Mu gawo lakumbuyo-mapeto ndondomeko, ndimtanda (nsalu ya siliconyokhala ndi mabwalo kutsogolo) iyenera kuchepetsedwa kumbuyo isanadulidwe, kuwotcherera ndi kulongedza kuti muchepetse kutalika kwa phukusi, kuchepetsa kuchuluka kwa phukusi la chip, kupititsa patsogolo kutentha kwa chip, magwiridwe antchito amagetsi, zida zamakina ndi kuchepetsa kuchuluka kwa dicing. Kubwerera mmbuyo kuli ndi ubwino wapamwamba kwambiri komanso mtengo wotsika. Yalowa m'malo mwa njira zachikhalidwe zonyowa ndi ma ion etching kuti ikhale ukadaulo wofunikira kwambiri wochepetsera msana.
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Masitepe enieni amtandakupatulira ndi kumangiriza mtandawo kuti ukonzedwe ku filimu yochepetsera, ndiyeno gwiritsani ntchito vacuum kuti adsorb filimu yopyapyala ndi chip pa tebulo la porous ceramic wafer table, kusintha mizere yamkati ndi yakunja yozungulira bwato lapakati pa malo ogwirira ntchito. gudumu lopera la diamondi lokhala ngati chikho kupita pakati pa chophatikizira cha silicon, ndipo chophatikizira cha silicon ndi gudumu lopera zimazungulira nkhwangwa zawo kuti zipere. Kupera kumaphatikizapo magawo atatu: kugaya movutikira, kugaya bwino ndi kupukuta.
Chophatikizikacho chikutuluka mufakitale yopyapyala chimapukutidwanso kuti chiondacho chikhale chokhuthala chomwe chimafunika kuti apangidwe. Pogaya chophikacho, tepi iyenera kuyikidwa kutsogolo (Active Area) kuteteza dera la dera, ndipo mbali yakumbuyo imagwa nthawi yomweyo. Pambuyo popera, chotsani tepi ndikuyesa makulidwe.
Njira zogaya zomwe zagwiritsidwa ntchito bwino pokonzekera silicon wafer zimaphatikizapo kugaya patebulo lozungulira,nsalu ya siliconKupukuta mozungulira, kupukuta mbali ziwiri, ndi zina zotero. Ndi kupititsa patsogolo kwapamwamba kwa zofunikira za pamwamba pazitsulo za crystal silicon wafers, matekinoloje atsopano akupera amaperekedwa nthawi zonse, monga kugaya TAIKO, kugaya mankhwala opangidwa ndi makina, kupukuta ndi kupukutira mapulaneti.
Kugaya tebulo mozungulira:
Kupera patebulo mozungulira (kugaya tebulo lozungulira) ndi njira yoyambilira yopera yomwe imagwiritsidwa ntchito pokonzekera silicon wafer ndi kupatulira kumbuyo. Mfundo yake ikuwonetsedwa mu Chithunzi 1. Zophika za silicon zimayikidwa pa makapu akuyamwa a tebulo lozungulira, ndi kuzungulira synchronously kuyendetsedwa ndi tebulo lozungulira. Zophika za silicon zokha sizimazungulira mozungulira; gudumu lopera limadyetsedwa axially pamene likuzungulira pa liwiro lapamwamba, ndipo m'mimba mwake gudumu lopera ndilokulirapo kuposa m'mimba mwake wa chotupa cha silicon. Pali mitundu iwiri ya kugaya patebulo lozungulira: kugaya kumaso ndi kupera kumaso. Pamaso akupera akupera, m'lifupi mwake gudumu lopera ndi lalikulu kuposa silicon wafer awiri, ndi gudumu spindle chakudya mosalekeza motsatira njira axial mpaka owonjezera kukonzedwa, ndiyeno chopyapyala silikoni amazunguliridwa pansi pa galimoto ya tebulo rotary; Pamaso akupera tangential, gudumu akupera chakudya motsatira njira yake axial, ndi kachitsulo chowotcha mafuta mosalekeza azunguliridwa pansi pa galimoto yozungulira litayamba, ndipo akupera ndi kumalizidwa ndi kubwereza kudyetsa (kubwezerana) kapena zokwawa kudyetsa (creepfeed).
Chithunzi 1, chojambula chojambula chopukutira tebulo lozungulira (nkhope yowoneka bwino).
