Inzira y'ibanze yaSiCimikurire ya kirisiti igabanijwemo kugabanuka no kubora ibikoresho fatizo ku bushyuhe bwo hejuru, gutwara ibintu bya gaze munsi yubushyuhe bwa gradient, hamwe no kongera kwiyongera kwibintu bya gaze kuri kristu yimbuto. Dufatiye kuri ibi, imbere yibyingenzi bigabanyijemo ibice bitatu: ahantu h'ibikoresho fatizo, icyumba cyo gukura hamwe na kristu y'imbuto. Icyitegererezo cyo kwigana cyashushanijwe hashingiwe ku kurwanya nyabyoSiCibikoresho byo gukura bya kristu imwe (reba Ishusho 1). Mu kubara: hepfo yaingirakamaroni mm 90 uvuye munsi yubushyuhe bwo kuruhande, ubushyuhe bwo hejuru bwingenzi ni 2100 ℃, ibikoresho fatizo bya diameter ni mm 1000, porotike ni 0,6, umuvuduko wo gukura ni 300 Pa, naho igihe cyo gukura ni 100 h . Ubunini bwa PG ni mm 5, diameter ingana na diametre y'imbere y'ingenzi, kandi iherereye kuri mm 30 hejuru y'ibikoresho fatizo. Sublimation, carboneisation, hamwe na recrystallisation ya zone yibikoresho fatizo birasuzumwa mukubara, kandi reaction iri hagati yibintu bya PG na gaze ntabwo isuzumwa. Ibarura rijyanye nibintu bifatika bifatika bigaragara mu mbonerahamwe ya 1.
Igishushanyo 1 Icyitegererezo cyo kubara. (a) Ubushuhe bwumurima wikigereranyo cyo gukura kwa kristu; (b) Igabana ryimbere yimbere yibibazo byingirakamaro kandi bifitanye isano
Imbonerahamwe 1 Ibipimo bimwe bifatika bikoreshwa mukubara
Igishushanyo 2 (a) cyerekana ko ubushyuhe bwimiterere ya PG irimo (bisobanurwa nkuburyo bwa 1) burenze ubw'imiterere idafite PG (yerekanwe nk'imiterere 0) munsi ya PG, kandi munsi yuburinganire 0 hejuru ya PG. Muri rusange ubushyuhe bugenda bwiyongera, kandi PG ikora nkibikoresho bitanga ubushyuhe. Ukurikije igishushanyo cya 2 (b) na 2 (c), ubushyuhe bwa axial na radial gradients yimiterere ya 1 mukarere kibisi ni ntoya, ikwirakwizwa ryubushyuhe rirasa, kandi sublimation yibikoresho iruzuye. Bitandukanye na zone yibikoresho fatizo, Igishushanyo 2 (c) cyerekana ko ubushyuhe bwa radiyoyeri igabanuka ku mbuto ya kristu yimiterere ya 1 nini, ishobora guterwa nuburinganire butandukanye bwuburyo butandukanye bwo kohereza ubushyuhe, bufasha kristu gukura hamwe ninteruro ya convex . Mu gishushanyo cya 2 (d), ubushyuhe ku myanya itandukanye mu cyerekezo cyerekana uburyo bwiyongera uko imikurire igenda itera imbere, ariko itandukaniro ryubushyuhe hagati yimiterere 0 nuburyo bwa 1 rigabanuka buhoro buhoro muri zone yibikoresho kandi bigenda byiyongera mubyumba bikura.
Igishushanyo 2 Gukwirakwiza ubushyuhe nimpinduka mubikomeye. (a) Ikwirakwizwa ry'ubushyuhe imbere muburyo bukomeye bw'imiterere 0 (ibumoso) n'imiterere 1 (iburyo) kuri 0 h, igice: ℃; . . imbuto ya kirisiti ya radiyo kuri A, hamwe nibikoresho fatizo bya radiyo ya B ~ D; .
