Ubwoko butandukanye bwibikorwa bya power semiconductor wafer gukata

Wafergukata nimwe mumihuriro yingenzi mumashanyarazi ya semiconductor. Iyi ntambwe yashizweho kugirango itandukane neza imiyoboro yumuntu ku giti cye cyangwa chip na semiconductor wafers.

Urufunguzo rwawafergukata nugushobora gutandukanya chip imwe kugiti cye mugihe wizeye neza ko imiterere ninzitane byoroshye byinjijwe muriwaferntabwo byangiritse. Intsinzi cyangwa kunanirwa mubikorwa byo guca ntabwo bigira ingaruka gusa kubutandukanya nubwiza bwikibuto, ariko kandi bifitanye isano itaziguye nuburyo bwiza bwibikorwa byose.

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Ubwoko butatu busanzwe bwo gukata wafer | Inkomoko: KLA CHINA
Kugeza ubuwaferinzira yo gukata igabanijwemo:
Gukata icyuma: igiciro gito, mubisanzwe bikoreshwa mubyimbyewafers
Gukata lazeri: igiciro kinini, mubisanzwe bikoreshwa kuri wafer ifite umubyimba urenga 30μm
Gukata plasma: igiciro kinini, kubuzwa cyane, mubisanzwe bikoreshwa kuri wafer ifite umubyimba uri munsi ya 30μm


Gukata ibyuma

Gukata icyuma ni inzira yo guca kumurongo w abanditsi ukoresheje umuvuduko mwinshi wo kuzunguruka gusya (blade). Ubusanzwe icyuma gikozwe mu bikoresho bya diyama byangiza cyangwa bikabije, bikwiriye gukata cyangwa gutobora kuri wafer ya silicon. Nyamara, nkuburyo bwo gukata imashini, gukata ibyuma bishingiye ku gukuraho ibintu bifatika, bishobora kuganisha ku buryo bworoshye gukata cyangwa gucika ku nkombe, bityo bikagira ingaruka ku bwiza bw’ibicuruzwa no kugabanya umusaruro.

Ubwiza bwibicuruzwa byanyuma byakozwe nuburyo bwo gukanika imashini bigira ingaruka ku bipimo byinshi, birimo kugabanya umuvuduko, umubyimba w’icyuma, diameter ya blade, n’umuvuduko wo kuzunguruka.

Gukata byuzuye nuburyo bwibanze bwo gukata ibyuma, bigabanya rwose urupapuro rwakazi mugukata kubintu byagenwe (nka kaseti ikata).

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Icyuma gikora imashini gikata-cyuzuye | Umuyoboro wamashusho

Igice cyo gukata nuburyo bwo gutunganya butanga igikonjo mugukata hagati yakazi. Mugukomeza gukora inzira yo gusya, ibimamara hamwe ninshinge zinshinge zirashobora kubyara.

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Icyuma gikanika gukata-igice cyo gukata | Umuyoboro wamashusho

Gukata kabiri nuburyo bwo gutunganya bukoresha gukata inshuro ebyiri hamwe na spindles ebyiri kugirango ukore byuzuye cyangwa igice cyo kugabanya imirongo ibiri yumusaruro icyarimwe. Gukata kabiri ibiti bifite amashoka abiri ya spindle. Ibicuruzwa byinshi bishobora kugerwaho binyuze muriyi nzira.

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Icyuma gikanika gukata-gukata kabiri | Umuyoboro wamashusho

Gukata intambwe ikoresha gukata kabiri hamwe na spindle ebyiri kugirango ikore igice cyuzuye nigice mu byiciro bibiri. Koresha ibyuma byateguwe neza kugirango ugabanye insinga hejuru ya wafer na blade nziza kugirango silicon imwe isigaye isigare kugirango ugere kubikorwa byiza.

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Cuting Gukata imashini - gukata intambwe | Umuyoboro wamashusho

Gukata Bevel nuburyo bwo gutunganya bukoresha icyuma gifite impande ya V kumurongo waciwemo igice kugirango ugabanye wafer mubyiciro bibiri mugihe cyo guca intambwe. Inzira ya chamfering ikorwa mugihe cyo gukata. Kubwibyo, imbaraga zidasanzwe kandi zitunganijwe neza zirashobora kugerwaho.

