Gukoresha silicon carbide ceramics mumashanyarazi ya semiconductor

Ibikoresho byatoranijwe kubice bisobanutse byimashini zifotora

Mu gice cya kabiri,silicon carbide ceramicibikoresho bikoreshwa cyane mubikoresho byingenzi byo gukora imiyoboro ihuriweho, nka silicon karbide ikora, inzira yo kuyobora,ibyerekana, ceramic suck chuck, amaboko, gusya disiki, ibikoresho, nibindi kumashini ya lithographie.

Silicon carbide ceramic ibiceya semiconductor nibikoresho bya optique

● Silicon carbide ceramic gusya disiki. Niba insyo yo gusya ikozwe mubyuma cyangwa ibyuma bya karubone, ubuzima bwayo ni bugufi kandi coefficente yo kwagura ubushyuhe ni nini. Mugihe cyo gutunganya wafer ya silicon, cyane cyane mugihe cyo gusya byihuse cyangwa gusya, kwambara no guhindura ubushyuhe bwa disiki yo gusya bituma bigora kwemeza uburinganire nuburinganire bwa wafer ya silicon. Disikuru yo gusya ikozwe muri silicon carbide ceramics ifite ubukana bwinshi no kwambara gake, kandi coefficente yo kwagura amashyanyarazi irasa cyane nkiya waferi ya silicon, kuburyo ishobora kuba hasi kandi igasukurwa vuba.
● Silicon carbide ceramic fixture. Byongeye kandi, iyo wafer ya silicon ikozwe, bakeneye gukorerwa ubushyuhe bwo hejuru kandi akenshi bitwarwa hakoreshejwe ibikoresho bya karubide ya silicon. Zirinda ubushyuhe kandi ntizisenya. Diyama imeze nka karubone (DLC) hamwe nandi mavuta ashobora gukoreshwa hejuru kugirango yongere imikorere, agabanye ibyangiritse, kandi birinde kwanduza.
● Silicon carbide ikora. Dufashe urugero rwakazi mumashini ya lithographie nkurugero, imbonerahamwe ikora cyane cyane kurangiza ibikorwa byo kwerekana, bisaba umuvuduko mwinshi, inkoni nini, dogere esheshatu-zubwisanzure nano-urwego ultra-precision traffic. Kurugero, kumashini ya lithographie ifite ibyemezo bya 100nm, uburebure bwuzuye bwa 33nm, hamwe nubugari bwumurongo wa 10nm, umwanya wakazi uhagaze neza urasabwa kugera kuri 10nm, mask-silicon wafer icyarimwe gutera intambwe no gusikana ni 150nm / s na 120nm / s, hamwe na mask yo gusikana umuvuduko uri hafi ya 500nm / s, kandi imbonerahamwe ikora irasabwa kugira icyerekezo kinini kandi gihamye.

Igishushanyo mbonera cyibikorwa byakazi na micro-icyerekezo (igice cyigice)

Ic Silicon karbide ceramic kare indorerwamo. Ibice byingenzi mubikoresho byingenzi byuzuzanya nkimashini za lithographie zifite imiterere igoye, ibipimo bigoye, hamwe nuburemere bworoshye, kuburyo bigoye gutegura ibintu nkibi bya silicon karbide ceramic. Kugeza ubu, imiyoboro rusange y’ibikoresho by’umuzunguruko bikomatanyirijwe hamwe, nka ASML mu Buholandi, NIKON na CANON mu Buyapani, bakoresha ibikoresho byinshi nka microcrystalline ikirahure na cordierite kugirango bategure indorerwamo kare, ibice byingenzi bigize imashini zitwa lithographie, kandi bakoresha karbide ya silicon ububumbyi bwo gutegura ibindi bikoresho-byimikorere byubaka bifite imiterere yoroshye. Icyakora, impuguke zo mubushakashatsi bwubushakashatsi bwubushinwa zakoresheje tekinoroji yo gutegura nyirarureshwa kugirango igere ku itegurwa rinini rinini, rifite imiterere-karemano, riremereye cyane, rifunze byuzuye silicon karbide ceramic indorerwamo hamwe nibindi bikoresho byubaka kandi bikora kumashini ya lithographie.