Poyerekeza ndi njira yopera, kugaya patebulo lozungulira kuli ndi ubwino wochotsa kwambiri, kuwonongeka kochepa pamtunda, ndi makina osavuta. Komabe, malo enieni akupera (akupera yogwira) B ndi kudula-mu ngodya θ (ngodya pakati pa bwalo lakunja la gudumu lopera ndi bwalo lakunja la choyikapo cha silicon) mu kusintha kwakusintha ndi kusintha kwa malo odulira. wa gudumu logaya, zomwe zimapangitsa kuti pakhale mphamvu yosakhazikika yopera, zomwe zimapangitsa kuti zikhale zovuta kupeza malo abwino kwambiri (mtengo wapamwamba wa TTV), ndikuyambitsa mosavuta zolakwika monga kugwa kwa m'mphepete ndi kugwa kwa m'mphepete. Tekinoloje yopera patebulo lozungulira imagwiritsidwa ntchito makamaka pokonza zowotcha zachitsulo za crystal imodzi pansi pa 200mm. Kuwonjezeka kwa kukula kwa zowotcha za kristalo za silicon kwaika patsogolo zofunika zapamwamba pakulondola kwapamwamba komanso kulondola kwa kayendedwe ka zida zogwirira ntchito, kotero kuti kugaya patebulo lozungulira sikoyenera kugaya zowotcha zachitsulo za crystal crystal pamwamba pa 300mm.
Pofuna kupititsa patsogolo kagayidwe kabwino kagayidwe, zida zogawira ndege zamalonda nthawi zambiri zimagwiritsa ntchito mawilo opangira ma gudumu angapo. Mwachitsanzo, pazidazi pali mawilo amphamvu opera ndi mawilo opera bwino, ndipo tebulo lozungulira limazungulira bwalo limodzi kuti amalize kugaya movutikira ndi kugaya bwino motsatira. Zida zamtunduwu zikuphatikizapo G-500DS ya American GTI Company (Chithunzi 2).
Chithunzi 2, G-500DS zida zopukutira tebulo la rotary za GTI Company ku United States
Silicon wafer kuzungulira akupera:
Kuti mukwaniritse zosowa zazikulu zokonzekera zophika za silicon ndikupukuta kumbuyo, ndikupeza kulondola kwapamtunda ndi mtengo wabwino wa TTV. Mu 1988, Katswiri wina wa ku Japan dzina lake Matsui anaganiza zogwiritsa ntchito njira ya silicon yozungulira pogaya. Mfundo yake ikuwonetsedwa mu Chithunzi 3. The single crystal silicon wafer ndi kapu yoboola pakati diamondi gudumu akupera adsorbed pa workbench atembenuza mozungulira nkhwangwa awo, ndi gudumu akupera amadyetsedwa mosalekeza pamodzi axial malangizo pa nthawi yomweyo. Pakati pawo, m'mimba mwake gudumu lopera ndi lalikulu kuposa m'mimba mwake la chofufumitsa cha silicon, ndipo kuzungulira kwake kumadutsa pakati pa chotupa cha silicon. Pofuna kuchepetsa mphamvu yopera ndikuchepetsa kutentha, kapu ya vacuum suction nthawi zambiri imadulidwa kukhala mawonekedwe a convex kapena concave kapena ngodya yapakati pa gudumu lopotera ndi nsonga ya suction cup spindle axis imasinthidwa kuti zitsimikizidwe kuti kugaya pakati pawo. gudumu lopera ndi chowotcha cha silicon.
Chithunzi 3, Schematic chithunzi cha silicon wafer rotary akupera mfundo
Poyerekeza ndi kugaya patebulo lozungulira, kupera kwa silicon wafer rotary kuli ndi ubwino wotsatirawu: ① Kupera kamodzi kokha kumatha kupanga zowotcha zazikulu za silicon kupitirira 300mm; ② Malo enieni akupera B ndi ngodya yodula θ ndizokhazikika, ndipo mphamvu yopera imakhala yokhazikika; ③ Posintha mbali yokhotakhota pakati pa gudumu logaya ndi nsonga ya silicon wafer, mawonekedwe amtundu umodzi wa crystal silicon wafer amatha kuwongoleredwa mwachangu kuti apeze kulondola kwa mawonekedwe apamwamba. Kuonjezera apo, malo opera ndi kudula ngodya θ ya silicon wafer rotary grinding ilinso ndi ubwino wa kupera kwakukulu kwa malire, makulidwe osavuta a pa intaneti ndi kuzindikira ndi kuyang'anira khalidwe lapamwamba, kapangidwe ka zida zophatikizika, kugaya kosavuta kophatikizika kwamasiteshoni ambiri, komanso kugaya bwino kwambiri.
Pofuna kupititsa patsogolo kupanga bwino komanso kukwaniritsa zofunikira za mizere yopangira semiconductor, zida zogaya zamalonda zochokera pa mfundo ya silicon wafer rotary grinding imagwiritsa ntchito masitepe ambiri opangira ma spindle, omwe amatha kumaliza kugaya ndi kupera bwino pakutsitsa ndi kutsitsa kumodzi. . Kuphatikizidwa ndi zida zina zothandizira, imatha kuzindikira kugaya kokwanira kwa zowotcha za crystal silicon "dry-in/dry-out" ndi "kaseti ku kaseti".
