Ipitingi ya SiC irashobora gutegurwa nububiko bwa chimique (CVD), guhindura preursor, gutera plasma, nibindi. Igipfundikizo cyateguwe nubushyuhe bwa CHEMICAL ni kimwe kandi cyoroshye, kandi gifite igishushanyo mbonera. Gukoresha methyl trichlosilane. .
Ipfunyika ya SiC hamwe na grafite bifite imiti ihuza neza, itandukaniro rya coefficente yo kwagura ubushyuhe hagati yabyo ni nto, ukoresheje igicapo cya SiC birashobora kunoza neza imyambarire no kurwanya okiside yibikoresho bya grafite. Muri byo, igipimo cya stoichiometric, ubushyuhe bwa reaction, gaze ya dilution, gaze yanduye nibindi bihe bigira uruhare runini mubitekerezo.
Igihe cyo kohereza: Nzeri-14-2022