Ububiko bwa firime ntoya ni ugutwikira igice cya firime kubintu nyamukuru byubutaka bwa semiconductor. Iyi firime irashobora gukorwa mubikoresho bitandukanye, nko kubika insimburangingo ya silicon dioxyde, semiconductor polysilicon, umuringa wicyuma, nibindi.
Urebye uburyo bwa semiconductor chip yo gukora, iherereye mubikorwa byimbere.
Gahunda yo gutegura firime yoroheje irashobora kugabanywamo ibyiciro bibiri ukurikije uburyo bwo gukora firime: kubika imyuka yumubiri (PVD) hamwe nubumara bwa chimique;(CVD), muribwo ibikoresho bya CVD bitunganya bifite umubare munini.
Imyuka yumubiri ifatika (PVD) bivuga guhumeka hejuru yubutaka bwibintu no kubishyira hejuru yubutaka binyuze muri gaze ya gaze / plasma nkeya, harimo guhumeka, gusuka, ion beam, nibindi.;
Imyuka ya chimique (CVD) bivuga inzira yo kubitsa firime ikomeye hejuru ya wafer ya silicon binyuze mumiti ivanze na gaze. Ukurikije uko ibintu byifashe (igitutu, preursor), igabanijwemo umuvuduko wikirereCVD(APCVD), umuvuduko mukeCVD.
LPCVD: LPCVD ifite ubushobozi bwiza bwo gukwirakwiza intambwe, guhimba neza no kugenzura imiterere, umuvuduko mwinshi hamwe n’ibisohoka, kandi bigabanya cyane inkomoko y’umwanda. Kwishingikiriza ku bikoresho byo gushyushya nkisoko yubushyuhe kugirango ukomeze reaction, kugenzura ubushyuhe nigitutu cya gaze ni ngombwa cyane. Byakoreshejwe cyane mubikorwa bya Poly gukora inganda za TopCon.
PECVD: PECVD yishingikiriza kuri plasma iterwa na radiyo yumurongo wa radiyo kugirango igere ku bushyuhe buke (munsi ya dogere 450) yuburyo bwo kohereza firime. Ubushyuhe buke ni inyungu zayo nyamukuru, bityo bizigama ingufu, kugabanya ibiciro, kongera umusaruro, no kugabanya kwangirika kwubuzima bwabatwara bake muri waferi ya silicon iterwa nubushyuhe bwinshi. Irashobora gukoreshwa mubikorwa bya selile zitandukanye nka PERC, TOPCON, na HJT.
ALD: Ubwiza bwa firime nziza, yuzuye kandi idafite umwobo, intambwe nziza yo gukwirakwiza intambwe, irashobora gukorwa mubushyuhe buke (ubushyuhe bwicyumba-400 ℃), irashobora kugenzura neza kandi neza ubugari bwa firime, ikoreshwa cyane muburyo butandukanye bwuburyo butandukanye, kandi ntabwo ikeneye kugenzura uburinganire bwimikorere. Ariko ibibi nuko umuvuduko wo gukora firime utinda. Nka zinc sulfide (ZnS) itanga urumuri rukoreshwa mu gukora insuliranteri ya nanostructures (Al2O3 / TiO2) hamwe na ecran ya firime yoroheje (TFEL).
Ububiko bwa Atomic layer (ALD) nuburyo bwo gutwika vacuum bugizwe na firime yoroheje hejuru yubutaka bwa substrate kumurongo ku buryo muburyo bwa atome imwe. Nko mu 1974, umuhanga mu bya fiziki wo muri Finilande Tuomo Suntola yateje imbere iryo koranabuhanga kandi yegukana igihembo cya miliyoni imwe y’amayero Millennium Technology Award. Ubuhanga bwa ALD bwakoreshwaga muburyo bwa tekinike ya electroluminescent yerekana, ariko ntabwo yakoreshejwe cyane. Mu ntangiriro z'ikinyejana cya 21 ni bwo ikoranabuhanga rya ALD ryatangiye gukoreshwa n'inganda za semiconductor. Mu gukora ultra-thin high-dielectric ibikoresho kugirango isimbuze okiside ya silikoni gakondo, yakemuye neza ikibazo cyimyuka yatewe no kugabanuka kwubugari bwumurongo wa transistoriste yumurima, bituma amategeko ya Moore arushaho gutera imbere yerekeza kumurongo muto. Muganga Tuomo Suntola yigeze kuvuga ko ALD ishobora kongera ubwinshi bwibice bigize ibice.
