Imyuka ya chimique(CVD)ni tekinoroji ikoreshwa cyane munganda ziciriritse zo kubitsa ibikoresho bitandukanye, harimo ibikoresho byinshi byokwirinda, ibikoresho byinshi byuma nibikoresho bivangwa nicyuma.
CVD ni tekinoroji gakondo yo gutegura firime. Ihame ryayo ni ugukoresha ibyuka bya gaze kugirango ubore ibice bimwe na bimwe byabanjirije binyuze mu miti y’imiti hagati ya atome na molekile, hanyuma ugakora firime yoroheje kuri substrate. Ibintu byingenzi biranga CVD ni: impinduka zimiti (reaction ya chimique cyangwa decomposition); ibikoresho byose biri muri firime biva hanze; reaction igomba kwitabira reaction muburyo bwa gaz gaz.
Umuvuduko ukabije w’imyuka mvaruganda (LPCVD), plasma yongerewe imbaraga ziva mumyuka ya pompe (PECVD) hamwe nubushakashatsi bwinshi bwa plasma chimique (HDP-CVD) nuburyo butatu bwa tekinoroji ya CVD, ifite itandukaniro rikomeye muburyo bwo kubika ibintu, ibisabwa mubikoresho, imiterere yimikorere, nibindi. . Ibikurikira nubusobanuro bworoshye no kugereranya ubu buryo butatu.
1. LPCVD (Umuvuduko muke CVD)
Ihame: CVD inzira mugihe cyumuvuduko muke. Ihame ryayo ni ugutera gaze ya reaction mucyumba cyitwaramo munsi yumuyaga cyangwa umuvuduko muke, kubora cyangwa kubyuka gaze nubushyuhe bwinshi, hanyuma ugakora firime ikomeye yashyizwe hejuru yubutaka. Kubera ko umuvuduko muke ugabanya impanuka ya gaze n’imivurungano, uburinganire nubwiza bwa firime biratera imbere. LPCVD ikoreshwa cyane muri dioxyde de silicon (LTO TEOS), nitride ya silicon (Si3N4), polysilicon (POLY), ikirahuri cya fosifosilike (BSG), ikirahuri cya borofosifosilike (BPSG), dopi polysilicon, graphene, nanotube ya karubone nizindi firime.
Ibiranga:
Temperature Ubushyuhe butunganijwe: mubisanzwe hagati ya 500 ~ 900 ° C, ubushyuhe bwibikorwa buri hejuru;
Range Umuvuduko wa gazi: ibidukikije byumuvuduko wa 0.1 ~ 10 Torr;
Quality Ubwiza bwa firime: ubuziranenge, uburinganire bwiza, ubucucike bwiza, nudusembwa duke;
Rate Igipimo cyo kubitsa: igipimo cyo kubitsa buhoro;
Iform Ubumwe: bukwiranye nubunini bunini bwa substrate, kubitsa kimwe;
Ibyiza n'ibibi:
▪ Irashobora kubitsa firime imwe kandi yuzuye;
▪ Ikora neza kuri substrate nini nini, ikwiranye ninshi;
Cost Igiciro gito;
Temperature Ubushyuhe bwo hejuru, ntibukwiriye ibikoresho byangiza ubushyuhe;
Rate Igipimo cyo kubitsa kiratinda kandi ibisohoka ni bike.
2. PECVD (Plasma Yongerewe CVD)
Ihame: Koresha plasma kugirango ukoreshe ibyiciro bya gaze mubushyuhe buke, ionize kandi ubore molekile muri gaze ya reaction, hanyuma ubike firime yoroheje hejuru yubutaka. Ingufu za plasma zirashobora kugabanya cyane ubushyuhe bukenewe kugirango reaction, kandi ifite uburyo bwinshi bwo gukoresha. Harashobora gutegurwa firime zitandukanye zicyuma, firime zidasanzwe hamwe na firime ngenga.
Ibiranga:
Temperature Ubushyuhe butunganijwe: mubisanzwe hagati ya 200 ~ 400 ° C, ubushyuhe buri hasi;
Range Umuvuduko wa gazi: mubisanzwe amagana ya mTorr kugeza kuri Torr nyinshi;
Quality Ubwiza bwa firime: nubwo uburinganire bwa firime ari bwiza, ubwinshi nubwiza bwa firime ntabwo ari byiza nka LPCVD kubera inenge zishobora gutangizwa na plasma;
Rate Igipimo cyo kubitsa: igipimo kinini, umusaruro mwinshi;
▪ Uburinganire: munsi ya LPCVD gato kuri substrate nini;
Ibyiza n'ibibi:
Filime Ntoya irashobora kubikwa mubushyuhe buke, ibereye ibikoresho bitita ku bushyuhe;
Speed Umuvuduko wo kubitsa byihuse, ubereye umusaruro mwiza;
Process Uburyo bworoshye, imiterere ya firime irashobora kugenzurwa no guhindura ibipimo bya plasma;
As Plasma irashobora kwerekana inenge za firime nka pinholes cyangwa kudahuza;
Ugereranije na LPCVD, ubwinshi bwa firime nubuziranenge ni bibi cyane.
3. HDP-CVD (Umuvuduko mwinshi wa Plasma CVD)
Ihame: Ikoranabuhanga ridasanzwe rya PECVD. HDP-CVD (izwi kandi nka ICP-CVD) irashobora gutanga ubucucike bwa plasma nubuziranenge kuruta ibikoresho gakondo bya PECVD mubushyuhe buke. Byongeye kandi, HDP-CVD itanga hafi yigenga ya ion flux no kugenzura ingufu, kunoza ubushobozi bwo kuziba umwobo cyangwa umwobo kugirango usabe koherezwa muri firime, nka co-anti-reflecting coatings, dielectric idahoraho yibikoresho, nibindi.
Ibiranga:
Temperature Ubushyuhe butunganijwe: ubushyuhe bwicyumba kugeza 300 ℃, ubushyuhe bwibikorwa buri hasi cyane;
Range Umuvuduko wa gazi: hagati ya 1 na 100 mTorr, munsi ya PECVD;
Quality Ubwiza bwa firime: ubwinshi bwa plasma, ubwiza bwa firime, uburinganire bwiza;
Rate Igipimo cyo kubitsa: igipimo cyo kubitsa kiri hagati ya LPCVD na PECVD, hejuru gato ya LPCVD;
Iform Uburinganire: kubera plasma yuzuye cyane, uburinganire bwa firime ni bwiza, buberanye nubutaka bugaragara;
Ibyiza n'ibibi:
▪ Irashobora kubitsa firime nziza cyane mubushyuhe bwo hasi, ikwiranye nibikoresho byangiza ubushyuhe;
Filime nziza ya firime nziza, ubucucike n'ubuso bworoshye;
Ens Ubucucike bukabije bwa plasma butezimbere uburinganire bwimiterere hamwe na firime;
Equipment Ibikoresho bigoye hamwe nigiciro kinini;
Speed Umuvuduko wo kubitinda uratinda, kandi ingufu za plasma nyinshi zishobora kuzana ibyangiritse bike.
Ikaze abakiriya bose baturutse impande zose zisi kugirango badusure kugirango tuganire kubindi biganiro!
https://www.vet-china.com/
https://www.facebook.com/abantu/Ningbo-Miami-Yongerewe-Ibikoresho-Ikoranabuhanga-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/yatangajwe/
https://www.youtube.com/@user-oo9nl2qp6j
Igihe cyo kohereza: Ukuboza-03-2024