Igishushanyo cya 3 cyerekana ubwikorezi bwibintu mubihe bitandukanye muburyo bukomeye bwimiterere 0 nuburyo 1. Igipimo cya gaze ya gazi itembera mukibanza kibisi hamwe nicyumba cyo gukura cyiyongera hamwe no kwiyongera kumwanya, kandi ubwikorezi bwibintu bugabanuka uko iterambere rigenda ritera imbere. . Igishushanyo cya 3 kirerekana kandi ko mubihe byokwigana, ibikoresho bibanza bishushanya kurukuta rwuruhande rwumusaraba hanyuma hepfo yumusaraba. Mubyongeyeho, hariho rerystallisation hejuru yibikoresho fatizo kandi bigenda byiyongera buhoro buhoro uko gukura gutera imbere. Igishushanyo cya 4 (a) na 4 (b) byerekana ko umuvuduko w’ibintu biri imbere mu bikoresho fatizo ugabanuka uko imikurire igenda itera imbere, kandi umuvuduko w’ibintu kuri 100 h ni hafi 50% yigihe cyambere; icyakora, umuvuduko wo gutemba ni munini cyane kuruhande kubera igishushanyo mbonera cyibikoresho fatizo, kandi umuvuduko wo gutembera ku nkombe wikubye inshuro zirenga 10 uwo umuvuduko w’amazi mu gice cyo hagati kuri 100 h; hiyongereyeho, ingaruka za PG muburyo bwa 1 zituma igipimo cyibintu bitembera mubice fatizo byimiterere yimiterere 1 munsi ugereranije nimiterere 0. Mu gishushanyo cya 4 (c), ibintu bitemba mubice byombi bibisi na urugereko rwo gukura rugenda rugabanuka buhoro buhoro uko imikurire igenda itera imbere, kandi ibintu bitembera ahantu h'ibikoresho fatizo bikomeje kugabanuka, ibyo bikaba biterwa no gufungura umuyoboro w’umuyaga uva ku nkombe z’ingenzi kandi bikabuza kongera kwisubiraho hejuru; mucyumba cyo gukura, umuvuduko wibintu byimiterere 0 bigabanuka byihuse mugihe cyambere 30 h kugeza 16%, kandi bigabanukaho 3% gusa mugihe cyakurikiyeho, mugihe imiterere 1 ikomeza kuba ihagaze neza mugikorwa cyo gukura. Kubwibyo, PG ifasha guhagarika igipimo cyibintu bigenda mucyumba cyo gukura. Igishushanyo 4 (d) kigereranya umuvuduko wibintu bigenda bikura imbere. Mugihe cyambere na 100 h, ubwikorezi bwibintu muri zone yo gukura yimiterere 0 irakomeye kurenza iyo muburyo bwa 1, ariko burigihe hariho umuvuduko mwinshi wikigereranyo kumpera yimiterere 0, biganisha kumikurire ikabije kuruhande . Kubaho kwa PG muburyo bwa 1 guhagarika neza iki kintu.
Igishushanyo cya 3 Ibikoresho bitembera mubikomeye. Imirongo (ibumoso) na vectors yihuta (iburyo) yo gutwara ibintu bya gaze muburyo 0 na 1 mubihe bitandukanye, ibice byerekana umuvuduko: m / s
Igicapo 4 Imihindagurikire yikigereranyo cyibintu. . . . .
C / Si igira ingaruka kuri kristu itajegajega hamwe nubucucike bwikura rya SiC. Igishushanyo 5 (a) kigereranya ikigereranyo cya C / Si ikwirakwizwa ryinzego zombi mugihe cyambere. Ikigereranyo cya C / Si kigenda kigabanuka gahoro gahoro kuva hasi kugera hejuru yingenzi, kandi igipimo cya C / Si cyimiterere 1 gihora hejuru kurenza iyo miterere 0 kumyanya itandukanye. Igishushanyo cya 5 (b) na 5 (c) byerekana ko igipimo cya C / Si cyiyongera buhoro buhoro hamwe no gukura, ibyo bikaba bifitanye isano no kwiyongera kwubushyuhe bwimbere mugihe cyanyuma cyo gukura, kuzamura ibishushanyo mbonera, hamwe nigikorwa cya Si ibice mugice cya gaze hamwe na grafite ikomeye. Mu gishushanyo cya 5 (d), ibipimo bya C / Si byimiterere 0 nuburyo 1 biratandukanye cyane munsi ya PG (0, 25 mm), ariko bitandukanye gato hejuru ya PG (50 mm), kandi itandukaniro ryiyongera buhoro buhoro uko ryegereye kristu . Muri rusange, igipimo cya C / Si cyimiterere ya 1 kiri hejuru, ifasha guhagarika imiterere ya kristu no kugabanya amahirwe yo guhinduka kwicyiciro.
Igicapo 5 Ikwirakwizwa nimpinduka za C / Si. (a) Ikigereranyo cya C / Si mugukwirakwiza mumiterere 0 (ibumoso) nuburyo 1 (iburyo) kuri 0 h; (b) Ikigereranyo cya C / Si intera itandukanye kuva kumurongo wo hagati wingenzi wimiterere 0 mubihe bitandukanye (0, 30, 60, 100 h); (c) Ikigereranyo cya C / Si intera itandukanye kuva kumurongo wo hagati wingenzi wuburyo bwa 1 mubihe bitandukanye (0, 30, 60, 100 h); . 30, 60, 100 h).