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Cutting Gukata imashini - gukata bevel | Umuyoboro wamashusho

Gukata lazeri

Gukata lazeri ni tekinoroji yo guhuza wafer idakoresha ikoresha urumuri rwa lazeri rwibanze kugirango rutandukanye chipi imwe na waferi ya semiconductor. Imirasire yingufu nyinshi yibanda kumurongo wa wafer hanyuma igahumeka cyangwa ikuraho ibintu kumurongo wateganijwe mbere yo gukuraho cyangwa kubora ubushyuhe.

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Igicapo cyo gukata lazeri | Inkomoko yishusho: KLA CHINA

Ubwoko bwa laseri muri iki gihe bukoreshwa cyane harimo laseri ya ultraviolet, lazeri ya infragre, na femtosekond. Muri byo, laseri ya ultraviolet ikoreshwa kenshi mugukuraho ubukonje neza kubera ingufu za fotone nyinshi, kandi agace katewe nubushyuhe ni nto cyane, gashobora kugabanya neza ibyago byo kwangirika kwubushyuhe kuri wafer hamwe na chipi ikikije. Lazeri itagira ingano ikwiranye na waferi nini cyane kuko ishobora kwinjira cyane mubikoresho. Lazeri ya Femtosekond igera kubintu bisobanutse neza kandi ikuraho ibintu neza hamwe no guhererekanya ubushyuhe hafi ya ultrashort yumucyo.

Gukata lazeri bifite ibyiza byingenzi byo gukata ibyuma. Ubwa mbere, nkibikorwa bidahuye, gukata lazeri ntibisaba umuvuduko wumubiri kuri wafer, kugabanya gucamo ibice no gucamo ibibazo bikunze kugaragara mugukata imashini. Iyi mikorere ituma gukata lazeri bikwiranye cyane cyane no gutunganya waferi yoroshye cyangwa ultra-thin wafers, cyane cyane ifite imiterere igoye cyangwa ibintu byiza.

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Igicapo cyo gukata lazeri | Umuyoboro wamashusho

Mubyongeyeho, uburebure buhanitse kandi bwuzuye bwo gukata lazeri bituma bushobora kwerekeza urumuri rwa lazeri ku bunini buto cyane, gushyigikira uburyo bwo gukata bigoye, no kugera ku gutandukanya intera ntoya hagati ya chip. Iyi mikorere ni ingenzi cyane kubikoresho bigezweho byifashishwa bigabanya ubunini.

Ariko, gukata lazeri nabyo bifite aho bigarukira. Ugereranije no gukata ibyuma, biratinda kandi bihenze cyane cyane mubikorwa binini. Byongeye kandi, guhitamo ubwoko bwa laser bukwiye no guhitamo ibipimo kugirango ukureho neza ibikoresho hamwe na zone nkeya yibasiwe nubushyuhe birashobora kugorana kubikoresho bimwe nubunini.


Gukata lazeri

Mugihe cyo gukata lazeri, urumuri rwa lazeri rwibanze cyane kumwanya runaka hejuru yubuso bwa wafer, kandi ingufu za lazeri ziyobowe ukurikije uburyo bwateganijwe bwo gutema, buhoro buhoro guca muri wafer kugeza hasi. Ukurikije gukata ibisabwa, iki gikorwa gikorwa hakoreshejwe lazeri ya pulsed cyangwa lazeri ikomeza. Mu rwego rwo gukumira ibyangiritse kuri wafer bitewe nubushyuhe bukabije bwa lazeri, amazi akonje akoreshwa kugirango akonje kandi arinde wafer kwangirika kwubushyuhe. Muri icyo gihe, amazi akonje arashobora kandi gukuraho neza ibice byakozwe mugihe cyo gutema, kwirinda kwanduza no kwemeza ubwiza bwo guca.


Gukata Laser itagaragara

Lazeri irashobora kandi kwibanda ku kohereza ubushyuhe mu mubiri nyamukuru wa wafer, uburyo bwitwa "gukata laser itagaragara". Kuri ubu buryo, ubushyuhe buturuka kuri laser butera icyuho mumirongo y'abanditsi. Utu turere twacitse intege noneho tugera ku ngaruka zisa zo gucamo iyo kumena iyo wafer irambuye.

