Chifukwa chiyani makoma am'mbali amapindika panthawi yowuma?

Kusagwirizana kwa bombardment ya ion

Zoumaetchingnthawi zambiri ndi njira yomwe imaphatikiza zotsatira zakuthupi ndi zamankhwala, momwe bombardment ya ion ndi njira yofunikira yolumikizira thupi. Pa nthawi yaetching process, mbali ya zochitika ndi kugawa mphamvu kwa ayoni kungakhale kosagwirizana.

Ngati mbali ya zochitika za ion ndi yosiyana m'malo osiyanasiyana pampando wammbali, mphamvu ya ma ion pakhomapo idzakhalanso yosiyana. M'madera omwe ali ndi ngodya zazikulu za ma ion, mphamvu ya ma ion pamphepete mwa khoma imakhala yamphamvu, zomwe zimapangitsa kuti khoma la m'mphepete mwa derali likhale lokhazikika, zomwe zimapangitsa kuti khomalo lipinde. Kuphatikiza apo, kugawa kosagwirizana kwa mphamvu ya ion kudzatulutsanso zotsatira zofanana. Ma ion okhala ndi mphamvu zambiri amatha kuchotsa zinthu moyenera, zomwe zimapangitsa kuti zikhale zosagwirizanaetchingmadigiri a sidewall pamalo osiyanasiyana, zomwe zimapangitsa kuti khoma lakumbali lipindike.

Mphamvu ya photoresist

Photoresist amatenga gawo la chigoba mu etching youma, kuteteza madera omwe safunikira kuzikika. Komabe, photoresist imakhudzidwanso ndi bombardment ya plasma ndi machitidwe a mankhwala panthawi ya etching, ndipo ntchito yake ingasinthe.

Ngati makulidwe a photoresist ndi osagwirizana, kuchuluka kwa mowa panthawi ya etching sikufanana, kapena kumamatira pakati pa photoresist ndi gawo lapansi kumakhala kosiyana m'malo osiyanasiyana, kungayambitse chitetezo chosagwirizana cha ma sidewalls panthawi ya etching. Mwachitsanzo, madera omwe ali ndi photoresist yowonda kwambiri kapena osamata pang'ono angapangitse kuti zinthu zapansi zikhale zosavuta kuzikika, zomwe zimapangitsa kuti zipupa zam'mbali zizipinda pamalowa.

Kusiyana kwa gawo lapansi

Zomwe zimakhazikika pagawo lokha zimatha kukhala ndi zinthu zosiyanasiyana, monga mawonekedwe osiyanasiyana a kristalo ndi kuchuluka kwa doping m'magawo osiyanasiyana. Kusiyanaku kudzakhudza kuchuluka kwa etching ndi etching selectivity.
Mwachitsanzo, mu crystalline silicon, makonzedwe a maatomu a silicon m'malo osiyanasiyana a kristalo ndi osiyana, ndipo kusinthika kwawo ndi kutsika kwawo ndi mpweya wotsekemera kudzakhalanso kosiyana. Munthawi ya etching, ma etching osiyanasiyana omwe amadza chifukwa cha kusiyana kwa zinthu zakuthupi amapangitsa kuya kwa makoma am'mbali m'malo osiyanasiyana kusagwirizana, ndipo pamapeto pake kumabweretsa kupindika kwapambali.

Zinthu zokhudzana ndi zida

Magwiridwe ndi mawonekedwe a zida za etching zimathandizanso kwambiri pazotsatira za etching. Mwachitsanzo, zovuta monga kugawa kwa plasma m'chipinda chochitiramo komanso kuvala kosagwirizana ndi ma elekitirodi kungayambitse kugawa kofanana kwa magawo monga kachulukidwe ka ayoni ndi mphamvu pamiyala yopyapyala panthawi yolumikizira.

Kuphatikiza apo, kuwongolera kutentha kwa zida ndi kusinthasintha pang'ono kwa gasi kumatha kukhudzanso kufanana kwa etching, zomwe zimapangitsa kupindika kwapambali.