Mbadwo woyamba wa zida za semiconductor umayimiridwa ndi silicon yachikhalidwe (Si) ndi germanium (Ge), yomwe ndi maziko opangira makina ophatikizika. Amagwiritsidwa ntchito kwambiri pamagetsi otsika, otsika kwambiri, komanso ma transistors otsika mphamvu ndi zowunikira. Zoposa 90% za semiconductor zopangidwa ndi zinthu zopangidwa ndi silicon;
Zida za semiconductor za m'badwo wachiwiri zimayimiridwa ndi gallium arsenide (GaAs), indium phosphide (InP) ndi gallium phosphide (GaP). Poyerekeza ndi zida zopangidwa ndi silicon, zimakhala ndi ma optoelectronic othamanga kwambiri komanso othamanga kwambiri ndipo amagwiritsidwa ntchito kwambiri m'magawo a optoelectronics ndi ma microelectronics. ;
M'badwo wachitatu wa zida za semiconductor umayimiridwa ndi zinthu zomwe zikutuluka monga silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), diamondi (C), ndi aluminium nitride (AlN).
Silicon carbidendichinthu chofunikira kwambiri pakukula kwamakampani amtundu wachitatu wa semiconductor. Zida zamagetsi za silicon carbide zimatha kukwaniritsa bwino kwambiri, kutsika kwapang'onopang'ono komanso zopepuka zamakina amagetsi amagetsi ndi kukana kwawo kwamphamvu kwambiri, kukana kutentha kwambiri, kutayika kochepa ndi zinthu zina.
Chifukwa cha mawonekedwe ake apamwamba: kusiyana kwakukulu kwa bandi (kogwirizana ndi kusweka kwakukulu kwa magetsi ndi kachulukidwe kakang'ono kwambiri), kuwongolera kwamagetsi kwambiri, komanso kutenthetsa kwamafuta ambiri, zikuyembekezeka kukhala zida zogwiritsidwa ntchito kwambiri popanga tchipisi ta semiconductor mtsogolomo. . Makamaka m'magalimoto amagetsi atsopano, magetsi a photovoltaic, mayendedwe a njanji, ma grids anzeru ndi madera ena, ali ndi ubwino woonekeratu.
Njira yopangira SiC imagawidwa m'magawo atatu akulu: SiC single crystal kukula, epitaxial layer kukula ndi kupanga zida, zomwe zimagwirizana ndi maulalo anayi akuluakulu a unyolo wa mafakitale:gawo lapansi, epitaxy, zipangizo ndi ma modules.
Njira yodziwika bwino yopangira magawo amayamba kugwiritsa ntchito njira yochepetsera mpweya wa nthunzi kuti ichepetse ufa pamalo ofunda kwambiri, ndikukulitsa makristalo a silicon carbide pamwamba pa kristalo wa mbewu kudzera pakuwongolera kutentha. Pogwiritsa ntchito chowotcha cha silicon carbide ngati gawo lapansi, kuyika kwa nthunzi wamankhwala kumagwiritsidwa ntchito kuyika kristalo imodzi pamtanda kuti apange chowotcha cha epitaxial. Pakati pawo, kukula kwa silicon carbide epitaxial layer pa conductive silicon carbide substrate kungapangidwe kukhala zida zamagetsi, zomwe zimagwiritsidwa ntchito kwambiri pamagalimoto amagetsi, photovoltaics ndi madera ena; kukulitsa gallium nitride epitaxial layer pa semi-insulatingsilicon carbide gawo lapansiimatha kupangidwanso kukhala zida zamawayilesi, zomwe zimagwiritsidwa ntchito muzolumikizana za 5G ndi magawo ena.
Pakalipano, magawo a silicon carbide ali ndi zotchinga zapamwamba kwambiri pamakampani a silicon carbide, ndipo magawo a silicon carbide ndi ovuta kwambiri kupanga.
