Waferkudula ndi imodzi mwamalumikizidwe ofunikira pakupanga mphamvu za semiconductor. Gawo ili lapangidwa kuti lilekanitse molondola mabwalo ophatikizika kapena tchipisi kuchokera ku zowotcha za semiconductor.
Kiyi kumtandakudula ndikutha kulekanitsa tchipisi tating'ono pomwe ndikuwonetsetsa kuti zida zolimba ndi mabwalo ophatikizidwamtandasizikuwonongeka. Kupambana kapena kulephera kwa njira yodulira sikumangokhudza khalidwe lolekanitsa ndi zokolola za chip, komanso zimagwirizana mwachindunji ndi mphamvu ya ntchito yonse yopangira.
▲ Mitundu itatu yodziwika bwino yodula mtanda | Source: KLA CHINA
Panopa, wambamtandanjira zodulira zimagawidwa m'magulu awiri:
Kudula masamba: mtengo wotsika, womwe nthawi zambiri umagwiritsidwa ntchito kukhuthalazopyapyala
Kudula kwa laser: mtengo wokwera, womwe nthawi zambiri umagwiritsidwa ntchito ngati zopyapyala zokhala ndi makulidwe opitilira 30μm
Kudula kwa plasma: mtengo wokwera, zoletsa zambiri, zomwe nthawi zambiri zimagwiritsidwa ntchito ngati zopyapyala zokhala ndi makulidwe osakwana 30μm
Kudula masamba pamakina
Kudula tsamba ndi njira yodula motsatira mzere wa mlembi pogwiritsa ntchito grinding disk (tsamba) yothamanga kwambiri. Tsambali nthawi zambiri limapangidwa ndi zinthu za diamondi zonyezimira kapena zowonda kwambiri, zoyenera kudulidwa kapena kupukuta pa zowotcha za silicon. Komabe, monga njira yodulira makina, kudula masamba kumadalira kuchotsa zinthu zakuthupi, zomwe zingapangitse kuti chipwirikiti chiphwanyike kapena kuphwanyidwa kwa chip, motero zimakhudza khalidwe la mankhwala ndi kuchepetsa zokolola.
Ubwino wa chinthu chomaliza chomwe chimapangidwa ndi makina ocheka amakhudzidwa ndi magawo angapo, kuphatikiza kuthamanga, makulidwe a tsamba, m'mimba mwake, komanso kuthamanga kwa tsamba.
Kudula kwathunthu ndi njira yofunika kwambiri yodulira tsamba, yomwe imadulatu chogwirira ntchito podula kuzinthu zokhazikika (monga tepi yodula).
▲ Mawotchi odula-wodula | Network source network
Kudula theka ndi njira yopangira yomwe imapanga poyambira podula pakati pa chogwirira ntchito. Popitiriza kuchita grooving, zisa ndi mfundo zooneka ngati singano zimatha kupangidwa.
▲ Makina odula-theka-theka | Network source network
Kudula pawiri ndi njira yopangira yomwe imagwiritsa ntchito macheka odula pawiri okhala ndi masipingo awiri kuti adulire kwathunthu kapena theka pamizere iwiri yopangira nthawi imodzi. Macheka awiri ocheka amakhala ndi nkhwangwa ziwiri zopota. Kupititsa patsogolo kwakukulu kungapezeke mwa njirayi.
▲ Mawotchi odula-kawiri kudula | Network source network
Step cut imagwiritsa ntchito macheka ocheka awiri okhala ndi zopota ziwiri kuti adulidwe kwathunthu ndi theka mu magawo awiri. Gwiritsani ntchito masamba okometsedwa podula waya wosanjikiza pamwamba pa chophatikizika ndi masamba okometsedwa kwa kristalo wotsala wa silicon kuti mukwaniritse kukonza kwapamwamba.
▲ Kudula masamba pamakina - kudula masitepe | Network source network
Kudula kwa bevel ndi njira yopangira yomwe imagwiritsa ntchito tsamba lokhala ndi V-wongopeka m'mphepete mwa theka lodulidwa kuti mudule chophatikizira mu magawo awiri panthawi yodulira. The chamfering ndondomeko ikuchitika pa kudula ndondomeko. Choncho, mkulu nkhungu mphamvu ndi apamwamba processing chingapezeke.
