamwe nubushyuhe bwiza bwumuriro, kandi ubuzima bwabo bukubye inshuro zirenga 5 ubw'igituba cya quartz.
Incamake
Muri rusange, haba mubijyanye nigikorwa cyibicuruzwa cyangwa ikiguzi cyo gukoresha, ibikoresho bya ceramic silicon karbide bifite ibyiza byinshi kuruta ibikoresho bya quartz mubice bimwe byumurima wizuba. Gukoresha ibikoresho bya ceramic ya silicon carbide munganda zifotora bifasha cyane ibigo bifotora bigabanya igiciro cyishoramari ryibikoresho bifasha no kuzamura ibicuruzwa no guhangana. Mu bihe biri imbere, hamwe nogukoresha nini nini ya silicon carbide itanura nini, ubwato bwa silicon karbide yubwato hamwe nubwato bufasha hamwe no kugabanya ibiciro, gukoresha ibikoresho bya ceramique silicon karbide mubijyanye na selile fotovoltaque bizaba ikintu cyingenzi mugutezimbere imikorere yingufu zoroheje no kugabanya ibiciro byinganda mubijyanye no kubyara amashanyarazi, kandi bizagira ingaruka zikomeye mugutezimbere ingufu nshya zifotora.
Igihe cyo kohereza: Ugushyingo-05-2024