Gushyira mubikorwa no gukora ubushakashatsi kubikorwa bya SiC mububiko bwa karubone / karubone ibikoresho byumuriro wa monocrystalline silicon-2

1 Gushyira mubikorwa no gukora ubushakashatsi bwa silicon karbide itwikiriye ibikoresho bya karubone / karubone

1.1 Gushyira mubikorwa no gukora ubushakashatsi mugutegura gukomeye

Muri kristu imwe ya kirisiti yumuriro, ikarubone / karuboneikoreshwa cyane nkibikoresho bitwara ibikoresho bya silicon kandi bihuza naQuartz, nkuko bigaragara ku gishushanyo cya 2. Ubushyuhe bwakazi bwa karubone / karubone iboneka ni 1450℃.

Ikomatanyirizo rya karubone / karubone ikomatanya yateguwe nuburyo bwo gutumura imyuka ya chimique no muburyo bwa reaction. Ipitingi igizwe na silicon karbide (100 ~ 300)μm), gutwikira silikoni (10 ~ 20μm) hamwe na nitride ya silicon (50 ~ 100μm), ishobora guhagarika neza kwangirika kwumwuka wumuyaga wa silicon hejuru yimbere ya karubone / karubone ikomatanya. Mubikorwa byo kubyaza umusaruro, igihombo cya karubone / karubone ikomatanyirijwe hamwe ni 0,04 mm kuri buri ziko, kandi ubuzima bwa serivisi bushobora kugera ku ziko 180.

Abashakashatsi bifashishije uburyo bwa reaction ya chimique kugirango babone karbide ya silikoni imwe itwikiriye hejuru ya karubone / karubone ikomatanya mugihe cyubushyuhe bumwe na bumwe no kurinda gaze yabatwara, bakoresheje dioxyde de silicon nicyuma cya silicon nkibikoresho fatizo mubushuhe bwo hejuru. itanura. Ibisubizo byerekana ko kuvura ubushyuhe bwo hejuru bidatezimbere gusa nububasha nimbaraga za sic coating, ariko kandi binatezimbere cyane kwihanganira imyambarire yubuso bwa karubone / karubone, kandi bikarinda kwangirika kwubuso bwumusaraba wa SiO. na atome ya ogisijeni ihindagurika mu itanura rya monocrystal silicon. Ubuzima bwa serivisi bwibyingenzi bwiyongereyeho 20% ugereranije nubwa ngombwa nta sic coating.

1.2 Gushyira mubikorwa no gukora ubushakashatsi muburyo bwo kuyobora

Imiyoboro ya silinderi iherereye hejuru yingenzi (nkuko bigaragara ku gishushanyo 1). Mubikorwa byo gukurura kristu, itandukaniro ryubushyuhe hagati yimbere ninyuma yumurima ni rinini, cyane cyane hejuru yo hepfo yegereye ibikoresho bya silikoni yashongeshejwe, ubushyuhe nibwinshi, kandi kwangirika kwumuyaga wa silicon nicyo gikomeye cyane.

Abashakashatsi bavumbuye inzira yoroshye hamwe no kurwanya okiside nziza yo kuyobora imiyoboro ya anti-okiside hamwe nuburyo bwo gutegura. Ubwa mbere, igipande cya silicon karbide whisker yari mu mwanya wahinzwe kuri matrix yumuyoboro uyobora, hanyuma hategurwa urwego rwo hanze rwa silicon karbide yo hanze, ku buryo hashyizweho urwego rwinzibacyuho rwa SiCw hagati ya matrix na karubide yuzuye ya silikoni. , nkuko bigaragara ku gishushanyo cya 3. Coefficient yo kwagura ubushyuhe yari hagati ya matrix na karubide ya silicon. Irashobora kugabanya neza guhangayikishwa nubushyuhe buterwa no kudahuza kwaguka kwinshi.

Isesengura ryerekana ko hamwe no kwiyongera kwibirimo bya SiCw, ingano numubare wacitse mubitwikiro bigabanuka. Nyuma ya 10h okiside muri 1100℃umwuka, igipimo cyo kugabanya ibiro byurugero rwikigereranyo ni 0.87% ~ 8.87% gusa, kandi kurwanya okiside hamwe no guhangana nubushyuhe bwumuriro wa silicon karbide yatwitswe neza. Igikorwa cyose cyo kwitegura kirangizwa ubudahwema no gushiramo imyuka ya chimique, gutegura karubide ya silicon karbide byoroshe cyane, kandi imikorere yuzuye ya nozzle irashimangirwa.

