Zinthu zina za organic ndi inorganic zimayenera kutenga nawo gawo popanga semiconductor. Kuphatikiza apo, popeza njirayi imachitika nthawi zonse mchipinda choyera ndi anthu, semiconductorzopyapyalaamaipitsidwa mosapeŵeka ndi zonyansa zosiyanasiyana.
Malingana ndi gwero ndi chikhalidwe cha zonyansa, zikhoza kugawidwa m'magulu anayi: particles, organic matter, ayoni zitsulo ndi oxides.
1. Tinthu:
Tinthu makamaka ndi ma polima, photoresists ndi etching zonyansa.
Zoipitsa zotere nthawi zambiri zimadalira mphamvu za intermolecular kutsatsa pamwamba pa mtanda, zomwe zimakhudza mapangidwe azithunzi zazithunzi ndi magawo amagetsi a chipangizo cha photolithography.
Zonyansa zoterezi zimachotsedwa makamaka pochepetsa kuchepetsa kukhudzana kwawo ndi malo amtandakudzera m'njira zakuthupi kapena zamankhwala.
2. Organic matter:
Magwero a zonyansa organic ndi lalikulu, monga mafuta khungu la munthu, mabakiteriya, makina mafuta, vacuum mafuta, photoresist, kuyeretsa zosungunulira, etc.
Zonyansa zoterezi nthawi zambiri zimapanga filimu yachilengedwe pamwamba pa chophatikiziracho kuti madzi oyeretsera asafike pamwamba pa mtanda, zomwe zimapangitsa kuti pakhale kuyeretsa kosakwanira.
Kuchotsa zonyansa zotere nthawi zambiri kumachitika mu gawo loyamba la kuyeretsa, makamaka pogwiritsa ntchito njira za mankhwala monga sulfuric acid ndi hydrogen peroxide.
3. Zitsulo:
Zitsulo zodziwika bwino zachitsulo zimaphatikizapo chitsulo, mkuwa, aluminiyamu, chromium, chitsulo chosungunuka, titaniyamu, sodium, potaziyamu, lithiamu, ndi zina zotero. Zomwe zimayambira ndizo ziwiya zosiyanasiyana, mapaipi, ma reagents a mankhwala, ndi kuipitsidwa kwachitsulo komwe kumapangidwa pamene kugwirizanitsa zitsulo kumapangidwa panthawi yokonza.
Zodetsa zamtunduwu nthawi zambiri zimachotsedwa ndi njira zama mankhwala mwa kupanga ma ion complexes achitsulo.
4. Oxide:
Pamene semiconductorzopyapyalaamakumana ndi malo okhala ndi okosijeni ndi madzi, wosanjikiza wachilengedwe wa oxide umapanga pamwamba. Filimu ya oxide iyi imalepheretsa njira zambiri popanga semiconductor komanso imakhala ndi zonyansa zina zachitsulo. Pazifukwa zina, apanga zolakwika zamagetsi.
Kuchotsa filimu ya okusayidiyi nthawi zambiri kumatsirizidwa ndi kulowetsedwa mu dilute hydrofluoric acid.
General kuyeretsa ndondomeko
Zonyansa zomwe zimayikidwa pamwamba pa semiconductorzopyapyalaakhoza kugawidwa m'magulu atatu: maselo, ayoni ndi atomiki.
Pakati pawo, mphamvu ya adsorption pakati pa zonyansa za mamolekyu ndi pamwamba pa chofufumitsa ndi chofooka, ndipo mtundu uwu wa particles wonyansa ndi wosavuta kuchotsa. Nthawi zambiri zimakhala zonyansa zamafuta zomwe zimakhala ndi mawonekedwe a hydrophobic, omwe angapereke masking kwa zonyansa za atomiki ndi atomiki zomwe zimawononga pamwamba pa zowotcha za semiconductor, zomwe sizingathandize kuchotsa zonyansa ziwirizi. Chifukwa chake, poyeretsa makina opangira ma semiconductor, zonyansa zama cell ziyenera kuchotsedwa kaye.
Choncho, ambiri ndondomeko ya semiconductormtandakuyeretsa ndondomeko ndi:
De-molecularization-deionization-de-atomization-deionized madzi rinsing.
Kuphatikiza apo, kuti muchotse wosanjikiza wachilengedwe wa oxide pamwamba pa chowotcha, gawo lonyowa la amino acid liyenera kuwonjezeredwa. Choncho, lingaliro la kuyeretsa ndiloyamba kuchotsa kuipitsidwa kwa organic pamtunda; ndiye sungunulani oxide wosanjikiza; potsiriza kuchotsa particles ndi zitsulo kuipitsidwa, ndi passivate pamwamba pa nthawi yomweyo.
Njira zoyeretsera wamba
Njira zama mankhwala nthawi zambiri zimagwiritsidwa ntchito poyeretsa zowotcha za semiconductor.