Kupanga botolo la SiC sikunathetsedwe kotheratu, ndipo ubwino wa mizati ya kristalo yaiwisi ndi yosasunthika ndipo pali vuto la zokolola, zomwe zimatsogolera ku mtengo wapamwamba wa zipangizo za SiC. Zimangotenga pafupifupi masiku atatu kuti zinthu za silicon zikule kukhala ndodo ya kristalo, koma zimatengera sabata kuti ndodo ya silicon carbide crystal. Ndodo ya silicon crystal yamba imatha kukula 200cm, koma ndodo ya silicon carbide crystal imatha kukula 2cm. Komanso, SiC palokha ndi chinthu cholimba komanso chophwanyika, ndipo zowotcha zomwe zimapangidwa ndi izo zimakhala zosavuta kung'amba m'mphepete mukamagwiritsa ntchito makina odulira odulira, omwe amakhudza zokolola komanso kudalirika kwazinthu. Magawo a SiC ndi osiyana kwambiri ndi ma silicon achikhalidwe, ndipo chilichonse kuyambira pa zida, njira, kukonza mpaka kudula ziyenera kupangidwa kuti zigwirizane ndi silicon carbide.
Unyolo wamakampani a silicon carbide umagawidwa m'magulu anayi akuluakulu: gawo lapansi, epitaxy, zida ndi ntchito. Zida zapansi panthaka ndiye maziko a unyolo wamakampani, zida za epitaxial ndizofunikira pakupanga zida, zida ndiye maziko a unyolo wamakampani, ndipo kugwiritsa ntchito ndizomwe zimayambitsa chitukuko cha mafakitale. Makampani akumtunda amagwiritsa ntchito zida zopangira zinthu zapansi panthaka pogwiritsa ntchito njira zochepetsera mpweya wa nthunzi ndi njira zina, kenako amagwiritsa ntchito njira zoyikapo mpweya wamankhwala ndi njira zina kukulitsa zida za epitaxial. Makampani apakati amagwiritsa ntchito zipangizo zam'mwamba kuti apange zipangizo zamagetsi zamagetsi, zipangizo zamagetsi ndi zipangizo zina, zomwe zimagwiritsidwa ntchito pomaliza mauthenga a 5G. , magalimoto amagetsi, mayendedwe a njanji, etc. Pakati pawo, gawo lapansi ndi epitaxy amawerengera 60% ya mtengo wazitsulo zamakampani ndipo ndizofunika kwambiri pazitsulo zamakampani.
Gawo laling'ono la SiC: Makhiristo a SiC nthawi zambiri amapangidwa pogwiritsa ntchito njira ya Lely. Zogulitsa zapadziko lonse lapansi zikusintha kuchoka pa mainchesi 4 kufika mainchesi 6, ndipo 8-inch conductive substrate mankhwala apangidwa. Magawo apakhomo amakhala makamaka mainchesi 4. Popeza mizere yopangira 6-inch silicon wafer ikhoza kukonzedwa ndi kusinthidwa kuti ipange zida za SiC, gawo lalikulu la msika la magawo 6-inch SiC lidzasungidwa kwa nthawi yayitali.
Njira ya silicon carbide substrate ndi yovuta komanso yovuta kupanga. Silicon carbide gawo lapansi ndi pawiri semiconductor single crystal chuma wopangidwa ndi zinthu ziwiri: carbon ndi silicon. Pakalipano, makampaniwa amagwiritsa ntchito ufa wapamwamba kwambiri wa kaboni ndi silicon ufa wapamwamba kwambiri ngati zipangizo zopangira silicon carbide powder. Pansi pa gawo la kutentha lapadera, njira yokhwima yotumizira mpweya (njira ya PVT) imagwiritsidwa ntchito kukulitsa silicon carbide yamitundu yosiyanasiyana mung'anjo yokulirapo ya kristalo. Ingot ya crystal imasinthidwa, kudulidwa, pansi, kupukutidwa, kutsukidwa ndi njira zina zingapo kuti apange gawo lapansi la silicon carbide.
Nthawi yotumiza: May-22-2024