SiC makutidwe ndi okosijeni - ❖ kuyanika kugonjetsedwa kunakonzedwa pamwamba pa graphite ndi ndondomeko ya CVD

SiC ❖ kuyanika akhoza kukonzekera ndi mankhwala nthunzi mafunsidwe (CVD), kalambulabwalo kusintha, plasma kupopera mbewu mankhwalawa, etc. The ❖ kuyanika okonzedwa ndi CHEMICAL nthunzi mafunsidwe ndi yunifolomu ndi yaying'ono, ndipo ali designability wabwino. Kugwiritsa ntchito methyl trichlorsilane. (CHzSiCl3, MTS) monga gwero la silicon, zokutira za SiC zokonzedwa ndi njira ya CVD ndi njira yokhwima yogwiritsira ntchito zokutira izi.
SiC ❖ kuyanika ndi graphite ndi zabwino ngakhale mankhwala, kusiyana kwa matenthedwe coefficient kukula pakati pawo ndi yaing'ono, ntchito SiC ❖ kuyanika akhoza bwino kusintha avale kukana ndi makutidwe ndi okosijeni kukana graphite zakuthupi. Pakati pawo, chiŵerengero cha stoichiometric, kutentha kwazomwe zimachitika, mpweya wa dilution, mpweya wonyansa ndi zina zimakhala ndi chikoka chachikulu pa zomwe zimachitika.