Kuyeretsa mankhwala kumatanthauza njira yogwiritsira ntchito ma reagents osiyanasiyana amankhwala ndi zosungunulira za organic kuti achite kapena kusungunula zonyansa ndi madontho amafuta pamwamba pa chophikacho kuti awononge zonyansa, ndiyeno muzimutsuka ndi madzi ambiri otentha komanso ozizira oyeretsedwa. malo oyera.
Kuyeretsa mankhwala kumatha kugawidwa m'makina onyowa komanso kuyeretsa mankhwala, komwe kutsukidwa kwamankhwala konyowa kumakhalabe kwakukulu.
Chonyowa mankhwala kuyeretsa
1. Kutsuka mankhwala onyowa:
Kuyeretsa kwamadzi kumaphatikizapo kumizidwa kwa njira, kupukuta pamakina, kuyeretsa akupanga, kuyeretsa kwa megasonic, kupopera mbewu mankhwalawa mozungulira, ndi zina zambiri.
2. Kumiza njira:
Kumiza m'madzi ndi njira yochotsera kuipitsidwa kwapamtunda pomiza kabati mu njira ya mankhwala. Ndi njira yomwe imagwiritsidwa ntchito kwambiri pakuyeretsa mankhwala onyowa. Njira zosiyanasiyana zingagwiritsidwe ntchito kuchotsa mitundu yosiyanasiyana ya zonyansa pamwamba pa chofufumitsa.
Nthawi zambiri, njirayi singachotseretu zonyansa pamwamba pa chophatikizikacho, kotero miyeso yakuthupi monga kutentha, ultrasound, ndi kusonkhezera nthawi zambiri imagwiritsidwa ntchito pomiza.
3. Kukolopa pamakina:
Kupukuta pamakina nthawi zambiri kumagwiritsidwa ntchito kuchotsa tinthu tating'ono kapena zotsalira za organic pamwamba pa mtanda. Zitha kugawidwa m'njira ziwiri:kupukuta pamanja ndi kupukuta ndi chopukuta.
Kukolopa pamanjandiye njira yosavuta yotsuka. A zosapanga dzimbiri burashi ntchito kugwira mpira ankawaviika anhydrous Mowa kapena solvents organic ndi mokoma opaka pamwamba pa yopyapyala mbali imodzi kuchotsa sera filimu, fumbi, zotsalira guluu kapena particles olimba. Njira imeneyi ndi yosavuta kuyambitsa zokala ndi kuipitsa kwambiri.
Chopukutacho chimagwiritsa ntchito makina ozungulira kuti azipaka pamwamba pa nsalu yopyapyala ndi burashi yofewa ya ubweya kapena burashi yosakanikirana. Njirayi imachepetsa kwambiri zokala pamkate. Chopukuta chothamanga kwambiri sichidzakankha chophikacho chifukwa chosowa kukangana kwamakina, ndipo chimatha kuchotsa kuipitsidwa mu poyambira.
4. Akupanga kuyeretsa:
Akupanga kuyeretsa ndi njira yoyeretsera yomwe imagwiritsidwa ntchito kwambiri mumakampani a semiconductor. Ubwino wake ndi kuyeretsa bwino, ntchito yosavuta, komanso imatha kuyeretsa zida ndi zida.
Njira yoyeretserayi ikugwiritsidwa ntchito ndi mafunde amphamvu akupanga (omwe amagwiritsidwa ntchito kwambiri akupanga pafupipafupi ndi 20s40kHz), ndipo magawo ochepa komanso wandiweyani adzapangidwa mkati mwamadzimadzi. Mbali yocheperako imatulutsa kuwira pafupifupi vacuum cavity. Pamene kuwira kwa patsekeke kutha, mphamvu ya m'deralo idzapangidwa pafupi ndi izo, ndikuphwanya zomangira za mankhwala mu mamolekyu kuti asungunuke zonyansa pamtunda. Akupanga kuyeretsa n'kothandiza kwambiri pochotsa insoluble kapena insoluble flux zatsalira.
5. Kuyeretsa kwa Megasonic:
Kuyeretsa kwa Megasonic sikungokhala ndi ubwino wa kuyeretsa kwa akupanga, komanso kumagonjetsa zofooka zake.
Kuyeretsa kwa Megasonic ndi njira yoyeretsera zophika pophatikiza mphamvu yamagetsi yamagetsi (850kHz) pafupipafupi ndi momwe amachitira ndi mankhwala oyeretsa. Pakuyeretsa, mamolekyu amadzimadzi amafulumizitsidwa ndi mafunde a megasonic (liwiro lothamanga kwambiri limatha kufika 30cmVs), ndipo mafunde othamanga kwambiri amadzimadzi amakhudzanso pamwamba pa mtandawo, kotero kuti zoipitsa ndi tinthu tating'onoting'ono tomwe timayikidwa pamwamba pa chitsulocho. zophika zimachotsedwa mokakamiza ndikulowetsa njira yoyeretsera. Kuwonjezera ma surfactants acidic pa njira yoyeretsera, kumbali imodzi, akhoza kukwaniritsa cholinga chochotsa tinthu tating'onoting'ono ndi zinthu zamoyo pamtunda wopukutira kupyolera mwa kutsekemera kwa ma surfactants; Komano, kudzera kusakanikirana kwa surfactants ndi chilengedwe acidic, akhoza kukwaniritsa cholinga chochotsa kuipitsidwa kwachitsulo pamwamba pa pepala lopukuta. Njirayi imatha nthawi imodzi kugwira ntchito yopukuta makina ndi kuyeretsa mankhwala.
