Inganda zikoreshwa mu bikoresho bya grafite zisabwa cyane cyane, ingano nziza ya grafite ifite ubusobanuro buhanitse, ubushyuhe bwo hejuru, imbaraga nyinshi, igihombo gito nibindi byiza, nka: ibicuruzwa bya grafite byacuzwe.Kuberako ibikoresho bya grafite bikoreshwa munganda ziciriritse (harimo nubushyuhe hamwe nizicwa byacumuye) birasabwa kwihanganira uburyo bwo gushyushya no gukonjesha inshuro nyinshi, kugirango byongere ubuzima bwa serivisi yibikoresho bya grafite, mubisanzwe birasabwa ko ibikoresho bya grafite byakoreshejwe bifite imikorere ihamye n'imikorere yo kurwanya ubushyuhe.
01 Ibikoresho bya graphite yo gukura kwa semiconductor
Inzira zose zikoreshwa mugukuza semiconductor kristal ikora munsi yubushyuhe bwinshi nibidukikije byangirika. Agace gashyushye k'itanura ryikura rya kirisitu mubusanzwe rifite ibikoresho birwanya ubushyuhe kandi birwanya ruswa ibice byinshi bya grafite, nkubushyuhe, ingirakamaro, silinderi, insimburangingo, electrode, ifata ingirakamaro, ibiti bya electrode, nibindi.
Turashobora gukora ibice byose bya grafite yibikoresho byo gukora kristu, bishobora gutangwa kugiti cye cyangwa mumaseti, cyangwa ibice byashushanyije byerekana ubunini butandukanye ukurikije ibyo abakiriya bakeneye. Ingano yibicuruzwa irashobora gupimirwa kurubuga, kandi ivu ryibicuruzwa byarangiye birashobora kuba bikekurenza 5ppm.
02 Graphite ibikoresho bya semiconductor epitaxy
Epitaxial inzira yerekana imikurire yikintu kimwe cya kirisiti hamwe na lattice imwe itunganijwe kimwe na substrate kumurongo umwe wa kristu. Mubikorwa bya epitaxial, wafer yuzuye kuri disiki ya grafite. Imikorere nubuziranenge bwa disiki ya grafite igira uruhare runini mubwiza bwa epitaxial layer ya wafer. Mu rwego rwo kubyara epitaxial, harakenewe byinshi bya ultra-high purity grafite na base ya grafite base base hamwe na SIC ikenewe.
Isosiyete yacu ya grafite ishingiye kuri semiconductor epitaxy ifite porogaramu zitandukanye, irashobora guhuza ibikoresho byinshi bikoreshwa mu nganda, kandi ifite isuku ryinshi, igifuniko kimwe, ubuzima bwiza bwa serivisi, hamwe n’imiti myinshi irwanya imiti hamwe n’ubushyuhe bukabije.
03 Graphite ibikoresho byo gutera ion
Gutera Ion bivuga inzira yo kwihutisha plasma beam ya boron, fosifore na arsenic ku mbaraga runaka, hanyuma ukayitera mu gice cyo hejuru cyibikoresho bya wafer kugirango uhindure ibintu bifatika byubutaka. Ibigize igikoresho cyo gutera ion bigomba kuba bikozwe mubikoresho bifite isuku nyinshi kandi birwanya ubushyuhe buhebuje, ubushyuhe bwumuriro, ruswa nke iterwa na ion beam nibirimo umwanda muke. Grafite-isukuye cyane yujuje ibyangombwa bisabwa, kandi irashobora gukoreshwa mu ndege iguruka, ibice bitandukanye, electrode, igifuniko cya electrode, imiyoboro, imashini imurika, nibindi bikoresho byo gutera ion.
Ntidushobora gutanga gusa igifuniko cyo gukingira imashini zitandukanye zo guteramo ion, ariko tunatanga kandi amashanyarazi meza ya grafite electrode hamwe nisoko ya ion hamwe na ruswa irwanya ruswa yibintu bitandukanye. Moderi ikoreshwa: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM nibindi bikoresho. Mubyongeyeho, turashobora kandi gutanga ceramic, tungsten, molybdenum, ibicuruzwa bya aluminium nibice bisize.
04 Graphite ibikoresho byo kubika nibindi
Ibikoresho byo gutwika ubushyuhe bikoreshwa mubikoresho bitanga umusaruro wa semiconductor birimo grafite ibyuma bikomeye, ibyuma byoroheje, ifoto ya grafite, impapuro za grafite, n'umugozi wa grafite.
Ibikoresho byacu byose bibisi bitumizwa mu mahanga, bishobora kugabanywa ukurikije ingano yihariye y'ibisabwa abakiriya cyangwa kugurishwa muri rusange.
Inzira ya karubone-karubone ikoreshwa nk'itwara rya firime mu gutunganya umusaruro w'izuba rya monocrystalline silicon na selile polycrystalline. Ihame ryakazi ni: shyiramo chip ya silicon mumurongo wa CFC hanyuma wohereze mumatanura kugirango utunganyirize firime.