Igicapo ca 6 kirerekana ihinduka ryibice bya diametre hamwe nubusembwa bwibintu bibisi bigize ibice byombi. Igishushanyo cyerekana ko diameter yibikoresho fatizo bigabanuka kandi ububobere bukiyongera hafi yurukuta rukomeye, kandi impande zombi zikomeza kwiyongera kandi ibice bya diameter bikomeza kugabanuka uko gukura gutera imbere. Impande ntarengwa ni 0,99 kuri 100 h, naho diameter ntoya ni 300 mkm. Igice cya diameter cyiyongera kandi ububobere bugabanuka hejuru yubutaka bwibikoresho fatizo, bihuye na rerystallisation. Ubunini bwakarere ka rerystallisation bwiyongera uko imikurire igenda itera imbere, nubunini bwibice hamwe nubushake bikomeza guhinduka. Umubare ntarengwa wa diameter ugera kuri metero zirenga 1500, naho ububobere buke ni 0.13. Mubyongeyeho, kubera ko PG yongera ubushyuhe bwahantu hibikoresho kandi supersaturation ya gaze ni nto, ubunini bwa rerystallisation bwigice cyo hejuru cyibikoresho fatizo byubatswe 1 ni bito, bitezimbere igipimo cyo gukoresha ibikoresho fatizo.
Igicapo 6 Impinduka mubice bya diameter (ibumoso) hamwe na porosity (iburyo) yumutungo wibanze wimiterere 0 nuburyo 1 mubihe bitandukanye, ibice bya diameter ibice: μm
Igicapo 7 kirerekana ko imiterere 0 itera intangiriro yo gukura, ishobora kuba ifitanye isano nigipimo cyinshi cyibintu byatewe no gushushanya impande zombi. Urwego rwo kurwara rwacogoye mugihe cyikura ryakurikiyeho, bihuye nimpinduka yumuvuduko wibintu imbere yimbere yo gukura kwa kristu yimiterere 0 mubishusho 4 (d). Mu miterere 1, bitewe ningaruka za PG, interineti ya kristu ntabwo yerekana kurwana. Mubyongeyeho, PG nayo ituma umuvuduko wubwiyongere bwimiterere 1 uri munsi cyane ugereranije nimiterere 0. Ubugari bwo hagati ya kristu yimiterere 1 nyuma ya 100 h ni 68% gusa yimiterere 0.
Igicapo 7 Ihinduka ryimiterere yimiterere 0 nuburyo 1 kristu kuri 30, 60, na 100 h
Gukura kwa Crystal byakozwe mugihe cyimikorere yo kwigana imibare. Crystal ikura kumiterere 0 nuburyo 1 irerekanwa mumashusho 8 (a) na 8 (b). Ikirangantego cyimiterere 0 yerekana intera ihuriweho, hamwe nibidashoboka mukarere rwagati hamwe nicyiciro cyinzibacyuho kumpera. Ubuso bwubuso bugereranya urwego runaka rwa inhomogeneité mu gutwara ibikoresho bya gaz-fase, kandi kubaho kwinzibacyuho bihuye na C / Si nkeya. Imigaragarire ya kristu ikura kumiterere 1 ni convex gato, nta cyiciro cyinzibacyuho kiboneka, kandi ubunini ni 65% ya kristu idafite PG. Muri rusange, ibisubizo byo gukura kwa kristu bihuye nibisubizo byigana, hamwe nubushyuhe bunini bwa radiyo itandukanye kuri kristu yimbere yimiterere ya 1, imikurire yihuse kumpande irahagarikwa, kandi umuvuduko wibintu muri rusange uratinda. Icyerekezo rusange gihuye numubare wigero wibisubizo.
Igicapo 8 Kirisiti ya SiC ikura munsi yimiterere 0 nuburyo 1
Umwanzuro
PG ifasha kuzamura ubushyuhe rusange bwubutaka bwibanze no kuzamura ubushyuhe bwa axial na radial, biteza imbere kuzuza no gukoresha ibikoresho bibisi; itandukaniro ryo hejuru no hepfo itandukaniro ryiyongera, hamwe na radial gradient yimbuto ya kirisiti yubuso iriyongera, ifasha kugumya gukura kwimbere. Kubyerekeranye no kwimura imbaga, itangizwa rya PG rigabanya igipimo rusange cyo kwimura abantu, umuvuduko wibintu mubyumba bikura birimo PG ihinduka gake hamwe nigihe, kandi inzira yose yo gukura irahagaze neza. Mugihe kimwe, PG nayo irabuza neza kubaho kwinshi kwimurwa ryinshi. Mubyongeyeho, PG nayo yongera igipimo cya C / Si cyibidukikije bikura, cyane cyane kumpera yimbere yimbuto ya kirisiti, ifasha kugabanya ibibaho byimpinduka mugihe cyo gukura. Muri icyo gihe, ingaruka ziterwa nubushyuhe bwa PG zigabanya kugaragara kwa rerystallisation mugice cyo hejuru cyibikoresho fatizo kurwego runaka. Gukura kwa kristu, PG itinda umuvuduko wo gukura kwa kristu, ariko intera yo gukura irarenze. Kubwibyo, PG nuburyo bwiza bwo kuzamura ibidukikije bikura bya kristu ya SiC no kunoza ubuziranenge bwa kristu.
Igihe cyo kohereza: Jun-18-2024