Imiyoboro ya Semiconductor itemba-Ⅱ

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Kurandura Poly na SiO2:
Nyuma yibi, Poly na SiO2 zirenzeho zashizwe kure, ni ukuvuga. Muri iki gihe, icyerekezokurirani Byakoreshejwe. Mu byiciro byo guswera, hariho urwego rwo gutondeka icyerekezo no kudahuza. Icyerekezo cyerekezo bivugakuriramu cyerekezo runaka, mugihe etching itari iyerekezo itari iyerekezo (nabivuze kubwimpanuka nabivuze cyane. Muri make, ni ugukuraho SiO2 mubyerekezo runaka ukoresheje acide na base). Muriyi ngero, dukoresha hepfo yicyerekezo cyo gukuraho SiO2, kandi ihinduka nkiyi.

Hanyuma, kura abafotora. Muri iki gihe, uburyo bwo gukuraho abafotora ntabwo aribwo buryo bwo gukora binyuze mumirasire yumucyo twavuze haruguru, ahubwo binyuze mubundi buryo, kuko ntidukeneye gusobanura ingano yihariye muriki gihe, ahubwo dukuraho abafotora bose. Hanyuma, biba nkuko bigaragara mumashusho akurikira.

Muri ubu buryo, twageze ku ntego yo kugumana umwanya wihariye wa Poly SiO2.

Imiterere y'isoko n'amazi:
Hanyuma, reka dusuzume uko isoko n'amazi byakozwe. Abantu bose baracyibuka ko twabiganiriyeho mu nomero iheruka. Inkomoko n'amazi ni ion-yashizwemo ubwoko bumwe bwibintu. Muri iki gihe, turashobora gukoresha Photoresist kugirango dufungure isoko / imiyoboro aho ubwoko bwa N bugomba guterwa. Kubera ko dufata gusa NMOS nkurugero, ibice byose mumashusho yavuzwe haruguru bizafungurwa, nkuko bigaragara mumashusho akurikira.

Kubera ko igice gitwikiriwe nabafotora kidashobora guterwa (urumuri rwahagaritswe), ibintu N-bwoko bizaterwa gusa kuri NMOS isabwa. Kubera ko substrate munsi ya poly ihagaritswe na poly na SiO2, ntabwo izaterwa, bityo iba nkiyi.

Kuri iyi ngingo, moderi yoroshye ya MOS yarakozwe. Mubyigisho, niba voltage yongewe kumasoko, imiyoboro, poly na substrate, iyi MOS irashobora gukora, ariko ntidushobora gufata iperereza gusa no kongeramo voltage kumasoko no gutemba. Muri iki gihe, insinga za MOS zirakenewe, ni ukuvuga kuri iyi MOS, guhuza insinga kugirango uhuze MOS nyinshi hamwe. Reka turebere hamwe inzira yo gukoresha.

Gukora VIA:
Intambwe yambere ni ugupfuka MOS yose hamwe na layer ya SiO2, nkuko bigaragara ku gishushanyo gikurikira:

Nibyo, iyi SiO2 yakozwe na CVD, kuko irihuta cyane kandi igatwara igihe. Ibikurikira biracyari inzira yo gushyira amafoto hamwe no kwerekana. Nyuma yimpera, birasa nkibi.

Noneho koresha uburyo bwo gutobora kugirango utobore umwobo kuri SiO2, nkuko bigaragara mu gice cy'imvi ku gishushanyo gikurikira. Ubujyakuzimu bw'uwo mwobo burahuza neza na neza na Si.

Hanyuma, kura fotoreiste hanyuma ubone isura ikurikira.

Muri iki gihe, ikigomba gukorwa ni ukuzuza kiyobora muri uyu mwobo. Kubijyanye nuyobora iki? Buri sosiyete iratandukanye, inyinshi murizo ni tungsten alloys, none nigute umwobo ushobora kuzuzwa? Uburyo bwa PVD (Physical Vapor Deposition) burakoreshwa, kandi ihame risa nishusho iri hepfo.

Koresha electroni nyinshi cyangwa ion kugirango utere ibisasu intego, hanyuma ibikoresho bimenetse bizagwa hasi muburyo bwa atome, bityo bibeho igifuniko hepfo. Ibikoresho byintego dusanzwe tubona mumakuru bivuga ibikoresho bigenewe hano.
Nyuma yo kuzuza umwobo, birasa nkibi.

Byumvikane ko, iyo tuyujuje, ntibishoboka kugenzura ubunini bwikibiriti kugirango bingane neza nubujyakuzimu, bityo hazaba hari ibirenze, bityo dukoresha tekinoroji ya CMP (Chemical Mechanical Polishing), yumvikana cyane murwego rwohejuru, ariko mubyukuri ni ugusya, gusya ibice birenze. Ibisubizo ni nkibi.

Kuri iyi ngingo, twarangije kubyara umusaruro wa layer. Byumvikane ko, umusaruro unyuze ahanini ni ugukoresha ibyuma inyuma.

Umusaruro w'ibyuma:
Mubihe byavuzwe haruguru, dukoresha PVD kugirango dushyireho ikindi cyuma. Iki cyuma ahanini kivanze n'umuringa.

Noneho nyuma yo guhura no gutobora, tubona ibyo dushaka. Noneho komeza ushire hamwe kugeza igihe tuzuza ibyo dukeneye.

Iyo dushushanyije imiterere, tuzakubwira umubare wibyuma bingana iki kandi binyuze munzira yakoreshejwe irashobora gutondekwa cyane, bivuze ko ishobora gutondekanya ibice byinshi.
Hanyuma, tubona iyi miterere. Padiri yo hejuru ni pin yiyi chip, kandi nyuma yo gupakira, ihinduka pin dushobora kubona (birumvikana ko nayishushanyijeho, nta kamaro gafatika, gusa kurugero).

Nibikorwa rusange byo gukora chip. Muri iki kibazo, twize kubyerekeranye no kwerekana cyane, kurigata, gutera ion, imiyoboro y'itanura, CVD, PVD, CMP, nibindi mumashanyarazi ya semiconductor.