Abashakashatsi batanze uburyo bwo gushimangira matrix no gutwikira hejuru ya grafite yo kuyobora umuyoboro wa czohr monocrystal silicon. Silicon carbide slurry yabonetse yashizwe hamwe hejuru yubuso bwa grafite iyobora hamwe nuburinganire bwa 30 ~ 50μm ukoresheje gushiramo brush cyangwa uburyo bwo gutera spray, hanyuma ugashyirwa mu itanura ryubushyuhe bwo hejuru kugirango ubone uko ibintu bimeze, ubushyuhe bwa reaction bwari 1850 ~ 2300℃, no kubika ubushyuhe byari 2 ~ 6h. Igice cyo hanze cya SiC gishobora gukoreshwa muri 24 muri (60,96 cm) itanura rimwe ryikura rya kirisiti, kandi ubushyuhe bwo gukoresha ni 1500℃, kandi usanga nta poro yamenetse no kugwa hejuru ya silindiri ya grafite nyuma ya 1500h.

1.3 Gushyira mubikorwa no gukora ubushakashatsi muri silinderi

Nka kimwe mu bintu by'ingenzi bigize sisitemu yo mu murima wa monocrystalline silicon, silinderi ikoreshwa mu kugabanya cyane gutakaza ubushyuhe no kugenzura ubushyuhe bw’ubushyuhe bw’ibidukikije. Nkigice gishyigikira urukuta rwimbere rwurururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururizumizdaya (silicon vapor corrosion) rutera kugabanuka no gucika kw'ibicuruzwa, amaherezo biganisha ku kunanirwa kw'ibicuruzwa.

Mu rwego rwo kurushaho kunoza imyuka ya silicon irwanya ruswa ya C / C-sic compite insulation insulation, abashakashatsi bashyize ibicuruzwa byateguwe na C / C-sic composite insulation insuline mu itanura ry’imyuka ya chimique, banategura karbide yuzuye ya silikoni yuzuye kuri Ubuso bwa C / C-sic ikomatanya insulasiyo yibikoresho byogukoresha imyuka ya chimique. Ibisubizo byerekana ko, Inzira irashobora kubuza neza kwangirika kwa fibre ya karubone yibanze ya C / C-sic ikomatanya nu mwuka wa silicon, kandi kurwanya ruswa ya parike ya silicon yiyongereyeho inshuro 5 kugeza ku 10 ugereranije na karubone / karubone, n'ubuzima bwa serivisi ya silinderi ya insulation hamwe numutekano wibidukikije byumuriro biratera imbere cyane.

2.Umwanzuro n'ibyiringiro

Silicon carbide coatingni byinshi kandi bikoreshwa cyane mubikoresho bya karubone / karubone yumuriro kubera imbaraga za okiside nziza cyane mubushyuhe bwinshi. Hamwe nubunini bwibikoresho bya karubone / karubone yumuriro bikoreshwa mugukora silikoni ya monocrystalline, uburyo bwo kunoza uburinganire bwa karubide ya silikoni itwikiriye hejuru yumuriro wumuriro wumuriro no kuzamura ubuzima bwa serivisi yibikoresho byumuriro wa karubone / karubone byabaye ikibazo cyihutirwa gukemurwa.

Ku rundi ruhande, hamwe n’iterambere ry’inganda za silikoni ya monocrystalline, icyifuzo cy’ibikoresho byo mu murima wa karuboni / karubone zifite isuku nyinshi nacyo kiriyongera, kandi nanofibers ya SiC nayo ikura kuri fibre yimbere ya karubone mugihe cyo kubyitwaramo. Igipimo cyo gukuraho no kugereranya umurongo wa C / C-ZRC na C / C-sic ZrC ibihimbano byateguwe nubushakashatsi ni -0.32 mg / s na 2.57μm / s. Igipimo cya misa n'umurongo wa C / C-sic -ZrC igizwe ni -0.24mg / s na 1.66μm / s. C / C-ZRC igizwe na SiC nanofibers ifite ibyiza byo gukuraho. Nyuma, ingaruka zamasoko atandukanye ya karubone kumikurire ya SiC nanofibers hamwe nuburyo bwa SiC nanofibers ishimangira imiterere yo gukuraho ibintu bya C / C-ZRC bizigwa.

Ikomatanyirizo rya karubone / karubone ikomatanya yateguwe nuburyo bwo gutumura imyuka ya chimique no muburyo bwa reaction. Ipitingi igizwe na silicon karbide (100 ~ 300)μm), gutwikira silikoni (10 ~ 20μm) hamwe na nitride ya silicon (50 ~ 100μm), ishobora guhagarika neza kwangirika kwumwuka wumuyaga wa silicon hejuru yimbere ya karubone / karubone ikomatanya. Mubikorwa byo kubyaza umusaruro, igihombo cya karubone / karubone ikomatanyirijwe hamwe ni 0,04 mm kuri buri ziko, kandi ubuzima bwa serivisi bushobora kugera ku ziko 180.