CVD (Chemical Vapor Deposition) ndi njira yomwe imagwiritsidwa ntchito pokonzekera zokutira za silicon carbide.CVD silicon carbide zokutiraali ndi machitidwe ambiri apadera. Nkhaniyi ifotokoza njira yokonzekera zokutira za CVD silicon carbide ndi mawonekedwe ake.
1. Kukonzekera njira yaCVD silicon carbide zokutira
Njira ya CVD imatembenuza ma precursors a mpweya kukhala zokutira zolimba za silicon carbide pansi pa kutentha kwambiri. Malinga ndi osiyana mpweya precursors, akhoza kugawidwa mu mpweya gawo CVD ndi madzi gawo CVD.
1. CVD gawo la nthunzi
Vapor phase CVD imagwiritsa ntchito ma precursors a mpweya, nthawi zambiri ma organosilicon compounds, kuti akwaniritse kukula kwa mafilimu a silicon carbide. Zomwe zimagwiritsidwa ntchito nthawi zambiri za organosilicon zimaphatikizapo methylsilane, dimethylsilane, monosilane, ndi zina zotero, zomwe zimapanga mafilimu a silicon carbide pazitsulo zazitsulo ponyamula zoyambira mpweya kupita ku zipinda zotentha kwambiri. Malo otentha kwambiri m'chipinda chochitiramo nthawi zambiri amapangidwa ndi kutenthetsera kolowera kapena kutentha kwamphamvu.
2. CVD yamadzimadzi
Liquid-phase CVD imagwiritsa ntchito kalambulabwalo wamadzimadzi, nthawi zambiri organic zosungunulira zomwe zili ndi silicon ndi silanol pawiri, zomwe zimatenthedwa ndi kutenthedwa muchipinda chochitiramo, ndiyeno filimu ya silicon carbide imapangidwa pagawo lapansi kudzera muzochita zamankhwala.
2. Makhalidwe a machitidwe aCVD silicon carbide zokutira
1.Kuchita bwino kwambiri kutentha kwapamwamba
CVD silicon carbide zokutirakupereka kwambiri kutentha bata ndi makutidwe ndi okosijeni kukana. Imatha kugwira ntchito m'malo otentha kwambiri ndipo imatha kupirira kwambiri kutentha kwambiri.
2.Good makina katundu
CVD silicon carbide zokutiraali ndi kuuma kwakukulu komanso kukana bwino kuvala. Imateteza magawo achitsulo kuti asawonongeke komanso kuti asawonongeke, kukulitsa moyo wautumiki wa zinthuzo.
3. Kukhazikika kwabwino kwamankhwala
CVD silicon carbide zokutiraamalimbana kwambiri ndi mankhwala wamba monga zidulo, alkalis ndi mchere. Imakana kuukira kwa mankhwala ndi dzimbiri la gawo lapansi.
4. Coefficient yotsika kwambiri
CVD silicon carbide zokutiraali ndi coefficient yocheperako komanso yodzipangira bwino. Amachepetsa kukangana ndi kuvala komanso amathandizira kugwiritsa ntchito bwino zinthu.
5.Good matenthedwe madutsidwe
CVD silicon carbide zokutira zili ndi zabwino matenthedwe madutsidwe katundu. Imatha kuyendetsa kutentha mwachangu ndikuwongolera kutentha kwapakatikati pazitsulo.
6.Zabwino kwambiri zamagetsi zamagetsi
Chophimba cha CVD silicon carbide chili ndi zida zabwino zotchinjiriza magetsi ndipo zimatha kupewa kutayikira kwapano. Amagwiritsidwa ntchito kwambiri poteteza chitetezo cha zida zamagetsi.
7. makulidwe osinthika ndi kapangidwe
Mwa kuwongolera momwe zinthu zilili panthawi ya CVD ndi kuchuluka kwa kalambulabwalo, makulidwe ndi kapangidwe ka filimu ya silicon carbide imatha kusinthidwa. Izi zimapereka zosankha zambiri komanso kusinthasintha kwamapulogalamu osiyanasiyana.
Mwachidule, zokutira za CVD silicon carbide zimakhala ndi kutentha kwapamwamba kwambiri, zida zabwino zamakina, kukhazikika kwamankhwala, kutsika kwamphamvu kwapang'onopang'ono, kukhathamiritsa kwamafuta abwino komanso kutsekemera kwamagetsi. Zinthu izi zimapanga zokutira za CVD silicon carbide zomwe zimagwiritsidwa ntchito kwambiri m'magawo ambiri, kuphatikiza zamagetsi, optics, zakuthambo, makampani opanga mankhwala, etc.
Nthawi yotumiza: Mar-20-2024