Gushyira mubikorwa no gukora ubushakashatsi kubikorwa bya SiC mubikoresho bya karubone / karubone yumuriro wa monocrystalline silicon-1

Amashanyarazi akomoka ku mirasire y'izuba yabaye inganda nshya zitanga ingufu ku isi. Ugereranije na polysilicon na amorphous silicon selile izuba, silikoni ya monocrystalline, nkibikoresho bitanga ingufu za fotokoltaque, ifite imbaraga zo guhindura amashanyarazi menshi hamwe nibyiza byubucuruzi, kandi byahindutse inzira nyamukuru y’amashanyarazi akomoka ku mirasire y'izuba. Czochralski (CZ) ni bumwe mu buryo bw'ingenzi bwo gutegura silikoni ya monocrystalline. Ibigize itanura rya Czochralski monocrystalline ririmo sisitemu yitanura, sisitemu ya vacuum, sisitemu ya gaze, sisitemu yumuriro hamwe na sisitemu yo kugenzura amashanyarazi. Sisitemu yumurima wubushyuhe nimwe mubintu byingenzi kugirango imikurire ya silikoni ya monocrystalline, kandi ubwiza bwa silikoni ya monocrystalline bugira ingaruka ku buryo bukabije bwo gukwirakwiza ubushyuhe bw’umurima.

Ibice byumuriro byubushyuhe bigizwe ahanini nibikoresho bya karubone (ibikoresho bya grafite nibikoresho bya karubone / karubone), bigabanijwemo ibice byunganira, ibice bikora, ibikoresho byo gushyushya, ibice birinda, ibikoresho byo kubika ubushyuhe, nibindi, ukurikije imirimo yabyo, nkuko byerekanwe ku gishushanyo cya 1. Nkuko ingano ya silikoni ya monocrystalline ikomeje kwiyongera, ubunini bwibisabwa mubice byumuriro nabyo biriyongera. Ibikoresho bya karubone / karubone bihinduka ihitamo ryambere ryibikoresho byumuriro wa silikoni ya monocrystalline bitewe nuburinganire bwacyo hamwe nibikoresho byiza bya mashini.

Mubikorwa bya czochralcian monocrystalline silicon, gushonga ibikoresho bya silicon bizabyara imyuka ya silicon hamwe na silicon yashongeshejwe, bikavamo isuri ya silisifike yibikoresho byumuriro wa karubone / karubone, hamwe nubukanishi hamwe nubuzima bwa serivisi ya carbone / carbone yumuriro wumuriro ni byagize ingaruka zikomeye. Kubwibyo, uburyo bwo kugabanya isuri ya silisifike yibikoresho byo mu murima wa karubone / karubone no kuzamura ubuzima bwabo bwa serivisi byabaye kimwe mubibazo bikunze kugaragara mubakora silikoni ya monocrystalline hamwe nabakora ibikoresho bya karubone / karubone.Silicon carbide coatingibaye ihitamo ryambere ryo gutwikira hejuru yubutaka bwa karubone / karubone yumuriro wumuriro bitewe nubwiza buhebuje bwumuriro no kwihanganira kwambara.

Muri iyi nyandiko, duhereye ku bikoresho byo mu murima wa karubone / karubone bikoreshwa mu musaruro wa silikoni ya monocrystalline, uburyo nyamukuru bwo gutegura, ibyiza n’ibibi byo gutwika karubide ya silicon. Hashingiwe kuri ibyo, ishyirwa mu bikorwa n’ubushakashatsi bwakozwe na silicon karbide itwikiriye mu bikoresho byo mu murima wa karubone / karubone isubirwamo hakurikijwe ibiranga ibikoresho byo mu murima wa karuboni / karubone, hamwe n’icyerekezo hamwe n’icyerekezo cyiterambere cyo gukingira ubuso bwo kurinda ibikoresho bya karuboni / karubone. Bishyizwe imbere.