Amakuru rusange yerekana ko ikoranabuhanga rya ALD ryahimbwe na Dr. Tuomo Suntola wa PICOSUN muri Finlande mu 1974 kandi ryatejwe imbere mu mahanga, nka firime ndende ya dielectric muri chip ya nanometero 45/32 yakozwe na Intel. Mu Bushinwa, igihugu cyanjye cyatangije ikoranabuhanga rya ALD nyuma yimyaka irenga 30 ugereranije n’amahanga. Mu Kwakira 2010, PICOSUN muri Finlande na kaminuza ya Fudan yakiriye inama ya mbere yo guhanahana amasomo ya ALD yo mu gihugu, imenyekanisha ikoranabuhanga rya ALD mu Bushinwa ku nshuro ya mbere.
Ugereranije no guhumeka imyuka gakondo (CVD) hamwe no gushira kumyuka yumubiri (PVD), ibyiza bya ALD nibyiza cyane-bitatu-bihuza, guhuza firime nini-nini, hamwe no kugenzura neza neza, bikwiranye no gukura firime ultra-thin kumiterere yubuso bugoye hamwe nuburyo bugereranije.
- Inkomoko yamakuru: Urubuga rwa Micro-nano rutunganya kaminuza ya Tsinghua -
Mugihe cya nyuma ya Moore, ubunini nuburyo bwo gutunganya wafer byateye imbere cyane. Dufashe urugero rwa logique nk'urugero, hamwe no kwiyongera k'umurongo utanga umusaruro hamwe na progaramu iri munsi ya 45nm, cyane cyane imirongo yumusaruro ufite inzira ya 28nm na munsi, ibisabwa kugirango uburinganire bwimbitse no kugenzura neza. Nyuma yo kwinjiza tekinoroji nyinshi yo kwerekana, umubare wibikorwa bya ALD intambwe n'ibikoresho bisabwa byiyongereye cyane; murwego rwo kwibuka chip, inzira nyamukuru yo gukora yagiye ihinduka kuva 2D NAND igera kumiterere ya 3D NAND, umubare wimbere wimbere wakomeje kwiyongera, kandi ibice byagiye bigenda byerekana buhoro buhoro, imiterere yikigereranyo kinini, ninshingano zingenzi ya ALD yatangiye kwigaragaza. Urebye iterambere ryigihe kizaza cya semiconductor, tekinoroji ya ALD izagira uruhare runini mugihe cya nyuma ya Moore.
Kurugero, ALD niyo tekinoroji yonyine yo kubitsa ishobora kuzuza ibisabwa hamwe nibikorwa bya firime byuburyo bukomeye bwa 3D butondekanye (nka 3D-NAND). Ibi birashobora kugaragara neza mubishusho bikurikira. Filime yashyizwe muri CVD A (ubururu) ntabwo ikubiyemo igice cyo hasi cyimiterere; niyo haba hari ibintu bimwe na bimwe byahinduwe kuri CVD (CVD B) kugirango bigerweho, imikorere ya firime nibigize imiti yibice byo hasi birakennye cyane (ahantu hera mumashusho); muburyo bunyuranye, ikoreshwa rya tekinoroji ya ALD ryerekana firime yuzuye, kandi imiterere ya firime nziza kandi nziza kandi igerwaho mubice byose byimiterere.
—-Gereranya Ibyiza bya tekinoroji ya ALD ugereranije na CVD (Inkomoko: ASM) —-
Nubwo CVD igifite umugabane munini wisoko mugihe gito, ALD yabaye kimwe mubice byihuta byiterambere ryisoko ryibikoresho bya wafer fab. Muri iri soko rya ALD rifite imbaraga nyinshi zo gukura ninshingano zingenzi mugukora chip, ASM nisosiyete ikomeye mubijyanye nibikoresho bya ALD.
Igihe cyo kohereza: Jun-12-2024