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Inzira nyamukuru yo gukata laser itagaragara

Uburyo butagaragara bwo gukata ni inzira yo kwinjiza imbere imbere, aho gukuraho lazeri aho laser iba yinjiye hejuru. Hamwe no gukata kutagaragara, ingufu za laser beam hamwe nuburebure bwumurambararo igice-kibonerana kubintu bya wafer substrate ikoreshwa. Inzira igabanijwemo intambwe ebyiri zingenzi, imwe ni inzira ishingiye kuri laser, indi ni inzira yo gutandukanya imashini.

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Am Urumuri rwa lazeri rutera perforasi munsi ya wafer, kandi impande zinyuma ninyuma ntabwo bigira ingaruka | Umuyoboro wamashusho

Mu ntambwe yambere, nkuko urumuri rwa lazeri rusuzuma wafer, urumuri rwa lazeri rwibanda ku kintu runaka imbere muri wafer, rukora ingingo icamo imbere. Ingufu z'igiti zitera urukurikirane rw'imvune zikora imbere, zitaragera mu bunini bwose bwa wafer kugeza hejuru no hepfo.

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Kugereranya waferi ya silicon yuburebure bwa 100μm yaciwe nuburyo bwa blade nuburyo bwo gukata butagaragara | Umuyoboro wamashusho

Mu ntambwe ya kabiri, chip kaseti hepfo ya wafer yaguwe ku mubiri, ibyo bikaba bitera guhangayika cyane mu bice biri imbere muri wafer, biterwa na lazeri mu ntambwe yambere. Iyi mihangayiko itera gucikamo kwaguka guhagaritse hejuru no hejuru hejuru ya wafer, hanyuma ugatandukanya wafer mo chipi kuri izi ngingo zo guca. Mugukata kutagaragara, gukata igice cyangwa kuruhande-igice cyo gukata igice gikoreshwa muburyo bworoshye bwo gutandukanya waferi muri chip cyangwa chip.

Ibyiza byingenzi bya laser itagaragara gukata hejuru ya laser:
• Nta gukonjesha gusabwa
• Nta myanda yatanzwe
• Nta turere twibasiwe n'ubushyuhe bushobora kwangiza imiyoboro yoroheje


Gukata plasma
Gukata plasma (bizwi kandi nka plasma etching cyangwa byumye byumye) nubuhanga bugezweho bwo gukata wafer bukoresha ion reaction (RIE) cyangwa ion reaction ya ion etching (DRIE) kugirango itandukane chipi imwe na waferi ya semiconductor. Ikoranabuhanga rigera ku gukata hakoreshejwe imiti ikuraho imirongo yagenwe hakoreshejwe plasma.

Mugihe cyo guca plasma, wafer ya semiconductor ishyirwa mucyumba cya vacuum, imvange ya gaze igenzurwa yinjira mucyumba, hanyuma hagashyirwaho umurima wamashanyarazi kugirango ubyare plasma irimo intungamubiri nyinshi za ion na radicals. Ubu bwoko bwibinyabuzima bushobora gukorana nibikoresho bya wafer hanyuma bugahitamo kuvanaho ibikoresho bya wafer kumurongo w abanditsi binyuze muburyo bwo kuvura imiti no gusohora umubiri.

Inyungu nyamukuru yo gukata plasma nuko igabanya imihangayiko kuri wafer na chip kandi ikagabanya ibyangiritse biterwa no guhura kumubiri. Nyamara, iyi nzira iraruhije kandi itwara igihe kuruta ubundi buryo, cyane cyane iyo ikorana na waferi nini cyangwa ibikoresho bifite imbaraga zo guhangana cyane, bityo ikoreshwa mubikorwa byinshi ni bike.

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Network Umuyoboro wamashusho

Mu gukora semiconductor, uburyo bwo guca wafer bugomba gutoranywa hashingiwe kubintu byinshi, harimo ibintu bya wafer, ingano ya chip na geometrie, bisabwa neza kandi neza, hamwe nigiciro rusange cyumusaruro nuburyo bwiza.


Igihe cyo kohereza: Nzeri-20-2024

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