▲ Kudula masamba pamakina - kudula kwa bevel | Network source network
Kudula kwa laser
Kudula kwa laser ndi ukadaulo wosalumikizana wawafer womwe umagwiritsa ntchito mtengo wolunjika wa laser kuti ulekanitse tchipisi tating'onoting'ono kuchokera ku zowotcha za semiconductor. Mtsinje wamphamvu kwambiri wa laser umayang'ana pamwamba pa chowotchacho ndipo umasanduka nthunzi kapena kuchotsa zinthu motsatira mzere wodulira womwe udakonzedweratu kudzera munjira zowola kapena kuwonongeka kwamafuta.
▲ Chithunzi chodula laser | Chithunzi chojambula: KLA CHINA
Mitundu ya ma lasers omwe amagwiritsidwa ntchito kwambiri pano akuphatikiza ma ultraviolet lasers, infrared lasers, ndi femtosecond lasers. Pakati pawo, ma lasers a ultraviolet nthawi zambiri amagwiritsidwa ntchito pochotsa kuzizira chifukwa champhamvu yawo ya photon, ndipo malo omwe amakhudzidwa ndi kutentha ndi ochepa kwambiri, omwe amatha kuchepetsa chiwopsezo cha kuwonongeka kwamafuta ophatikizika ndi tchipisi tozungulira. Ma laser a infrared ndi oyenerera bwino zowotcha zowonda chifukwa amatha kulowa mozama muzinthuzo. Ma lasers a Femtosecond amakwaniritsa kuchotsedwa kwazinthu zolondola kwambiri komanso kothandiza komanso kutengera kutentha kosasunthika kudzera pamagetsi amtundu wa ultrashort.
Kudula kwa laser kuli ndi zabwino zambiri kuposa kudula masamba achikhalidwe. Choyamba, monga njira yopanda kukhudzana, kudula kwa laser sikufuna kukakamizidwa kwa thupi pa mtanda, kuchepetsa kugawanika ndi mavuto osokonezeka omwe amapezeka mu kudula makina. Izi zimapangitsa kudula kwa laser kukhala koyenera kwambiri pokonza zowonda zosalimba kapena zowonda kwambiri, makamaka zomwe zimakhala ndi zovuta kapena mawonekedwe abwino.
▲ Chithunzi chodula laser | Network source network
Kuphatikiza apo, kulondola kwapamwamba komanso kulondola kwa kudula kwa laser kumathandizira kuyang'ana mtengo wa laser mpaka kukula kochepa kwambiri, kuthandizira njira zodulira zovuta, ndikukwaniritsa kulekanitsa kocheperako pakati pa tchipisi. Izi ndizofunikira kwambiri pazida zapamwamba za semiconductor zomwe zikucheperachepera.
Komabe, kudula kwa laser kumakhalanso ndi malire. Poyerekeza ndi kudula masamba, ndi pang'onopang'ono komanso okwera mtengo, makamaka pakupanga kwakukulu. Kuphatikiza apo, kusankha mtundu woyenera wa laser ndi kukhathamiritsa magawo kuti muwonetsetse kuchotsedwa kwa zinthu moyenera komanso malo ochepa omwe amakhudzidwa ndi kutentha kungakhale kovuta pazinthu zina ndi makulidwe.
Laser ablation kudula
Pa kudula laser ablation, mtengo laser ndi ndendende lolunjika pa malo otchulidwa pamwamba pa yopyapyala, ndi laser mphamvu motsogozedwa motsatira anakonzeratu kudula chitsanzo, pang'onopang'ono kudula mwa yopyapyala mpaka pansi. Kutengera zofunikira zodulira, opareshoni iyi imachitidwa pogwiritsa ntchito laser pulsed kapena laser wave wave. Pofuna kupewa kuwonongeka kwa chowotcha chifukwa cha kutentha kwambiri kwa laser komweko, madzi ozizira amagwiritsidwa ntchito kuziziritsa ndikuteteza chophimbacho kuti chiwonongeke. Panthawi imodzimodziyo, madzi ozizira amathanso kuchotsa bwino tinthu tating'onoting'ono timene timadula, kuteteza kuipitsidwa ndikuonetsetsa kuti kudula bwino.
Kudula kosawoneka kwa laser
Laser amathanso kuyang'ana kusamutsa kutentha mu thupi lalikulu la chophatikizira, njira yotchedwa "osawoneka laser kudula". Kwa njirayi, kutentha kochokera ku laser kumapanga mipata mumayendedwe a olemba. Madera ofowokawa amapezanso mphamvu yolowera yofananira mwa kuswa pamene chowotchacho chatambasulidwa.
