Zigawo za graphite zapamwamba ndizofunikira kwambirinjira mu semiconductor, LED ndi makampani dzuwa. Zopereka zathu zimachokera ku graphite consumables kumadera otentha a kristalo (zotentha, crucible susceptors, insulation), ku zigawo za graphite zolondola kwambiri za zida zopangira zopyapyala, monga silicon carbide yokutidwa ndi graphite susceptors a Epitaxy kapena MOCVD. Apa ndipamene graphite yathu yapadera imayamba kugwira ntchito: graphite ya isostatic ndiyofunikira kwambiri popanga zigawo za semiconductor. Izi zimapangidwa mu "malo otentha" potentha kwambiri panthawi yotchedwa epitaxy, kapena MOCVD. Chonyamulira chozungulira chomwe zopyapyalazo zimakutidwa ndi riyakitala, zimakhala ndi silicon carbide-yakutidwa ndi isostatic graphite. Chokhacho choyera kwambiri, chofanana ndi graphite chomwe chimakwaniritsa zofunikira kwambiri pakuphimba.
Tmfundo yaikulu ya kukula kwa LED epitaxial wafer ndi: pa gawo lapansi (makamaka safiro, SiC ndi Si) amatenthedwa kutentha koyenera, zinthu za gasi InGaAlP zimatumizidwa ku gawo lapansi mwadongosolo kuti zikule filimu imodzi ya kristalo. Pakalipano, luso la kukula kwa LED epitaxial wafer makamaka utenga organic zitsulo mankhwala nthunzi mafunsidwe.
LED epitaxial gawo lapansi zinthundiye mwala wapangodya wa chitukuko chaukadaulo chamakampani owunikira a semiconductor. Zida zosiyanasiyana zapansi panthaka zimafunikira ukadaulo wosiyanasiyana wa kukula kwa epitaxial wafer, ukadaulo wa chip processing ndi ukadaulo woyika zida. Zida zam'munsi zimatsimikizira njira yopangira ukadaulo wowunikira wa semiconductor.
Makhalidwe a LED epitaxial wafer gawo lapansi kusankha zinthu:
1. Zinthu za epitaxial zimakhala ndi mawonekedwe a kristalo omwewo kapena ofanana ndi gawo lapansi, kusagwirizana kwazing'ono kosalekeza, crystallinity yabwino komanso kuchepa kwachilema.
2. Makhalidwe abwino a mawonekedwe, omwe amathandiza kuti nucleation ya epitaxial zipangizo ndi adhesion amphamvu
3. Ili ndi kukhazikika kwamankhwala abwino ndipo sikophweka kuwola ndikuwononga kutentha ndi mpweya wa kukula kwa epitaxial
4. Kuchita bwino kwa kutentha, kuphatikizapo kutsekemera kwabwino kwa kutentha ndi kusagwirizana kwa kutentha
5. Ma conductivity abwino, amatha kukhala apamwamba ndi apansi 6, mawonekedwe abwino a kuwala, ndipo kuwala kopangidwa ndi chipangizo chopangidwa sikumatengedwa pang'ono ndi gawo lapansi.
7. Zabwino zamakina ndi kukonza kosavuta kwa zida, kuphatikiza kupatulira, kupukuta ndi kudula
8. Mtengo wotsika.
9. Kukula kwakukulu. Kawirikawiri, m'mimba mwake sikuyenera kupitirira 2 mainchesi.
10. Ndikosavuta kupeza gawo lapansi lokhazikika (pokhapokha ngati pali zofunikira zina zapadera), ndipo mawonekedwe a gawo lapansi ofanana ndi dzenje la tray la zida za epitaxial sizovuta kupanga eddy pano osakhazikika, kuti akhudze khalidwe la epitaxial.
11. Pachiyambi chosakhudza khalidwe la epitaxial, machinability a gawo lapansi adzakwaniritsa zofunikira za chip ndi kulongedza kachitidwe momwe zingathere.
Ndizovuta kwambiri kuti kusankha kwa gawo lapansi kukwaniritse mbali khumi ndi imodzi zomwe zili pamwambazi nthawi imodzi. Choncho, pakali pano, tingathe azolowere R & D ndi kupanga semiconductor kuwala-emitting zipangizo pa magawo osiyanasiyana kudzera kusintha kwa epitaxial kukula luso ndi kusintha chipangizo processing luso. Pali zida zambiri zagawo la kafukufuku wa gallium nitride, koma pali magawo awiri okha omwe angagwiritsidwe ntchito popanga, omwe ndi safiro Al2O3 ndi silicon carbide.Magawo a SiC.
Nthawi yotumiza: Feb-28-2022