Pakalipano, njira yoyeretsera ya megasonic yakhala njira yabwino yoyeretsera mapepala opukuta.
6. Njira yopopera mozungulira:
Njira yopopera rotary ndi njira yomwe imagwiritsa ntchito njira zamakina kutembenuza chopindikacho pa liwiro lalikulu, ndikupopera mosalekeza zamadzimadzi (madzi oyeretsedwa kwambiri kapena madzi ena oyeretsera) pamwamba pa chowotcha panthawi yozungulira kuti achotse zonyansa pa pamwamba pa mtanda.
Njirayi imagwiritsa ntchito kuipitsidwa pamwamba pa mtanda kuti isungunuke mumadzi opoperapo (kapena mankhwala amachitira nawo kuti asungunuke), ndipo amagwiritsa ntchito mphamvu ya centrifugal ya kusinthasintha kothamanga kwambiri kuti madzi omwe ali ndi zonyansa asiyane ndi pamwamba pa mtanda. mu nthawi.
Njira yopopera rotary ili ndi ubwino woyeretsa mankhwala, kuyeretsa makina amadzimadzi, ndi kupukuta mwamphamvu kwambiri. Panthawi imodzimodziyo, njirayi ikhoza kuphatikizidwanso ndi kuyanika. Pambuyo pa nthawi yoyeretsa madzi opopera, kupopera kwamadzi kumayimitsidwa ndipo gasi wopopera amagwiritsidwa ntchito. Panthawi imodzimodziyo, liwiro lozungulira likhoza kuwonjezeka kuti liwonjezeke mphamvu ya centrifugal kuti iwonongeke mwamsanga pamwamba pa mtanda.
7.Dry mankhwala kuyeretsa
Kuyeretsa kowuma kumatanthauza ukadaulo woyeretsa womwe sugwiritsa ntchito mayankho.
Matekinoloje oyeretsa owuma omwe akugwiritsidwa ntchito pano akuphatikiza: ukadaulo woyeretsa plasma, ukadaulo woyeretsa gawo la gasi, ukadaulo woyeretsa matabwa, ndi zina zambiri.
Ubwino wa kuyeretsa kowuma ndi njira yosavuta komanso palibe kuipitsidwa kwa chilengedwe, koma mtengo wake ndi wokwera ndipo kuchuluka kwa ntchito sikuli kwakukulu kwa nthawiyo.
1. Ukadaulo woyeretsa plasma:
Kuyeretsa kwa plasma nthawi zambiri kumagwiritsidwa ntchito pochotsa photoresist. Mpweya wochepa wa okosijeni umalowetsedwa mu plasma reaction system. Pansi pa mphamvu yamagetsi yamphamvu, mpweya umapanga plasma, yomwe imatulutsa oxidize photoresist mu mpweya wosasunthika ndipo imachotsedwa.
Tekinoloje yotsuka iyi ili ndi maubwino ogwiritsira ntchito mosavuta, kuchita bwino kwambiri, kuyeretsa pamwamba, kopanda zokopa, komanso kumathandizira kuwonetsetsa kuti zinthu zili bwino popanga degumming. Komanso, sagwiritsa ntchito zidulo, alkalis ndi zosungunulira organic, ndipo palibe mavuto monga kutaya zinyalala ndi kuipitsa chilengedwe. Chifukwa chake, imayamikiridwa kwambiri ndi anthu. Komabe, sichikhoza kuchotsa carbon ndi zina zosasunthika zazitsulo kapena zonyansa zachitsulo.
2. Ukadaulo woyeretsa gawo la gasi:
Kuyeretsa gawo la gasi kumatanthawuza njira yoyeretsera yomwe imagwiritsa ntchito gawo la mpweya wofanana ndi chinthu chomwe chili mumadzimadzi kuti chigwirizane ndi chinthu choipitsidwa pamwamba pa chofufumitsa kuti chikwaniritse cholinga chochotsa zonyansa.
Mwachitsanzo, mu njira ya CMOS, kuyeretsa kwawafa kumagwiritsa ntchito kulumikizana pakati pa gawo la mpweya wa HF ndi nthunzi yamadzi kuchotsa ma oxides. Nthawi zambiri, njira ya HF yokhala ndi madzi imayenera kutsagana ndi njira yochotsera tinthu, pomwe kugwiritsa ntchito ukadaulo woyeretsa gawo la mpweya wa HF sikufuna njira yotsatsira tinthu tating'ono.
Ubwino wofunikira kwambiri poyerekeza ndi njira yamadzi ya HF ndiyocheperako kugwiritsa ntchito mankhwala a HF komanso kuyeretsa kwambiri.
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Nthawi yotumiza: Aug-13-2024