Zoyambira za SiC zokutira za graphite zimagwiritsidwa ntchito kuthandizira ndikutenthetsa magawo akristalo amodzi mu zida zachitsulo-organic chemical vapor deposition (MOCVD). Kukhazikika kwamafuta, kufanana kwamafuta ndi magawo ena a magwiridwe antchito a SiC yokutidwa ndi graphite base amatenga gawo lalikulu pakukula kwazinthu za epitaxial, chifukwa chake ndiye chigawo chachikulu cha zida za MOCVD.
Popanga zowotcha, zigawo za epitaxial zimamangidwanso pazinthu zina zowotcha kuti zithandizire kupanga zida. Zipangizo zamakono zopangira kuwala kwa LED ziyenera kukonzekera zigawo za epitaxial za GaAs pazitsulo za silicon; SiC epitaxial wosanjikiza wakula pa conductive SiC gawo lapansi pomanga zipangizo monga SBD, MOSFET, etc., kwa voteji mkulu, mkulu panopa ndi ntchito zina mphamvu; GaN epitaxial layer imamangidwa pa gawo laling'ono la SiC kuti ipititse patsogolo kupanga HEMT ndi zida zina zamagwiritsidwe ntchito a RF monga kulumikizana. Njirayi ndi yosasiyanitsidwa ndi zida za CVD.
Mu zida za CVD, gawo lapansi silingayikidwe mwachindunji pazitsulo kapena kungoyikidwa pa maziko a epitaxial deposition, chifukwa imakhudza kuyenda kwa gasi (yopingasa, yopingasa), kutentha, kuthamanga, kukonza, kukhetsa zoipitsa ndi zina. chikoka zinthu. Choncho, m'pofunika kugwiritsa ntchito maziko, ndiyeno ikani gawo lapansi pa chimbale, ndiyeno ntchito CVD luso kuti mafunsidwe epitaxial pa gawo lapansi, amene ndi SiC TACHIMATA graphite m'munsi (omwe amadziwikanso kuti thireyi).
Zoyambira za SiC zokutira za graphite zimagwiritsidwa ntchito kuthandizira ndikutenthetsa magawo akristalo amodzi mu zida zachitsulo-organic chemical vapor deposition (MOCVD). Kukhazikika kwamafuta, kufanana kwamafuta ndi magawo ena a magwiridwe antchito a SiC yokutidwa ndi graphite base amatenga gawo lalikulu pakukula kwazinthu za epitaxial, chifukwa chake ndiye chigawo chachikulu cha zida za MOCVD.
Metal-organic chemical vapor deposition (MOCVD) ndiye ukadaulo wodziwika bwino pakukulitsa mafilimu a GaN mu LED ya buluu. Ili ndi ubwino wa ntchito yosavuta, kukula kosinthika komanso kuyera kwakukulu kwa mafilimu a GaN. Monga gawo lofunikira mu chipinda chochitiramo zida za MOCVD, maziko omwe amagwiritsidwa ntchito pakukula kwa filimu ya GaN epitaxial ayenera kukhala ndi ubwino wa kukana kutentha kwapamwamba, kutentha kwa yunifolomu, kukhazikika kwa mankhwala, kukana kwamphamvu kwa kutentha, etc. zomwe zili pamwambazi.
Monga chimodzi mwa zigawo zikuluzikulu za MOCVD zida, graphite m'munsi ndi chonyamulira ndi Kutentha thupi la gawo lapansi, amene mwachindunji chimatsimikizira kufanana ndi chiyero cha filimu zakuthupi, kotero khalidwe lake mwachindunji zimakhudza yokonza pepala epitaxial, ndi nthawi yomweyo. nthawi, ndi kuwonjezeka kwa chiwerengero cha ntchito ndi kusintha kwa zinthu zogwirira ntchito, zimakhala zosavuta kuvala, zomwe zimakhala zogwiritsidwa ntchito.
Ngakhale graphite ali kwambiri matenthedwe matenthedwe madutsidwe ndi bata, ali ndi mwayi wabwino monga m'munsi chigawo chimodzi cha MOCVD zida, koma mu ndondomeko kupanga, graphite adzakhala dzimbiri ufa chifukwa zotsalira za mpweya zikuwononga ndi zitsulo organics, ndi moyo utumiki wa graphite maziko adzachepetsedwa kwambiri. Pa nthawi yomweyo, kugwa graphite ufa adzachititsa kuipitsa kwa Chip.
Kuwonekera kwa ukadaulo wokutira kungapereke kukhazikika kwa ufa pamwamba, kukulitsa matenthedwe matenthedwe, ndikufananiza kugawa kwa kutentha, komwe kwakhala ukadaulo waukulu kuthetsa vutoli. Graphite m'munsi mu MOCVD zida ntchito chilengedwe, graphite m'munsi ❖ kuyanika pamwamba ayenera kukwaniritsa makhalidwe awa:
(1) Mtsinje wa graphite ukhoza kukulungidwa bwino, ndipo kachulukidwe kake ndi bwino, mwinamwake maziko a graphite ndi osavuta kuti awonongeke mu gasi wowononga.
(2) Kuphatikizika mphamvu ndi graphite m'munsi ndi mkulu kuonetsetsa kuti ❖ kuyanika si kophweka kugwa pambuyo kangapo kutentha ndi kutentha otsika mkombero.
(3) Imakhala ndi kukhazikika kwamankhwala kuti ipewe ❖ kuyanika pa kutentha kwambiri komanso mlengalenga wowononga.
SiC ili ndi ubwino wa kukana kwa dzimbiri, kutsekemera kwapamwamba kwa kutentha, kutentha kwa kutentha ndi kukhazikika kwa mankhwala, ndipo imatha kugwira ntchito bwino mu GaN epitaxial atmosphere. Kuphatikiza apo, kuchuluka kwa kutentha kwa SiC kumasiyana pang'ono ndi graphite, kotero SiC ndiye chinthu chomwe chimakondedwa kwambiri pakuphimba pamwamba pa graphite base.
Pakali pano, SiC wamba makamaka 3C, 4H ndi 6H mtundu, ndi SiC ntchito mitundu kristalo osiyana. Mwachitsanzo, 4H-SiC imatha kupanga zida zamphamvu kwambiri; 6H-SiC ndiyokhazikika kwambiri ndipo imatha kupanga zida zamagetsi zamagetsi; Chifukwa cha mawonekedwe ake ofanana ndi GaN, 3C-SiC ingagwiritsidwe ntchito kupanga GaN epitaxial layer ndikupanga zipangizo za SiC-GaN RF. 3C-SiC imadziwikanso kuti β-SiC, ndipo ntchito yofunika kwambiri ya β-SiC imakhala ngati filimu ndi zokutira, kotero β-SiC pakali pano ndizofunikira kwambiri zopangira.
Nthawi yotumiza: Aug-04-2023