Silicon carbide crystal kukula njira ndi ukadaulo wa zida

1. SiC crystal kukula luso njira

PVT (njira ya sublimation),

HTCVD (kutentha kwambiri kwa CVD),

LPE(njira yamadzimadzi)

ndi atatu ofananaSiC crystalnjira za kukula;

Njira yodziwika kwambiri mumakampani ndi njira ya PVT, ndipo kuposa 95% ya makristasi amodzi a SiC amakula ndi njira ya PVT;

IndustrializedSiC crystalkukula kwa ng'anjo kumagwiritsa ntchito njira yaukadaulo ya PVT yamakampani.

2. SiC crystal kukula ndondomeko

Powder synthesis-seed crystal treatment-crystal kukula-ingot annealing-mtandakukonza.

3. PVT njira kukulaSiC makristasi

Zopangira za SiC zimayikidwa pansi pa graphite crucible, ndipo kristalo ya mbewu ya SiC ili pamwamba pa graphite crucible. Posintha zotsekera, kutentha kwa SiC yaiwisi kumakhala kokwera komanso kutentha kwa kristalo wambewu kumakhala kotsika. The SiC zopangira pa kutentha sublimates ndi kuwola mu gasi gawo zinthu, amene amatumizidwa ku mbewu kristalo ndi kutentha kutsika ndi crystallize kupanga SiC makhiristo. Kukula koyambira kumaphatikizapo njira zitatu: kuwonongeka ndi kutsitsa kwazinthu zopangira, kusamutsa misa, ndi crystallization pa makhiristo ambewu.

Kuwola ndi sublimation ya zipangizo:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Posamutsa misa, mpweya wa Si umachitanso ndi khoma la graphite crucible kupanga SiC2 ndi Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Pamwamba pa kristalo wa mbewu, magawo atatu a gasi amakula kudzera m'njira ziwiri zotsatirazi kuti apange makristalo a silicon carbide:

SiC2_(g)+ Si2C_(g)=3SiC_(s)

Si_(g)+ SiC2_(g)=2SiC_(S)

4. PVT njira kukula SiC galasi kukula zipangizo luso njira

Pakalipano, kutentha kwa induction ndi njira yodziwika bwino yaukadaulo ya PVT njira SiC crystal kukula ng'anjo;

Kutentha kwakunja kwa coil ndi kutentha kwa ma graphite ndi njira yachitukukoSiC crystalng'anjo za kukula.

5. 8-inchi SiC induction kutentha ng'anjo kukula

(1) Kuwotha motographite crucible kutentha chinthukudzera mu kulowetsa maginito; kuyang'anira gawo la kutentha posintha mphamvu yotenthetsera, malo a koyilo, ndi kapangidwe kake;

(2) Kutentha graphite crucible kudzera graphite kukana Kutentha ndi matenthedwe matenthedwe conduction; kuwongolera gawo la kutentha posintha momwe chowotchera cha graphite chimayendera, mawonekedwe a chowotcha, ndi kuwongolera komwe kulipo;