▲ Main ndondomeko ya laser wosaoneka kudula
Kudula kosaoneka ndi njira yamkati yamayamwidwe a laser, m'malo mwa laser ablation pomwe laser imatengedwa pamwamba. Ndi kudula kosaoneka, laser mtengo mphamvu ndi wavelength kuti ndi theka-mawonekedwe kwa wafer gawo lapansi zakuthupi ntchito. Njirayi imagawidwa m'magawo awiri akuluakulu, imodzi ndi njira yopangira laser, ndipo ina ndi njira yolekanitsa makina.
▲Mtsinje wa laser umapangitsa kuti pakhale kuphulika pansi pa nsalu yopyapyala, ndipo kutsogolo ndi kumbuyo sikukhudzidwa | Network source network
Mu sitepe yoyamba, pamene mtengo wa laser umayang'ana chophikacho, mtengo wa laser umayang'ana pa mfundo inayake mkati mwa chophikacho, ndikupanga malo osweka mkati. Mphamvu yamtengowo imapangitsa kuti ming'alu ipangike mkati mwake, yomwe sinapitirirebe kukhuthala konse kwa mtandawo mpaka pamwamba ndi pansi.
▲ Poyerekeza 100μm wandiweyani silicon wafers kudula ndi tsamba njira ndi laser wosaoneka kudula njira | Network source network
Mu gawo lachiwiri, tepi ya chip yomwe ili pansi pa chophikacho imakulitsidwa mwakuthupi, zomwe zimayambitsa kupsinjika kwa ming'alu mkati mwa chowotcha, chomwe chimapangitsidwa munjira ya laser mu sitepe yoyamba. Kupsyinjika kumeneku kumapangitsa kuti ming'aluyo ipitirire molunjika mpaka kumtunda ndi kumunsi kwa chophatikiziracho, kenako ndikugawaniza mtandawo kukhala tchipisi motsatira mfundo zodulazi. Mu kudula kosaoneka, kudula theka kapena kumunsi-mbali-kudula kumagwiritsidwa ntchito kuthandizira kulekanitsa zowomba kukhala tchipisi kapena tchipisi.
Ubwino waukulu wa kudula kosaoneka kwa laser pa laser ablation:
• Palibe chozizira chofunikira
• Palibe zinyalala zopangidwa
• Palibe madera okhudzidwa ndi kutentha omwe angawononge mabwalo okhudzidwa
Kudula kwa plasma
Kudula kwa plasma (komwe kumadziwikanso kuti plasma etching kapena dry etching) ndiukadaulo wapamwamba wodula wawafer womwe umagwiritsa ntchito reactive ion etching (RIE) kapena deep reactive ion etching (DRIE) kuti alekanitse tchipisi tating'onoting'ono kuchokera ku zowotcha za semiconductor. Ukadaulo umakwaniritsa kudula pochotsa zinthu m'mizere yokonzedweratu pogwiritsa ntchito plasma.
Panthawi yodula plasma, chowotcha cha semiconductor chimayikidwa m'chipinda chopanda mpweya, kusakanikirana kwa gasi komwe kumayendetsedwa kumalowetsedwa m'chipindamo, ndipo gawo lamagetsi limagwiritsidwa ntchito kuti lipange plasma yomwe ili ndi ma ion ambiri komanso ma radicals ambiri. Mitundu yotenthekayi imalumikizana ndi zinthu zopyapyala ndikuchotsa zinthu zopyapyala motsatira mzere wa mlembi kudzera pakuphatikizana kwamankhwala komanso kulankhulirana.
Ubwino waukulu wa kudula kwa plasma ndikuti umachepetsa kupsinjika kwamakina pa chowotcha ndi chip ndikuchepetsa kuwonongeka komwe kungachitike chifukwa chokhudzana ndi thupi. Komabe, njirayi ndi yovuta kwambiri komanso imatenga nthawi yambiri kuposa njira zina, makamaka pogwira ntchito ndi zowonda zowonda kwambiri kapena zipangizo zomwe zimakhala ndi kukana kwakukulu, kotero kuti ntchito yake pakupanga zinthu zambiri imakhala yochepa.
▲ Network source source
Pakupanga ma semiconductor, njira yodulira yawafer iyenera kusankhidwa kutengera zinthu zambiri, kuphatikiza katundu wawafer, kukula kwa chip ndi geometry, kumafunikira kulondola komanso kulondola, komanso mtengo wonse wopanga komanso kuchita bwino.
Nthawi yotumiza: Sep-20-2024