Kupera mbali ziwiri:
Pamene kupera kwa silicon wafer rotary akupera pamwamba ndi pansi pa silicon wafer, chogwirira ntchito chiyenera kutembenuzidwa ndi kuchitidwa pang'onopang'ono, zomwe zimalepheretsa kugwira ntchito bwino. Panthawi imodzimodziyo, kupukuta kwa silicon wafer rotary kumakhala ndi kukopera kolakwika (kukopera) ndi zizindikiro zopera (grindingmark), ndipo n'zosatheka kuchotsa zolakwika monga mawonekedwe a waviness ndi taper pamwamba pa mtanda umodzi wa crystal silicon pambuyo kudula waya. (multi-saw), monga momwe tawonetsera pa Chithunzi 4. Kuti mugonjetse zolakwika zomwe zili pamwambapa, ukadaulo wogaya wa mbali ziwiri (doublesidegrinding) udawonekera m'ma 1990, ndipo mfundo yake ikuwonetsedwa mu Chithunzi 5. Zowongolera zomwe zimagawidwa mosiyanasiyana mbali zonse ziwiri zimalepheretsa imodzi. kristalo wa silicon mu mphete yosungira ndikuzungulira pang'onopang'ono moyendetsedwa ndi chogudubuza. Mawilo opera a diamondi okhala ngati chikho amakhala mbali zonse ziwiri za crystal silicon wafer. Motsogozedwa ndi mpweya wokhala ndi zopota zamagetsi, zimazungulira molunjika ndikudyetsa axially kuti zitheke kugaya mbali ziwiri za crystal silicon wafer imodzi. Monga momwe tikuwonera pachithunzichi, kugaya mbali ziwiri kumatha kuchotsa bwino mawonekedwe a waviness ndi taper pamwamba pa crystal silicon wafer pambuyo podula waya. Malinga ndi dongosolo la ma wheel wheel axis, kugaya mbali ziwiri kumatha kukhala kopingasa komanso koyima. Pakati pawo, yopingasa iwiri mbali akupera akhoza bwino kuchepetsa chikoka cha pakachitsulo chowotcha akatundu mapindikidwe chifukwa cha kufa kulemera kwa pakachitsulo chopyapyala pa akupera khalidwe, ndipo n'zosavuta kuonetsetsa kuti akupera ndondomeko zinthu mbali zonse za crystal silikoni. chowotcha ndizofanana, ndipo tinthu tating'onoting'ono ndi tchipisi topera sizosavuta kukhala pamwamba pa chowotcha chimodzi cha crystal silicon. Ndi njira yabwino kwambiri yopera.
Chithunzi 4, "Koperani zolakwika" ndikuvala zopindika pamakina ozungulira a silicon
Chithunzi 5, chojambula chapawiri-mbali-akupera mfundo
Gome 1 likuwonetsa kufananitsa pakati pa kupera ndi mbali ziwiri zamitundu itatu yomwe ili pamwambayi ya crystal silicon wafers. Kukupera kwa mbali ziwiri kumagwiritsidwa ntchito makamaka pokonza silicon wafer pansi pa 200mm, ndipo kumakhala ndi zokolola zambiri. Chifukwa cha kugwiritsiridwa ntchito kwa mawilo a abrasive abrasive-abrasive wheels, kugaya kwa single-crystal silicon wafers kumatha kupeza apamwamba kwambiri kuposa akupera mbali ziwiri. Choncho, mphero zonse za silicon wafer rotary ndi kupera mbali ziwiri zimatha kukwaniritsa zofunikira zazitsulo za 300mm za silicon, ndipo panopa ndi njira zofunika kwambiri zopangira flattening. Posankha silicon wafer flattening processing processing, m'pofunika kuganizira mozama zofunikira za kukula kwake, khalidwe lapamwamba, ndi teknoloji yopukutira yachitsulo cha single-crystal silicon wafer. Kupatulira kumbuyo kwa chophatikizira kumangosankha njira yambali imodzi, monga njira yopera ya silicon wafer rotary.
Kuphatikiza pa kusankha njira yopera mu kupaka silicon wafer, m'pofunikanso kudziwa kusankha kwa magawo oyenera, monga kuthamanga kwabwino, kugaya gudumu lambewu kukula, kugaya gudumu binder, kuthamanga gudumu, kuthamanga kwa silicon wafer, kugaya kukhuthala kwamadzimadzi kuthamanga, etc., ndi kusankha wololera njira njira. Nthawi zambiri, njira yogayira yogawanika, kuphatikiza kugaya movutikira, kumalizitsa pang'ono, kumalizitsa, kupukuta kopanda phokoso komanso kuthandizira pang'onopang'ono kumagwiritsidwa ntchito kuti apeze zowotcha za crystal silicon zomwe zimagwiritsidwa ntchito kwambiri, kukhazikika kwapamwamba komanso kuwonongeka kwapansi.
Ukadaulo watsopano wogaya ungatanthauze zolemba:
Chithunzi 5, chithunzi chojambula cha TAIKO pogaya mfundo
Chithunzi 6, chithunzi chojambula cha pulaneti disk grinding mfundo
Ukadaulo wopatulira wowonda kwambiri:
Pali ukadaulo wopatulira chonyamulira chonyamulira komanso ukadaulo wopera m'mphepete (Chithunzi 5).
Nthawi yotumiza: Aug-08-2024