1 Ikoranabuhanga ryo gutegurasilicon karbide

1.1 Uburyo bwo gushira

Uburyo bwo gushiramo akenshi bukoreshwa mugutegura imbere imbere ya karibide ya silicon muri C / C-sic sisitemu yibikoresho. Ubu buryo bwambere bukoresha ifu ivanze kugirango uzenguruke ibintu bya karubone / karubone, hanyuma bigakora ubushyuhe mubushyuhe runaka. Urukurikirane rwibintu bigoye bya fiziki-chimique bibaho hagati yifu ivanze nubuso bwikitegererezo kugirango bibeho. Inyungu zayo nuko inzira yoroshye, inzira imwe gusa irashobora gutegura ibikoresho byuzuye, bitarangwamo matrix; Ingano ntoya ihinduka kuva preform kugeza kubicuruzwa byanyuma; Bikwiranye na fibre iyo ari yo yose ishimangiwe; Ikintu kigizwe na gradient irashobora gushirwaho hagati yikingirizo na substrate, ihujwe neza na substrate. Icyakora, hari n'ibibi, nka reaction ya chimique ku bushyuhe bwo hejuru, ishobora kwangiza fibre, hamwe nubukanishi bwa materique ya karubone / karubone igabanuka. Uburinganire bwikibiriti biragoye kubigenzura, bitewe nibintu nkuburemere, bigatuma igipfundikizo kidahwanye.

1.2 Uburyo bwo gutwikira buhoro

Uburyo bwo gutwikisha buhoro ni ukuvanga ibikoresho byo gutwikisha hamwe no kubihuza muvanga, kuringaniza neza hejuru ya matrix, nyuma yo gukama mu kirere kitagira inert, urugero rwashizwemo rushyirwa mu bushyuhe bwinshi, kandi birashobora kuboneka. Ibyiza nuko inzira yoroshye kandi yoroshye gukora, kandi uburebure bwa coating bworoshye kugenzura; Ikibi ni uko hari imbaraga nke zo guhuza hagati yikingirizo na substrate, kandi guhangana nubushyuhe bwumuriro wa coating ni bibi, kandi uburinganire bwikigereranyo buri hasi.

1.3 Uburyo bwo kuvura imyuka ya chimique

Uburyo bwa chimique reaction (CVR) nuburyo bukoreshwa muburyo bwo guhumeka ibintu bya silikoni ikomeye mu byuka bya silikoni ku bushyuhe runaka, hanyuma imyuka ya silicon ikwirakwira imbere ndetse no hejuru ya matrix, hanyuma ikabyitwaramo neza hamwe na karubone muri matrike kugirango itange umusaruro silicon karbide. Ibyiza byayo birimo ikirere kimwe mumatanura, igipimo gihoraho hamwe nubunini bwibintu bifatika; Inzira iroroshye kandi yoroshye gukora, kandi uburebure bwa coating burashobora kugenzurwa muguhindura umuvuduko wumuyaga wa silicon, igihe cyo kubitsa nibindi bipimo. Ikibi ni uko icyitegererezo cyibasiwe cyane nu mwanya uri mu itanura, kandi umuvuduko wumuyaga wa silicon uri mu itanura ntushobora kugera ku myumvire imwe, bikavamo umubyimba utaringaniye.

1.4 Uburyo bwo kubika imyuka ya chimique

Gutanga imyuka ya chimique (CVD) ni inzira aho hydrocarbone ikoreshwa nkisoko ya gaze nubuziranenge bwinshi N2 / Ar nka gaze itwara kugirango yinjize imyuka ivanze mumashanyarazi ya chimique, kandi hydrocarbone irabora, ikomatanya, ikwirakwizwa, ikamenyekana kandi igakemurwa munsi ubushyuhe bumwe nigitutu cyo gukora firime zikomeye hejuru yibikoresho bya karubone / karubone. Akarusho kayo nuko ubucucike nubuziranenge bwikibiriti bishobora kugenzurwa; Irakwiriye kandi kubikorwa-igice gifite imiterere igoye; Imiterere ya kristu hamwe nubuso bwimiterere yibicuruzwa birashobora kugenzurwa muguhindura ibipimo byo kubitsa. Ingaruka ni uko igipimo cyo kubitsa kiri hasi cyane, inzira iragoye, igiciro cyumusaruro ni kinini, kandi hashobora kubaho inenge zifatika, nkibice, inenge za meshi nubuso bwubuso.

Muri make, uburyo bwo gushira bugarukira gusa kubiranga ikoranabuhanga, bikwiranye no guteza imbere no gukora laboratoire nibikoresho bito; Uburyo bwo gutwikira ntibukwiriye kubyara umusaruro mwinshi kubera ko budahwitse. Uburyo bwa CVR bushobora kuzuza umusaruro mwinshi wibicuruzwa binini, ariko bifite ibisabwa byinshi kubikoresho nikoranabuhanga. Uburyo bwa CVD nuburyo bwiza bwo guteguraSIC, ariko igiciro cyacyo kiri hejuru yuburyo bwa CVR kubera ingorane zayo mugucunga inzira.