Kodi pali kusiyana kotani pakati pa PECVD ndi LPCVD mu zida za semiconductor CVD?

Kuyika kwa mpweya wa Chemical (CVD) amatanthauza njira yoyika filimu yolimba pamwamba pa siliconmtandakupyolera muzochita za mankhwala a gasi osakaniza. Malinga ndi zochitika zosiyanasiyana (kukakamiza, kalambulabwalo), imatha kugawidwa m'mitundu yosiyanasiyana ya zida.

Kodi zida ziwirizi zimagwiritsidwa ntchito bwanji?
Mtengo wa PECVD(Plasma Enhanced) zida ndizochuluka kwambiri komanso zimagwiritsidwa ntchito kwambiri, zomwe zimagwiritsidwa ntchito mu OX, Nitride, chipata chachitsulo, carbon amorphous, etc.; LPCVD (Low Power) nthawi zambiri imagwiritsidwa ntchito ku Nitride, poly, TEOS.
Kodi mfundo yake ndi yotani?
PECVD - njira yomwe imagwirizanitsa bwino mphamvu ya plasma ndi CVD. Tekinoloje ya PECVD imagwiritsa ntchito plasma yotsika kutentha kuti ipangitse kutulutsa kowala pa cathode ya chipinda chopangira (ie, tray yachitsanzo) pansi pa kupsinjika kochepa. Kutulutsa kowala kumeneku kapena chipangizo china chotenthetsera kumatha kukweza kutentha kwachitsanzo pamlingo wodziwikiratu, ndiyeno kuyambitsa kuchuluka kwa gasi woyendetsedwa. Mpweya umenewu umakhala ndi machitidwe ambiri a mankhwala ndi plasma, ndipo pamapeto pake amapanga filimu yolimba pamwamba pa chitsanzo.

LPCVD - Low-pressure chemical vapor deposition (LPCVD) idapangidwa kuti ichepetse kuthamanga kwa gasi mu riyakitala pafupifupi 133Pa kapena kuchepera.
Kodi aliyense ali ndi makhalidwe otani?
PECVD - Njira yomwe imagwirizanitsa bwino mphamvu ya plasma ndi CVD: 1) Opaleshoni yotsika kutentha (kupewa kuwonongeka kwa kutentha kwa zipangizo); 2) Kukula kwa filimu mwachangu; 3) Osasankha zinthu, OX, Nitride, chipata chachitsulo, mpweya wa amorphous amatha kukula; 4) Pali in-situ monitoring system, yomwe imatha kusintha Chinsinsi kudzera mu magawo a ion, kuthamanga kwa gasi, kutentha ndi makulidwe a filimu.
LPCVD - Makanema owonda omwe amasungidwa ndi LPCVD azikhala ndi kufalikira kwa masitepe abwino, kapangidwe kabwino kapangidwe ndi kapangidwe kake, kuchulukira kwakukulu komanso zotulutsa. Kuphatikiza apo, LPCVD sifunikira mpweya wonyamulira, chifukwa chake imachepetsa kwambiri gwero la kuipitsidwa kwa tinthu ndipo imagwiritsidwa ntchito kwambiri m'mafakitale owonjezera a semiconductor pakuyika filimu woonda.

 

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